EP1069453A3

Device for reducing the peak output of a pulse laser light source

Abstract

In a device for reducing the peak power of a pulsed laser light source, in particular for a projection exposure apparatus, at least one beam splitter device (3, 4) is arranged in the beam path (1) through which reflective components (6, 7, 8 and 12, 13 , 14) a detour line (5 or 11) for at least one partial beam (1b) with subsequent reunification at a beam combination member (9,15) with the one or more other partial beams (1b or 10b) is generated into a total beam.

EP1069453A3, drawing sheet 1
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Projected expiry passed 17 June 2020, 6.3 years ago.

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