Organic lasers
Abstract
The present invention includes a laser comprising a first mirror layer (110) and a layer of first active organic material (112) over the first mirror layer (110). The first active organic material lases when pumped to thereby produce laser light. The first mirror layer (110) reflects at least a portion of the light produced by the first active organic material. The invention includes both optically and electrically pumped embodiments.
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35 claims: 1 independent, 34 dependent
- 1Claims of equivalent WO 9850989 A2 What is claimed is:1. A laser comprising: a first mirror layer;and a layer of first active organic material over said first mirror layer;wherein said first active organic material lases when pumped to thereby produce laser light;and said first mirror layer is capable of reflecting at least a portion of the light produced by said first active organic material.
748 paragraphs in 1 section, as filed
Description of equivalent WO 9850989 A2
ORGANIC LASERS
Field Of The Invention
The present invention relates to the field of light
emitting devices, in particular, to laser light emitting devices
containing organic materials.
Background Information
Several recent publications have reported phenomena
such as superluminescence and amplified spontaneous emission in
polymeric organic light emitters such as conjugated polymers. (N.
Tessler et al . , Nature 382, 695 (1996); F. Hide et al . , Science
273, 1833 (1996), both of which are incorporated herein by
reference) . The materials used in those emitters are spin-coated
from a solution of the polymer or its chemical precursors.
Optically pumped, stimulated emission from organic laser dyes,
introduced into inert, spin-coated polymers or gels has been described in the literature. (R. E. Hermes, et al . , Appl . Phys .
Lett. 63, 877 (1993); M.N. Weiss et al . , Appl . Phys . Lett . 69,
3653 (1996); H. Kogelnik et al . , Appl . Phys . Lett . 18, 152
(1971); M. Canva et al . , Appl . Opt .. 34, 428 (1995), each of
which is incorporated herein by reference) .
When compared with other electrolumninescent materials,
however, spun-on polymeric materials do not exhibit particularly
good thickness uniformity, ability to achieve extremely high
materials purity, operating lifetimes, and ease of integration
with other conventional semiconductor fabrication processes. In
the field of organic light emitting devices (OLEDs) for flat
panel display applications, for example, small molecule OLEDs
currently offer better operating lifetimes by an order of
magnitude over their spin-coated, polymeric analogs. (L.J.
Rothberg et al . „ "Status of and Prospects for Organic
Electroluminescence", J. Mater. Res. 1996, 11:3174; N.C. Greenham
et al . , "Semiconductor Physics of Conjugated Polymers", Solid
State Physics 1995, 49:1, both of which are incorporated herein
by reference) .
There is much recent interest in lasing action and
stimulated emission in thin films of small molecular weight
organic semiconductors and polymers as organic semiconductor
lasers ("OSLs") . The low cost of organic materials and ability to grow them as quasi- and non-epitaxial thin films facilitates
integration of OSLs with other optoelectronic devices, making
them attractive for a number of applications. The particular
optical and electronic properties of organic semiconductors
result in OSL performance that is significantly more temperature
stable than conventional inorganic laser diodes, a potential
advantage in optical communications and sensor applications. For
example, the lasing action in optically-pumped slab waveguide
structures of vacuum-deposited thin films of small molecular
weight organic semiconductors has been recently demonstrated.
(See V.G. Kozlov et al . , Conf on Lasers and Electro-optics CLEO
<sup>■</sup>97, CPD-18, Opt. Soc. Am., Baltimore, MD, May 1997,
incorporated herein by reference) . The output power,
differential quantum efficiency, and emission wavelength of these
organic semiconductor lasers (OSLs) are significantly more stable
to changes in temperature than conventional inorganic laser
diodes. This benefit of organic laser structures combined with
the inherent advantages of organic semiconductors such as low
cost, quasi- and non-epitaxial growth (S.R. Forrest et al . , Phys.
Rev. B 49, 11309 (1994) , incorporated herein by reference) , and
ease of integration with other optoelectronic devices, provides
strong motivation for further research. Presently, there is an
interest in the development of OSL structures that result in desired OSL properties such as narrow bandwidth emission, the
minimal use of active organic materials, and the facilitation of
wavelength tuning and electrical pumping.
Summary of the Invention
The present invention is directed to laser devices that
include organic materials that lase when pumped to thereby
produce laser light. The invention includes both optically and
electrically pumped embodiments of unique structure and organic
laser materials. In contrast to spun-on polymeric materials, the
organic materials used in the present invention offer the
advantages of excellent thickness uniformity, extremely high
materials purity, and ease of integration with conventional
fabrication processes. Moreover, the laser devices of the
present invention provide a clear threshold in output power,
well-defined laser beams, cavity modes, and spectral line
narrowing .
The present invention includes a laser comprising a
mirror layer and a layer of active organic material over the
mirror layer. The active organic material lases when pumped to
thereby produce laser light. The mirror layer reflects at least
a portion of the light produced by the first active organic
material . In one aspect, the present invention relates to
optically-pumped lasers which include a source of optical pump
energy for pumping the active organic material.
In another aspect, the present invention relates to
electrically-pumped lasers in which the active organic material
is electroluminescent and is disposed between a pair of
electrodes. The active organic material is pumped when an
electric current is passed between the electrodes.
Brief Description of the Drawings
Fig. 1 shows an arrangement including an embodiment of
a laser device according to the present invention.
