EP1069600A4

Illuminator, exposing method and apparatus, and device manufacturing method

Abstract

This record has no abstract on file.

EP1069600A4, drawing sheet 1 — Sheet 1 of 28

Term

Term ended

Projected expiry passed 23 March 2019, 7.5 years ago.

28 sheets

Sheet 1
Sheet 2
Sheet 3
Sheet 4
Sheet 5
Sheet 6
Sheet 7
Sheet 8
Sheet 9
Sheet 10
Sheet 11
Sheet 12
Sheet 13
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Sheet 16
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Sheet 26
Sheet 27
Sheet 28

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
EP0576297A1	Cites	European Patent Office (EPO)	X	Search report	1,8,55,57-60,65,81,84
EP0576297A	Cites	European Patent Office (EPO)	–	–	–

6 members in 5 offices

This recordMember, by publication datePriority claim

Priority claims19

Priority claims
Document	Office	Kind	Date
9385898	Japan	A	1998-03-24
9385898	Japan	A	1998-03-24
9385898	Japan	–	1998-03-24
18810098	Japan	A	1998-06-19
18810098	Japan	A	1998-06-19
18810098	Japan	–	1998-06-19
393299	Japan	A	1999-01-11
393299	Japan	A	1999-01-11
393299	Japan	–	1999-01-11
9901442	Japan	W	1999-03-23
9901442	Japan	W	1999-03-23
18810098	–	–	–
393299	–	–	–
9385898	–	–	–
JP19980093858	–	–	–
JP19980188100	–	–	–
JP19990003932	–	–	–
JP9901442	–	–	–
WO1999JP01442	–	–	–

Members6

Family members, oldest first
Document	Office	Kind
WO9949505A1	World Intellectual Property Organization (WIPO)	A1	1999-09-30
EP1069600A1	European Patent Office (EPO)	A1	2001-01-17
KR20010042098A	Republic of Korea	A	2001-05-25
EP1069600A4This record	European Patent Office (EPO)	A4	2002-11-20
US2004104359A1	United States of America	A1	2004-06-03
JP4329266B2	Japan	B2	2009-09-09

8 legal events, as the office reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code
2006-10-18	Application refused18R	18R
2006-09-15	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION HAS BEEN REFUSEDSTAA	STAA
2003-04-02	First examination report despatched17Q	17Q
2002-11-20	Supplementary search report drawn up and despatchedA4	A4
2002-11-20	Designated contracting statesAK	AK
2001-01-17	Request for examination filed17P	17P
2001-01-17	Designated contracting statesAK	AK
2000-12-01	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI