EP1069453A3
Device for reducing the peak output of a pulse laser light source
Abstract
In a device for reducing the peak power of a pulsed laser light source, in particular for a projection exposure apparatus, at least one beam splitter device (3, 4) is arranged in the beam path (1) through which reflective components (6, 7, 8 and 12, 13 , 14) a detour line (5 or 11) for at least one partial beam (1b) with subsequent reunification at a beam combination member (9,15) with the one or more other partial beams (1b or 10b) is generated into a total beam.

Term
Term ended
Projected expiry passed 17 June 2020, 6.3 years ago.
- Priority
- Filed
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- Projected expiry
- Today
1 sheet
Sheet 1
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| US5233460A | Cites | United States of America | XA | Search report | 1,3,7,8 |
| US5315604A | Cites | United States of America | XA | Search report | 1-3,7,8 |
| US5337333A | Cites | United States of America | XA | Search report | 1,3-5,7,8,11 |
| US5559816A | Cites | United States of America | A | Search report | 4-6 |
9 members in 5 offices
Priority claims4
| Document | Office | Kind | Date |
|---|---|---|---|
| 19931751 | Germany | A | |
| 19931751 | Germany | – | |
| 19931751 | – | – | – |
| DE1999131751 | – | – | – |
Members9
| Document | Office | Kind | |
|---|---|---|---|
| DE19931751A1 | Germany | A1 | |
| EP1069453A2 | European Patent Office (EPO) | A2 | |
| JP2001042254A | Japan | A | |
| KR20010015054A | Republic of Korea | A | |
| EP1069453A3This record | European Patent Office (EPO) | A3 | |
| EP1069453B1 | European Patent Office (EPO) | B1 | |
| DE50007743D1 | Germany | D1 | |
| US6996141B1 | United States of America | B1 | |
| KR100805459B1 | Republic of Korea | B1 |
29 legal events, as 2 offices reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | Office | |
|---|---|---|---|
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Fr: translation not filedEN | EN | EP | |
| No opposition filedOpposition26N | 26N | EP | |
| No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE | PLBE | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA | STAA | EP | |
| Gb: ep patent (uk) treated as always having been void in accordance with gb section 77(7)/1977 [no translation filed]GBV | GBV | EP | |
| Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents actLapsedNLV1 | NLV1 | EP | |
| Corresponds to:REF | REF | EP | |
| Designated contracting statesAK | AK | EP | |
| European patent grantedGrantedNOT ENGLISHFG4D | FG4D | GB | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| (expected) grantORIGINAL CODE: 0009210GRAA | GRAA | EP | |
| Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS | GRAS | EP | |
| Party data changed (applicant data changed or rights of an application transferred)RAP1 | RAP1 | EP | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP | GRAP | EP | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | EP | |
| Designation fees paidDE FR GB NLAKX | AKX | EP | |
| First examination report despatched17Q | 17Q | EP | |
| Request for examination filed17P | 17P | EP | |
| Designated contracting statesAK | AK | EP | |
| Request for extension of the european patentAL;LT;LV;MK;RO;SIAX | AX | EP | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | EP | |
| Designated contracting statesAK | AK | EP | |
| Designated contracting statesAK | AK | EP | |
| Request for extension of the european patentAL;LT;LV;MK;RO;SIAX | AX | EP | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP |
Numbers
- Publication
- 1069453
- Publication, DOCDB
- 1069453
- Publication, EPODOC
- EP1069453
- Application
- 112846
- Application, DOCDB
- 00112846
- Application, EPODOC
- EP20000112846
Titles3
- German
- Vorrichtung zur Reduzierung der Peakleistung einer Pulslaser-Lichtquelle
- English
- Device for reducing the peak output of a pulse laser light source
- French
- Dispositif de reduction de la sortie maximale d'une source de lumière à laser d'impulsion
Classification
- CPC, 5
- G03F7/7055
- G02B27/106
- G02B27/144
- G02B27/145
- G03F7/2008
- IPC, 6
- G02B27 09
- G02B27 14
- G03F7 20
- H01L21 027
- H01S3 00
- H01S3 10
Designated states2
- Contracting states, 1
- Sweden
- Extension states, 1
- Slovenia