Fig. 2 shows an arrangement including an embodiment of
a laser device according to the present invention.
Fig. 3 is a graphical representation of the
relationship between peak output power and pump energy density
for an embodiment of the present invention.
Fig. 4 (inset to Fig. 3) shows the polarization of the
emission of an embodiment of the present invention, as a function
of the angle between a plane orthogonal to the film surface and
the plane of a polarizer.
Figs. 5A and 5A show electrically-pumped laser device
embodiments of the present invention. Fig. 6 shows a cross-section of a laser cavity
structure in accordance with an embodiment of the present
invention.
Fig. 7 shows a cross-section of an optically-pumped
laser, in accordance with an embodiment of the present invention.
Figs. 8A-8H show the chemical formulae for DCM, Alq<sub>3</sub>
CBP, DCM2, rhodamine-6G, coumarin-47, perylene, and pyrromethane-
546, respectively.
Fig. 9 shows a cross-section of a tunable optically-
pumped laser, in accordance with an embodiment of the present
invention.
Fig. 10 shows a cross-section of an electrically-pumped
laser, in accordance with an embodiment of the present invention.
Fig. 11 shows a cross-section of a stacked, multicolor
electrically-pumped laser, in accordance with an embodiment of
the present invention.
Fig. 12 shows a cross-section of a tunable
electrically-pumped laser, in accordance with an embodiment of
the present invention.
Fig. 13 shows a cross-section of a waveguide reducing
structure, in accordance with an embodiment of the present
invention. Fig. 14 shows emission spectra for an optically-pumped
laser device, in accordance with an embodiment of the present
invention.
Fig. 15 shows the spontaneous emission spectrum in the
substrate normal direction from an exemplary embodiment of an
OVCSEL in accordance with the present invention.
Fig. 16 shows the emission spectrum, at a high
excitation level, from an exemplary embodiment of an OVCSEL of
the present invention.
Fig. 17 shows a high resolution emission spectrum from
an exemplary embodiment of an OVCSEL of the present invention as
a function of excitation near the lasing threshold.
Fig. 18 shows the dependence of output energy on the
input pump energy near the lasing threshold for an exemplary
embodiment of an OVCSEL of the present invention.
Detailed Description
One embodiment of an optically-pumped laser device 100
of the present invention is shown in Fig. 1. The laser device
100 includes a first mirror layer 110 and a layer 112 of active
organic material. The first mirror layer 110 is a "mirror" in
that it is capable of reflecting at least some portion of the
light emitted from the layer 112 of organic material. For example, many of the mirror layers used in the devices of the
present invention are used to transmit laser light of preferred
characteristics such as wavelength, orientation, bandwidth,
brightness, and the like, while reflecting light having non-
preferred characteristics. The mirror layers used in the present
invention include, for example, substrates of glass, quartz,
sapphire or plastic, polished InP layers, distributed Bragg
reflectors, metallic mirrors and the like.
The organic materials used in the present invention are
"active" in that they lase when pumped by any suitable means,
such as by optical or electrical energy, to thereby produce laser
light. The active organic materials include host and dopant
materials, which are deposited by any suitable technique onto
first mirror layer 110. The first mirror layer 110 is optionally
pre-coated with a cladding layer 111 comprising a material having
an index of refraction less than the organic material of layer
112. When the layer 112 is pumped with optical pump energy from
a source such as a nitrogen laser 118, the laser device 100
produces laser beam 116 of a predetermined color.
Layers 111 and 112 are of any suitable thickness. By
way of example, layers 111 and 112 in the embodiment shown in
Fig. 1 are approximately 2 μm and 120 nm, respectively. The
thickness of the cladding layer 111 is preferably chosen to provide optical isolation of the layer 112 from the opague first
mirror layer 110. The thickness of the layer 112 is chosen to
provide uniform pumping and to optimize the ability of the layer
to function as an optical waveguide between the cladding layer
111 and the surrounding environment. For example, when layer 112
comprises CBP, a thickness of 120 nm results in approximately 60%
absorption of pump energy and a waveguiding confinement factor
of approximately 59% at = 485 nm. To further facilitate the
waveguiding capability of layer 112, cladding layer 111 has an
index of refraction less than layer 112 and thus serves to
increase optical confinement in layer 112 in the direction normal
to the surface of the device. As an example, the cladding layer
111 comprises Si0<sub>2</sub> (refractive index, "n", of about 1.5) when the
layer 112 comprises CBP as host organic material (n~1.8) . The
cladding layer 111 may not be required, for example, where the
first mirror layer 110 is intended for laser emission
therethrough. However, in the embodiment shown in Fig. 1 in
which laser emission occurs through the side 113 of the layer
112, the cladding layer 111 is preferred. In addition, layer 112
preferably includes two reflective facets 113 and 114 that are
substantially parallel to each other, thereby forming an optical
resonator in layer 112. Layers 111 and 112 are deposited onto the first mirror
layer 110 by any suitable technique, such as by plasma enhanced
chemical vapor deposition and vacuum thermal evaporation,
respectively. The concentration of the dopant in the layer 112
is typically less than 10% by mass, but can be as low as .01%.
It is generally preferred that the layer 112 is deposited by
thermal co-evaporation of host and dopant materials at a
respective mass ratio of approximately 100:1.
