EP1057230B1

Method and apparatus for monitoring and control of laser emission wavelength

Abstract

This record has no abstract on file.

EP1057230B1, drawing sheet 1
Sheet 1 of 23

Term

Term ended

Expired 18 February 2019, 7.6 years ago.

  1. Priority
  2. Filed
  3. Granted
  4. Expired
  5. Today

63 claims: 5 independent, 58 dependent

  1. 1
    An apparatus for monitoring the wavelength of a monitored beam of laser radiation, comprising:at least one optical filter (32), receiving at least a portion of said monitored beam (14), said filter producing a first filtered beam (36) in accordance with a first spectral filter function having a resonant response wavelength;at least one detector (40) for detecting said first filtered beam to produce a first detected signal (44) representative of the intensity of said first filtered beam;an error circuit (48) in electrical communication with said detector and for producing responsive to said first detected signal an error signal (22) responsive to the deviation of the wavelength of said beam from a set point wavelength;characterized in that said optical filter (32) includes a substrate (66) having a filter layer (68) thereon, said filter layer including at least one film layer having a dielectric constant differing from that of said substrate;said optical filter receives said portion of said monitored beam on a surface of one of said substrate and said filter layer at a selected nonzero angle of incidence (70), and said selected nonzero angle of incidence is selected such that said spectral filter function defines a capture range of wavelength that includes said set point wavelength.
  2. 39
    A laser apparatus, comprising:an apparatus for monitoring the wavelength of a monitored beam of laser radiation according to any of claims 1 to 38;a laser for producing a the beam of laser radiation having a selected wavelength;and a laser wavelength control element in electrical communication with said error circuit for adjusting the operating temperature of said laser in response to said error signal so as to tend toward said set point wavelength.
  3. 49
    An optical device for receiving an optical beam and for producing first and second signals for comparison to determine the deviation of the wavelength of the beam from a set-point wavelength, comprising:an optical wedge shaped substrate (76) for propagating the optical beam of a laser (12) and having first and second surfaces, at least one of said surfaces for transmitting the optical beam therethrough;a filter (32) disposed with the substrate (76) for receiving the optical beam for transmitting a first filtered beam (447) and reflecting a second filtered beam (445), the filter including a filter layer (78) deposited on one of said surfaces and having at least one optical film having a dielectric constant differing from that of one of the index of refraction of the substrate (76) and of any one of any other films of the filter layer (78);a first detector (40) mounted with one of said surfaces for receiving one of said first and second filtered beams (447) for producing the first signal;and a second detector (42) mounted with the other of said surfaces for receiving the other of said filtered beams (445) for producing the second signal;and an error circuit (48) in electrical communication with said detectors (40, 42) and for producing responsive to said signals an error signal responsive to the deviation of the wavelength of said laser beam from a set point wavelength.
  4. 54
    A method of calibrating a laser wavelength apparatus, the method comprising the steps of:operating a laser at a first wavelength providing a laser beam having the first wavelength: filtering at least a first portion of the laser beam with a first optical filter to produce a filtered beam in accordance with a first spectral filter function having a resonant response at a resonance response wavelength;measuring the intensity of said first filtered beam;filtering at least a second portion of the laser beam with a second optical filter to produce a second filtered beam, the second optical filter including a substrate having a filter layer thereon, said filter layer including at least one film layer having an index of refraction different from that of the substrate, said step of filtering including directing the beam of radiation to a surface of one of said substrate and said filter layer at an initial angle of incidence;monitoring the measured intensity of said second filtered beam;and selecting a final angle of incidence, the step of selecting including adjusting the angle of Incidence of the laser beam to said surface to vary the spectral filter function of the second filter such that the intensity of said second filtered beam is substantially equal to the intensity of said first filtered beam.
  5. 56
    A method of operating a laser apparatus, comprising providing a at least a portion of the laser radiation emanated from the laser (12) to an optical filter (32) for transmitting a first filtered beam (447) in accordance with a first spectral filter function and reflecting a second filtered beam (445) in accordance with a second spectral filter function inversely related to the first spectral filter function, the filter including a wedge shape substrate (76) having a filter layer (78) thereon, the filter layer (78) including at least one film layer having a dielectric constant differing from that of the substrate (76) or from one of any other film layers;and comparing the first and second filtered beams (447, 445) to determine the deviation of the wavelength of the laser radiation from a set-point wavelength for at least one of monitoring, tuning, and stabilizing the wavelength of the laser radiation.