EP1069456A3

Electroabsorption optical modulator and fabrication method thereof

Abstract

An impurity diffusion preventing layer (7) is provided between a first upper clad layer (6) adjacent to an optical absorption layer (5) and a second upper clad layer (8) provided on the first upper clad layer (6) in order to prevent p type impurity from diffusing to the first upper clad layer (6) adjacent to the optical absorption layer (5).

EP1069456A3, drawing sheet 1
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Projected expiry passed 12 July 2020, 6.2 years ago.

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