The laser devices of the present invention are grown
on any mirror layer to which the organic layer 112 will adhere
and which preferably has a lower index of refraction (n) than the
organic layer material . Acceptable mirror layer materials
include plastics, glass and silicon coated with Si0<sub>2</sub>. A
preferred first mirror layer material is polished InP. A typical
length for a device in accordance with the present invention is
5 mm, although devices of shorter length, such as 0.5 mm, are
possible .
The formation of optically smooth, sharp facets 113 and
114 at opposing edges of the layer 112 is a natural advantage of
vacuum-deposited films. The shape of the facets 113 and 114
mimic the shape of the corresponding facets of the underlying
first mirror layer 110 (or cladding layer 111, if used) . As
such, it is preferred that the sides of <sup>•</sup> the first mirror layer 110 be smooth and parallel to each other. Facet reflectivities
of 7% are obtained via vacuum deposition of layer 112, which is
sufficient to provide the necessary optical feedback. Optical
feedback is also achieved with other structures, such as an
optical grating placed underneath the optically pumped region of
the organic film to thereby form a distributed feedback
structure. As an alternative to forming the facets 113 and 114
by vacuum-deposition of layer 112, layer 112 can be deposited
onto the first mirror layer 110 (or cladding layer 111, if used)
by any other suitable method, and the combination is then cleaved
to form smooth, sharp facets.
Any optically pumped embodiment of the present
invention such as the device 100 is pumped using a light source
that emits light that can be absorbed by the host material
molecular species of layer 112. For example, the device 100 is
optically pumped with a nitrogen laser 118 which generates 500
psec pulses with a wavelength of 337 nm at a 50 Hz repetition
rate. As shown in Fig. 1, the pump beam is focused, such as by
a cylindrical lens 117, into a stripe 115 on the film surface
oriented orthogonal to the facets 113 and 114. The width of the
stripe 115 is any suitable dimension, such as lOOμm, for example.
The pump beam is waveguided in layer 112, thereby producing laser
beam 116, which is emitted from the facet 113 and/or 114 of the device 100. Moreover, through a gain-guiding effect, the
refractive index of the illuminated portion 115 of the organic
layer 112 will be higher than that of the non- illuminated
portion, thereby providing confinement of the optical mode in the
vertical direction.
Fig. 2 shows an embodiment 200 of an optically-pumped
laser in accordance with the present invention in which it is not
necessary to form stripe 115 on layer 112. In this embodiment,
the cladding layer 111 forms a ridge on the first mirror layer
110 on which the layer 112 of organic material is deposited. In
this embodiment, the optical mode is thus confined in both the
z- and y-directions . The width of the layers 111 and 112 should
preferably be narrow enough to support only a single lateral
optical mode (e.g., 1-10 μm) . The thickness of the active
organic layer 112 should be approximately equal to the reciprocal
of the absorption coefficient of the host material at the
wavelength of the light with which the device is pumped. If a
reflective layer (not shown) is placed between the layer 111 and
the first mirror layer 110, the thickness of the organic layer
112 should be approximately half the reciprocal of the absorption
coefficient of the host material at the wavelength of the light
with which the device is pumped. To protect the laser device of
Fig. 2, it is optionally overcoated with a transparent material (not shown) whose index of refraction is lower than that of the
layer 112.
An example of the dependence of the peak output power
of the device 100 to the pump energy density is shown in Fig. 3.
From this relationship, the lasing threshold is clearly
discerned. Each line segment in the graph of Fig. 3 is a linear
fit to empirically measured points. The slopes of the two line
segments emphasize a change in differential quantum efficiency,
from 0.2% (below the lasing threshold) to 10% (above the lasing
threshold) . It is to be noted, however, that measured
differential quantum efficiencies represent a considerable
underestimation since the lasing region in an optically pumped
gain-guided device is only a small fraction of the material which
is being pumped. Hence, most of the pump power is lost in non-
lasing regions. The differential quantum efficiency decreases
to 7% at excitation levels above 10 J/cm<sup>2</sup> (not shown) ,
corresponding to peak output powers exceeding 4 W.
Fig. 4 (inset to Fig. 3) shows the intensity of the
emission from device 100 as passing through a polarizer as a
function of angle between the plane orthogonal to the film
surface and the plane of the polarizer. The emission is strongly
linearly polarized, as is expected for laser emission. The
degree of polarization measured is 15 dB although it should be noted that this result is limited by the measurement arrangement.
The solid line, which is a fit of the empirically measured
points, follows sin<sup>2</sup>(), where is the polarizer angle.
In addition to the optically-pumped embodiments
discussed above, the present invention also provides
electrically-pumped organic semiconductor laser embodiments.
Such embodiments make use of electroluminescent materials that
emit light when excited by electric current.
Fig. 5a shows a cross-sectional view of an
electrically-pumped laser device embodiment of the present
invention. Device 300 includes a first electrode 31, a bottom
cladding layer 32, a layer 33 of active organic material, a top
cladding layer 34 and a second electrode 35, which are deposited
in sequence over a first mirror layer 30. The degree of optical
confinement in the active layer 33 depends on factors such as the
indices of refraction of the cladding layers 32 and 34.
The layer 33 of active organic material comprises any
suitable organic electroluminescent material, such as doped Alq<sub>3</sub>.
