EP1069419A3

Pressure sensor and method of manufacturing the same

Abstract

A pressure sensor includes a cylindrical sensor package, glass base, sensor chip, and electrode pins. The glass base is seal-bonded to an inner surface of the sensor package to close a space in the sensor package. The sensor chip is mounted on the glass base and has electrodes and a metal bonding portion on its surface opposing the glass base. The bonding portion is die-bonded to a surface of the glass base. The electrode pins are arranged to oppose the electrodes and buried to extend through the glass base. One end of each lead member exposed from the surface of the glass surface is electrically bonded to a corresponding electrode.

EP1069419A3, drawing sheet 1
Sheet 1 of 2

Term

Term ended

Projected expiry passed 15 July 2020, 6.2 years ago.

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2 sheets

  1. Sheet 1
  2. Sheet 2