Apparatus for mounting an optical element

The invention relates to a device for the storage of an optical in more detail in the preamble of claim 1 after the element defined type.

Optical elements, such as lenses, are in particular lenses for semiconductor lithography with respect to their mechanical Reference to mount very closely and adjust. So is eg for lenses, the optical axis with the ideal mechanical to bring axis as exactly as possible.

In the earlier application P 199 08 554.4 of the applicant is a Three-point support on solid hinges with solid transitions known which adjustable by manipulators are. A three-point mounting is also known from US-PS 3,917,385 known.

The present invention is based on the task so far known installation and Justagelagerungstechnik by improve integrated feinabstimmende functional unit to to achieve a higher positioning accuracy.

According to the invention this object is achieved by the characterizing Part of claim 1 the features mentioned solved.

The mounted optical element is arranged by three circumferentially Attachment sites statically determined maintained. By an adjustment to the T-shaped junctions of the solid-state joints can now the inner frame of the optical element on Lower or relocate extent locally. If this at all three Transitions the same force and the same direction of displacement is applied to the T-supports, then the optical Element along its optical axis (z-axis) is shifted. Different forces or shifts to the links corrected or adjusted can tilts the optical axis will.

A very advantageous structural configuration for storage the optical element can consist in that the inner holder, the outer mount and the solid joints integrally are formed, wherein the separation is effected by separation cuts.

The cuts may eg manufactured in eroding will.

A very advantageous application for the invention Device is in lenses in which optical elements in their installation position of the main axis, ie the vertical of the differ. In that case, the optical element tends due to its own weight, in particular at soft Links to tilt with respect to the mechanical reference. About the device of the invention can then be means as mounted externally or accessible sensors determine the different location and then the optical element Reset back to its original location.

With proper training and accessibility of the manipulators, which, for example hydraulic or pneumatic actuators may have, as well as mechanical or electrical, the inventive device can also active in the used optical functional group in order during operation be able to adjust occurring aberrations.

An exemplary embodiment of the invention is based the drawing described in principle.

It shows:<dl tsize="7"><dt>figure 1</dt><dd>a schematic diagram of the three-point support with the solid joints invention in perspective representation; </dd><dt>figure 2</dt><dd>fragmentary an enlarged view of Solid joint in T-shape in section;</dd><dt>figure 3</dt><dd>a schematic diagram of the force of the adjustment; and</dd><dt>figure 4</dt><dd>a schematic diagram of an optical element in deviates from the neutral axis position.</dd></dl>

As shown in Figures 1 and 2, a lens 1 as mounted optical element in an inner mount 2, which on three distributed over the periphery are arranged solid joints 3 is connected to an outer mount. 4 For reasons of clarity is in the Figure 1, the outer mount 4 only at the connection points indicated. Moreover, Figure 2 shows an Solid joint in T-shape with the T-carrier 5 on the Top is and runs horizontally, while the T-Prop 6 extends vertically. In the figure 1, however, is the reverse situation represented. As can be seen, are the solid joints 3 only approximate and, in principle, a T-shape is, wherein connection points 7 and 8 between the inner mount 2 and the outer mount 4 in each case at the outer ends of the T-beam 5 are. In the area of ​​the lower end of each T-Prop 6 acts on a non-illustrated manipulator 9, the in the outer mount is mounted. 4 A lever arm 10 of the manipulator 9 exerts tensile and / or compressive forces on the T-Prop 6 out.

As 3 is seen from the motor representation of the figure, acts be a force on the T-Prop 6 in the direction of actuation 11 due to the kinematics of the T-shape in a direction of displacement in Arrow 12 of the inner socket 2 from. can in this way the inner rim 2 and thus the lens 1 respectively locally Lower or relocate the corresponding connection point, whereby the lens 1 with respect to its optical axis is tilted accordingly. If at all three solid joints 3 applied the same force or displacement, the Lens 1 is shifted along its optical axis.

In Figure 4 is shown in schematic diagram of a lens, in a lens or lens part 13 (only partially in phantom shown) is installed, which in the mounting position β or later use of the hard-axis by the angle differs. The lens 1 is not shown in detail on a variety stored elastic feet 15 and thus results in a soft connection, resulting in a tilting results as is shown in the top view, namely the inclined position. By activating the or the corresponding manipulators 9 then can cancel this tilting or the lens 1 again Reset in its initial reference position.

From Figure 2 it is also seen that the separation between the inner mount 2 and the outer mount 4 with the intervening lying solid joints 3 through cuts 14 is carried out, so that the entire device constructed integrally is.

In the figure 1 is only shown in principle how for example through a capacitive probe 16, extending into a recess 17 between the inner mount 2 and the outer mount 4 may be located, orientations can make. For this, Of course a plurality of capacitive sensors 16, according arranged distributed over the circumference, are required.