Either one of the cladding layers 32, 34 is composed of a hole
conducting material, such as MgF<sub>2</sub> doped with 10% of TPD. The
other one of the cladding layers is composed of an electron
conducting material, such as Alq<sub>3</sub> or MgF<sub>2</sub> doped with Alq<sub>3</sub>. For
either cladding layer 32 or 34, the MgF><sub>></sub> can be replaced with another alkali halide such as LiF, KF or KI or with a
transparent, low index of refraction, conducting organic
material. Upon passing a current between electrodes 31 and 35,
electrons and holes are injected into the active layer 33 where
the energy is transferred from the conducting host material to
the dopant materials, which emit light.
An optical resonator is formed by the edges of the
device 300, i.e., mirror facets Ml and M2. At least one of the
electrodes 31 and 35 is patterned into a stripe oriented in the
x-direction. That portion of the active material which is
electrically pumped experiences a change in optical gain, thus
forming a waveguide in the lateral direction (i.e., the gain-
guiding effect) .
In the electrically-pumped laser device shown in Fig.
5a, the index of refraction of the active layer 33 is preferably
higher than that of the cladding layers 32 and 34. This ensures
that most of the mode overlaps with the gain layer. Preferably,
the indices of refraction of the cladding layers 32 and 34 should
be substantially equal to provide optimal optical confinement
within layer 33.
The cladding layers 32 and 34 should be thick enough
to substantially prevent absorption of the optical mode at the
electrodes 31 and 35 and to allow for efficient current injection. For single-mode operation, the thickness of the
active layer 33 should be substantially equal to the lasing
wavelength divided by twice the index of refraction of the active
layer. For higher modes, the thickness of the active layer 33
should be accordingly greater.
Optical confinement in layer 33 is also achieved, for
example, by photo-bleaching the layer 33 to define a waveguide
therein. Using this technique, once the active layer 33 has been
deposited, a photomask is applied which partially covers the
active layer 33 and the layer is exposed to intense UV light in
an 0<sub>2</sub> environment. The unmasked portions of the active layer 33
are thus bleached, lowering their index of refraction. The
masked portion of the active layer 33 retains its original,
higher index of refraction and thus results in optical
confinement therein.
As another example, optical confinement is achieved by
patterning the first mirror layer or bottom cladding layer to
achieve index guiding. For example, photo-bleaching can be used
on the bottom cladding layer 32 to create an index modulated
distributed Bragg reflector under the active layer 33.
An optical resonator is optionally formed in the z-
direction. In this case, the top and first electrodes also serve
as optical mirrors, or, if the electrodes are transparent to light, high reflectivity mirrors are added on both sides of the
structure. The maximum of the optical mode of this structure
should spatially match the position of the optical layer.
Furthermore, the wavelength of the optical mode should overlap
with the gain spectrum of the dopant material.
Fig. 5b shows a further embodiment of an electrically-
pumped laser device in accordance with the present invention.
In this embodiment, the first electrode 31 extends beyond the
laser structure so as to provide a contact surface.
Additionally, an insulator 37 is provided on a side of the laser
structure and a contact 36 extending from the second electrode
35 to the surface of the first mirror layer 30 is deposited on
the insulator.
The present invention includes organic vertical-cavity
surface-emitting laser (OVCSEL) structures, in which laser
cavities are used to produce a clear threshold in output power,
a well-defined laser beam, cavity modes, and spectral line
narrowing of emission above threshold to less than 1 . The high
gain in these films is sufficient to generate lasing even in
cavities with active regions less than 500 nm thick, thereby
minimizing the amount of active organic material required for
operation. Fig. 6 shows a cross-section of a laser cavity
structure 1100 in accordance with an embodiment of the present
invention. In this structure, an active organic material layer
1110 is disposed between a first mirror layer 1111 and a second
mirror layer 1112 to thereby form a cavity of thickness, t. The
organic material in layer 1110 is "active" in that it lases when
pumped by optical or electrical means to thereby produce laser
light. The first and second mirror layers 1111, 1112 each
reflect a substantial amount of the light produced by the layer
1110 so that only coherent laser light passes through layers
1111, 1112, the laser light having a desired wavelength and
characterized by a narrow bandwidth. The first and second mirror
layers 1111, 1112 each preferably reflect at least 90%, more
preferably 95%, and most preferably 98%, of the light produced
by the pumping of layer 1110. If the first and second mirror
layers 1111, 1112 reflect substantially the same percentage of
light emitted from layer 1110, the passage of light through both
first and second mirror layers 1111, 1112 will be substantially
equal, as shown in Fig. 6. If, for example, the second mirror
layer 1112 reflects a greater percentage of light than first
mirror layer 1111, however, then the passage of light will be
primarily through the first mirror layer 1111 provided that the absorption characteristics of the first and second mirror layers
are equal .
Fig. 7 shows an optically-pumped OVCSEL structure 1200,
in accordance with an embodiment of the present invention. A
first mirror layer 1111, a layer of active organic material 1110
and a second mirror layer 1112 are disposed on a substantially
transparent substrate 1113. The layer of active organic material
1110 is pumped by incident optical pump energy 1115. The source
of optical pump energy (not shown) is any suitable source of
intense light, such as a nitrogen laser.
