Stacked semiconductor device and method of manufacturing thereof
Abstract
A stacked-type semiconductor device has a reduced overall height and an improved reliability in the mechanical strength of the stacked structure. The semiconductor device also has an improved heat release characteristic. A first interposer has a surface on which first electrode pads are formed and a first semiconductor element is mounted with a circuit forming surface facing the first interposer. A second interposer has a surface on which second electrode pads are formed and a second semiconductor element is mounted with a circuit forming surface facing the second interposer. External connection terminals are provided on a surface of the second interposer opposite to the surface on which the second semiconductor element is mounted. The first and second interposers are electrically connected to each other by conductive members provided therebetween. A back surface of the first semiconductor element and a back surface of the second semiconductor element are fixed to each other by an adhesive.

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1 sheet
Sheet 1
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| EP0571749A1 | Cites | European Patent Office (EPO) | Y | Search report | 9,22 |
| DE10029259A1 | Cites | Germany | Y | Search report | 1-14,17-19,28 |
| US2001006252A1 | Cites | United States of America | Y | Search report | 4,11,24 |
| US2002031864A1 | Cites | United States of America | Y | Search report | 1-14,23,28 |
| US6025648A | Cites | United States of America | XY | Search report | 15,16,20,21,25-28 |
| PATENT ABSTRACTS OF JAPAN vol. 2000, no. 25 12 April 2001 (2001-04-12) | Non-patent | – | – | Search report | – |
10 members in 6 offices; this record represents the family
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 2002117534 | Japan | – | |
| 2002117534 | Japan | A |
Members10
| Document | Office | Kind | |
|---|---|---|---|
| EP1355352A2 | European Patent Office (EPO) | A2 | |
| US2003197260A1 | United States of America | A1 | |
| CN1452245A | China | A | |
| KR20030083553A | Republic of Korea | A | |
| JP2003318361A | Japan | A | |
| TW569411B | Taiwan Province of China | B | |
| US6781241B2 | United States of America | B2 | |
| US2004188855A1 | United States of America | A1 | |
| EP1355352A3This record | European Patent Office (EPO) | A3 | |
| US6960827B2 | United States of America | B2 |
10 legal events, as the office reported them to INPADOC
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|---|---|---|
| Application deemed to be withdrawnWithdrawn18D | 18D | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA | STAA | |
| Designation fees paidAKX | AKX | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1355352
- Application
- 30060511
Titles3
- German
- Stapelhalbleiterbauteil und seine Herstellung
- English
- Stacked semiconductor device and method of manufacturing thereof
- French
- Dispositif semi-conducteur empilé et méthode de fabrication associée
Classification
- CPC, 19
- H10W90/00
- H10W72/00
- H10W90/732
- H10W90/734
- H10W72/07251
- H10W72/20
- H10W90/724
- H10W90/754
- H10W72/877
- H10W74/15
- H10W72/884
- H10W90/721
- H10W90/722
- H10W90/271
- H10W90/22
- H10W90/297
- H10W70/60
- H10W90/288
- H10W72/5522
- IPC, 5
- H01L25 18
- H01L25 065
- H01L25 07
- H01L25 10
- H01L25 11
Designated states31
- Contracting states, 27
- Austria
- Belgium
- Bulgaria
- Switzerland
- Cyprus
- Czechia
- Germany
- Denmark
- Estonia
- Spain
- Finland
- France
- United Kingdom
- Greece
- Hungary
- Ireland
- Italy
- Liechtenstein
- Luxembourg
- Monaco
- Netherlands (Kingdom of the)
- Portugal
- Romania
- Sweden
and 3 moreShow fewer
- Slovenia
- Slovakia
- Türkiye
- Extension states, 4
- Albania
- Lithuania
- Latvia
- North Macedonia