Inspecting system for particle-optical imaging of an object, deflection device for charged particles and method for operating the same

An examination system is proposed for imaging an object that can be arranged in an object plane, comprising illumination means (31) for supplying energy to a limited field of the object (3) such that charged particles emerge from locations in the field, the field being in the plane of the field Object (3) is displaceable, a deflector means (23, 24) for providing a changeable deflection field, in order to lead at locations of a selectable area (7) of the object (3) discharged charged particles through a fixed predetermined beam cross section (27), and a such a spatially resolving detector (5) arranged in the beam path, that the charged particles hit it after passing through the first deflector device (23, 24),wherein particles emerging from different locations of the region (7) are imaged on the exit locations in different locations of the spatially resolving detector (5).