The first and second mirror layers 1111, 1112, are any
suitable reflective materials or structures. A preferred
structure for the first mirror layer 1111 is a distributed Bragg
reflector ("DBR") dielectric mirror stack. DBR mirrors are
commercially available and consist of /4 thick dielectric
layers, where represents the wavelength of the DBR mirror
reflective stopband. DBR mirrors thus render the ability to
control the OVCSEL output spectrum, which in turn narrows the
linewidth of such output. DBR mirrors are typically
characterized by reflectivities in excess of 99%. The second
mirror 1112 is preferably a DBR mirror or a layer of reflective
metal or alloy such as silver, platinum, aluminum, magnesium-
aluminum alloy, or combinations thereof. Metal mirrors typically have reflectivities in excess of 90%, but absorb more light than
do DBR mirrors. When the second mirror 1112 comprises a metal,
the OVCSEL structure 1200 preferably includes an organic buffer
layer 1114 to reduce quenching of the organic material in the
layer 1110 at the organic / metal interface with the layer 1112.
In the embodiment shown in Fig. 7, the combined reflectivity and
absorption of the second mirror layer 1112 is greater than that
of the first mirror layer 1111, thus resulting in laser emission
1116 through the first mirror layer 1111.
The substrate 1113 is any suitable transparent
substrate such as quartz, glass, sapphire or plastic. The
substrate 1113 is limited to those materials which are
transparent to the wavelengths of incident optical pumping energy
and of laser light produced by layer 1110.
In all embodiments of the present invention, the active
organic material comprises host and dopant molecules . The pump
energy imparted to layer 1110 is absorbed by the host molecule
and is non-radiatively transferred by a dipole-dipole transition
to the dopant molecule. For this to occur, the emission spectrum
of the host should overlap with the absorption spectrum of the
dopant. The resulting efficient "Fδrster" energy transfer
requires only a low concentration of dopant molecules, which in
turn reduces the lasing threshold, increases laser efficiency, and extends operational lifetime. The host materials used in the
present invention are selected from any materials that provide
good charge transport and are able to transfer energy to a dopant
material via Fόrster energy transfer or carrier capture. In
addition, the rate of energy transfer to the dopant must be
faster than the non-radiative recombination in the host. The
dopant materials used in the present invention are any highly
efficient luminescent molecules having luminescence (lasing)
emission in the same spectral range as the transparency region
of the host:dopant system. Exemplary host-dopant systems for use
as the active organic material in the present invention, and some
of their associated lasing characteristics are set forth in Table
I. The formulae for the chemicals known as DCM (Exciton Inc. of
Dayton, Ohio), Alq<sub>3</sub> , CBP, DCM2 (Exciton Inc. of Dayton, Ohio),
rhodamine-6G, coumarin-47, perylene, and pyrromethane-546 are
shown in Figs. 8A-8H, respectively. The organic materials used
in the present invention are deposited by any suitable technique,
such as by vacuum thermal evaporation.
Table I. Exemplary active organic materials for use in the OVCSELs of the present invention.
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<img file="WO9850989A2_D0002.tif" />
The present invention includes embodiments in which the
laser emission is tunable to a specific wavelength. Fig. 9 shows
an example of an optically-pumped, tunable OVCSEL 1250 in
accordance with an embodiment of the present invention. In this
embodiment, the thickness, t, of the layer 1110 of active organic
material changes monotonically from the left edge 1117 to the
right edge 1118 of the structure. In an alternative embodiment,
the thickness of the layer 1110 changes in a stepwise fashion for
the emission of discrete wavelengths . By changing the thickness
of the OVCSEL cavity, the emission wavelength is tunable by as
much as 50 nm or more, due to the wide gain spectrum of the
lasing material in layer 1110. Such thickness variation is
achieved, for example, by masking the substrate with a sliding
shadow mask during growth of layer 1110. Alternatively, an
effective thickness variation is achieved by tilting the
substrate with respect to a pump beam source . The tunable OVCSEL
is pumped by a pump beam 1115, which excites the active organic material of layer 1110 at a point Xo, which is at a distance d
away from the right edge 1118. The wavelength of laser emission
1116 is a function of the cavity thickness t and the index of the
organic material in layer 1110. By changing the position of
point Xo, a different section of the OVCSEL structure 1250
(having a different thickness, t) is excited by pump beam 1115,
thus resulting in a different wavelength of emission 1116.
Changing the position of Xo by varying d is accomplished by, for
example, moving the OVCSEL structure 1250, moving the position
or angle of the pump beam 1115, or both. As an example, the
inventors have changed the laser emission of an optically-pumped
Alq<sub>3</sub>:DCM laser of the present invention from 598 to 635 nm by
changing the thickness of layer 1110 from 430 to 500 nm.
Fig. 10 shows an electrically-pumped OVCSEL structure
1300, in accordance with an embodiment of the present invention.
A first mirror layer 1111, a layer of active organic material
1110 (comprising sub-layers 1110a, 1110b and 1110c) and a second
mirror layer 1112 are disposed on a substantially transparent
substrate 1113. If the first and second mirror layers 1111, 1112
are not able to function as electrodes, or alternatively if it
is preferable to have separate electrodes, a first electrode 1120
is disposed between the first mirror layer 1111 and the layer of
active organic material 1110, and a second electrode 1121 is disposed between the layer of active organic material 1110 and
the second mirror layer 1112. In this embodiment, the organic
material in layer 1110 is electroluminescent such that it is
pumped to produce laser light when an electric current is passed
therethrough. As is known in the art, the organic material in
the layer 1110 (and in all other electrically-pumped embodiments
of the present invention) typically consists of three sub-layers:
a hole transporting layer ("HTL") 1110a, an emissive layer ("EL")
1110b, and an electron transporting layer ("ETL") 1110c. First
and second electrodes 1120, 1121 (in the embodiment shown in Fig.
10, first and second electrodes are anode and cathode,
respectively) are substantially transparent to the light emitted
by layer 1110b, and preferably comprise indium-tin-oxide or any
other transparent conducting material.
In one embodiment of the present invention, multiple
electrically-pumped OVCSEL structures are placed in a stacked
arrangement 1350, as shown in Fig. 11, for the emission of laser
light of various colors. The stacked arrangement 1350 includes
the structure 1300 as shown in Fig. 10, but also includes a third
mirror layer 1211, a third electrode 1220, sublayers 1210a,
1210b, and 1210c (corresponding to HTL, EL and ETL layers,
respectively) of a second active organic material, a fourth
electrode 1221, and a fourth mirror layer 1212 as shown in Fig. 11. As in the OVCSEL structure 1300, the electrodes 1120, 1121,
1220 and 1221 are only necessary in the stacked arrangement 1350
if the respective mirror structures 1111, 1112, 1211 and 1212
cannot function as electrodes, or alternatively if it is
preferable to have electrodes separate from the mirror
structures . Although only two OVCSEL structures are shown in the
stacked arrangement 1350, the present invention includes
embodiments in which three or more OVCSEL structures are stacked
in a unitary structure. The stacking of OVCSEL structures
facilitates the lasing of multiple colors, each from a respective
OVSEL, alone or in any combination.
The present invention includes electrically-pumped
OVCSELs that are tunable to specific wavelengths. Fig. 12 shows
an example of such a tunable OVCSEL 1351 in accordance with an
embodiment of the present invention. As described for the
optically-pumped tunable OVCSEL 1250, the laser emission
wavelength of OVCSEL 1351 is tunable by varying the thickness t
of the OVCSEL cavity. The variation in t is accomplished by
controlling the distance tl between the second electrode 1121 and
the second mirror layer 1112. The distance tl is varied by the
controlled movement of the second mirror layer 1112 towards or
away from the second electrode 1121, or vice-versa. Optical lens
1130 is disposed between the second electrode 1121 and the second mirror layer 1112 to permit the variation in tl without losing
control of the laser light emitted from layer 1110b.
All embodiments of the present invention optionally
include guiding and cladding layers around the organic layers to
help minimize waveguiding losses in the organic layers. For
example, waveguide optical losses in organic layers of thickness
150 nm are often as high as 1000 cm<sup>-1</sup> or more where metal
electrodes are used in electroluminescent devices. A structure
1400 as shown in Fig. 13 is used to minimize such losses.
Structure 1400 includes guiding layers 1161 and 1162 immediately
adjacent to the organic layer (s) 1110, and cladding layers 1160
and 1163 immediately adjacent to the guiding layers 1161 and
1162, respectively. As is known in the art and previously
discussed, if layer 1110 comprises an electroluminescent
material, it may actually comprises multiple sublayers (i.e.,
HTL, EL and ETL layers) . The guiding layers 1161, 1162 are
highly transparent to minimize optical losses, and are
characterized by a high refractive index. The cladding layers
1160, 1163 are also transparent but possess a lower refractive
index than the guiding layers 1161, 1162. The cladding layers
1160, 1163 also generally have higher conductivities than the
guiding layers 1161, 1162, as one of the primary purposes of
cladding layers 1160, 1163 is to conduct electrical current. The structure 1400 reduces the confinement of emitted light in
organic layer (s) 1110, thus reducing optical losses to as low as
10 cm<sup>-1</sup> or less. The structure 1400 is optionally used with any
of the optically- or electrically-pumped embodiments of the
present invention. For example, when used with the optically-
pumped embodiment 1200 of the present invention, the structure
1400 is substituted for the layer of active organic material 1110
in Fig. 7. Likewise, when used with the electrically-pumped
embodiment 1300, the structure 1400 is substituted for the sub-
layers 1110a, 1110b and 1110c such that the structure 1400 is
sandwiched by the electrodes 1120 and 1121. When used with the
electrically-pumped embodiment, the guiding and cladding layers
1160, 1161, 1162, 1163 must be sufficiently conductive to provide
charge carriers to the conductive layer (s) 1110 from the
electrodes 1120, 1121. It is preferred, however, that the
conductivity of guiding layers 1161, 1162 is less than that of
cladding layers 1160, 1163, which have a conductivity less than
that of the surrounding electrodes 1120, 1121. The preferred
material for the guiding and cladding layers 1160, 1161, 1162,
1163 is indium-tin-oxide, the refractive index, conductivity and
transparency of which is varied, for example, by varying oxygen
content . The present invention is further described with
reference to the following non-limiting examples.
Example 1
A laser device as shown in Fig. 1 was formed. Alq<sub>3</sub> and
DCM (molecular ratio of approximately 50:1) were co-evaporated
under a high vacuum (5xl0<sup>~7</sup> Torr) onto a glass slide. The
resulting 3000 thick layer 112 of Alq<sub>3</sub> / DCM, having an index
of refraction (n) of 1.7, forms a slab optical waveguide with
glass (n=1.4) as a cladding layer on one side, and air (n=l) on
the other. This slab optical waveguide in conjunction with the
reflective facets 113, 114 of the layer 112 form an optical
resonator.
A nitrogen laser 118 operating at 500 psec pulses with
a wavelength of 337 nm at a 50 Hz repetition rate was used to
generate the optical pump beam. Lateral confinement of the
optical mode was achieved by gain-guiding induced by the optical
pump beam. Bright red laser emission was clearly visible from
the edge 113. Diffraction of the output beam was faintly
observed. The output laser beam included several transverse
modes which diverged in the direction orthogonal to the device
surface. The peak intensity of the red laser emission at the
output facets is 10<sup>8</sup> W/cm<sup>2</sup> (corresponding to a measured peak power exceeding 30W) at a pump level of 200μj/cm<sup>2</sup>. No
degradation of the Alq<sub>3</sub> / DCM film was observed after several
hours of operation (which corresponds to at least 10<sup>6</sup> laser
pulses. This indicates that Alq<sub>3</sub> / DCM films enjoy a high degree
of photochemical stability and are well-suited for use in
electrically-pumped organic lasers.
Example 2
A laser was formed by vacuum-depositing a 120 nm
organic film containing perylene-doped CBP onto the (100)
crystallographic surface of a polished InP first mirror layer.
The first mirror layer was pre-coated with a 2 μm layer of Si0 ,
deposited by plasma enhanced chemical vapor deposition. The
laser was optically pumped with 500 psec pulses generated by a
nitrogen laser at = 337 nm, with a 50 Hz repetition rate. The
pump beam was focused onto a 50 μm width region on the organic
film to form the gain region.
Fig. 14 shows the edge emission spectra of the
optically-pumped laser at pump levels below (4 nJ) and just above
the threshold (5 nJ) . Lasing appears as a spectrally narrow (2
nm, FWHM) peak at = 485 nm. The inset in Fig. 14 shows the
output pulse energy of the laser as a function of pump pulse energy, clearly indicating the presence of a lasing threshold at
a pump pulse energy of 5 nJ (which corresponds to an energy
density of 5 μj/cm<sup>2</sup>. Moreover, the laser exhibited an
operational lifetime in excess of 10<sup>5</sup> laser pulses.
Example 3
A laser was formed by vacuum-depositing an organic film
containing coumarin-47-doped CBP onto the (100) crystallographic
surface of a polished InP first mirror layer. The first mirror
layer was pre-coated with a 2 μm layer of Si0<sub>2</sub>, deposited by
plasma enhanced chemical vapor depsition. The laser was
optically pumped with 500 psec pulses generated by a nitrogen
laser at = 337 nm, with a 50 Hz repetition rate. The pump beam
was focused onto a 50 μm width region on the organic film to form
the gain region.
The optically-pumped laser resulted in a lasing
wavelength of approximately 455 nm and a lasing threshold of 15
μj/cm<sup>2</sup>. Moreover, the laser exhibited an operational lifetime
on the order of 10<sup>3</sup> laser pulses.
Example 4
A laser was formed by vacuum-depositing an organic film
containing coumarin-30 -doped CBP onto the- (100) crystallographic surface of a polished InP first mirror layer. The first mirror
layer was pre-coated with a 2 μm layer of Si0<sub>2</sub>, deposited by
plasma enhanced chemical vapor depsition. The laser was
optically pumped with 500 psec pulses generated by a nitrogen
laser at = 337 nm, with a 50 Hz repetition rate. The pump beam
was focused onto a 50 μm width region on the organic film to form
the gain region.
The optically-pumped laser resulted in a lasing
wavelength of approximately 510 nm and a lasing threshold of 13
μJ/cm . Moreover, the laser exhibited an operational lifetime
on the order of 10<sup>2</sup> laser pulses.
Example 5
A laser was formed by vacuum-depositing an organic film
containing DCM2 -doped Alq<sub>3</sub> onto a polished InP first mirror
layer. The first mirror layer was pre-coated with a 2μm layer
of Si0<sub>2</sub>, deposited by plasma enhanced chemical vapor deposition.
The laser was optically pumped with 500 psec pulses generated by
a nitrogen laser at = 337nm, with a 50 Hz repetition rate.
The optically-pumped laser resulted in a lasing
wavelength of approximately 670 nm and a lasing threshold of 2.5
μj/cm<sup>2</sup>. Moreover, the laser exhibited an operational lifetime in excess of 10° laser pulses and a differential quantum
efficiency of approximately 30%.
Example 6
A laser was formed by vacuum-depositing an organic film
containing DCM-doped Alq<sub>3</sub> onto a polished InP first mirror layer.
The first mirror layer was pre-coated with a 2μm layer of Si0<sub>2</sub>,
deposited by plasma enhanced chemical vapor deposition. The
laser was optically pumped with 500 psec pulses generated by a
nitrogen laser at = 337nm, with a 50 Hz repetition rate.
The optically-pumped laser resulted in a lasing
wavelength of approximately 650 nm and a lasing threshold of
approximately 3 μj/cm<sup>2</sup>. Moreover, the laser exhibited an
operational lifetime in excess of 10<sup>6</sup> laser pulses and a
differential quantum efficiency of approximately 30%.
Example 7
As one example of the embodiment shown in Fig. 7, an
OVCSEL 1200 was formed comprising an active layer 1110 of tris-
(8-hydroxyquinoline) aluminum ("Alq<sub>3</sub>") doped with DCM laser dye.
The thickness of the active layer 1110 was 500 nm. The
concentration of DCM laser dye in the layer 1110 was 3% by
weight. The active layer 1110 was deposited onto the first mirror layer 1111 (a DBR mirror in this example) by thermal
evaporation at 5 x 10<sup>"7</sup> Torr. The buffer layer 1114 comprised
Alq<sub>3</sub> and was deposited over the active layer 1110, and a silver
mirror layer 1112 was deposited over the buffer layer 1114. The
thicknesses of the buffer layer 1114 and the DBR mirror layer
1111 were 20 nm and 200 nm, respectively. The DBR mirror layer
1111 had a >99% reflective stopband between 600 nm and 700 nm,
while the reflectivity of the silver mirror was calculated to be
91%.
The OVCSEL 1200 was optically pumped using a nitrogen
laser ( = 337 nm) , which generated 500 ps pulses at a 50 Hz
repetition rate. The pump beam was aimed incident through the
DBR mirror 1111 and was focused to a spot approximately 100 m
across on the organic film surface. At the wavelength of the
exciting laser (i.e., = 337 nm) the DBR mirror 1111 exhibited
a transmittance of about 80%. In this example, the substrate
1113 comprised quartz, which is transparent to a pump beam
characterized by = 337 nm.
The emission spectrum in the substrate normal direction
(with a 15 full angle acceptance cone) was analyzed by a
spectrograph using a charge-coupled device camera with a
wavelength resolution of 1 A. To avoid material degradation, all
measurements were performed in a dry nitrogen environment . Fig. 15 shows the spontaneous emission spectrum of the
OVCSEL 1200 just below the lasing threshold. A cavity mode was
observed at = 635 nm. At < 600 nm and > 700 nm, the
spontaneous emission is filtered by the modulation in the DBR
transmission spectrum resulting in the broad satellite peaks
observed. The spectrum above the lasing threshold, corresponding
to an energy of E<sub>TH</sub> = 300 J/cm<sup>2</sup>, is completely dominated by the
high gain, spectrally narrow laser emission, as shown in Fig. 16.
Fig. 17 shows the high resolution emission spectra from
the OVCSEL 1200 at increasing excitation levels near the lasing
threshold. Pump energies and the spectral full width at half
maximum are indicated. The transition from the 12 A wide
spontaneous emission peak, spectrally filtered by the microcavity
below threshold, to the resolution-limited, < 1 A full width
spectral line due to laser emission above threshold, is clearly
observed. The spectral width of the peak below threshold is
related to the finesse (the ratio of microcavity mode spacing to
a single mode linewidth) of the microcavity, with additional
broadening due to the presence of several transverse modes . Mode
competition above threshold confines lasing to only a few of the
transverse modes, leading to a concomitant reduction in the
emission linewidth. The left inset of Fig. 17 shows (0.4 ± 0.1)
broad emission line of an OVSEL with a cavity thickness of 475 nm. Accounting for the (0.2 + 0.1) instrument resolution, the
Gaussian full-width-at-half-maximum of the lasing line is
calculated to be (0.2 ± 0.1).
Fig. 18 shows the dependence of the laser output power
on input excitation, clearly indicating a threshold at a pump
energy density of E<sub>TH</sub> = 300 J/cm<sup>2</sup>. This threshold is two orders
of magnitude higher than that for similar edge emitting organic
semiconductor lasers as a consequence of higher optical losses
in the microcavity structure (500 cm<sup>-1</sup>) , and a short gain length
(500 nm) . The Alq<sub>3</sub>:DCM material gain at threshold in OVCSELs is
estimated to be g<sub>TH</sub> = 500 cm<sup>-1</sup>, which is comparable to the
internal gain in InGaAs/GaAs quantum well structures.
The lasers of the present invention are applicable to
a wide variety of applications, including telecommunications,
printing, optical downconversion, semiconductor circuit etching,
thermal processing (e.g., marking, soldering and welding),
spectroscopy, vehicular control and navigation, measurement
devices, optical memory devices, displays, scanners, pointers,
games and entertainment systems and sensors.
The present invention provides for organic lasers with
desired properties such as narrow bandwidth emission, the minimal
use of active organic materials, and- the facilitation of wavelength tuning and electrical pumping. The vertical-cavity
surface-emitting structures of the present invention represent
the first known successful demonstration of lasing action in a
small molecular weight organic semiconductor microcavity
structure associated with a clear threshold in the output power,
a well defined laser beam, cavity modes, and spectral line
narrowing of emission above threshold to less than 1 A. Those
with skill in the art may recognize various modifications to the
embodiments of the invention described and illustrated herein.
Such modifications are meant to be covered by the spirit and
scope of the appended claims.
Every citation, both ways
| Document | Relation | Office | Cited during |
|---|---|---|---|
| US7505487B2 | Cited by | United States of America | Applicant |
| US4395769A | Cites | United States of America | Search report |
| US5307363A | Cites | United States of America | Search report |
| US6111902A | Cites | United States of America | Examiner |
20 members in 8 offices
Priority claims27
| Document | Office | Kind | Date |
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| 46061P | United States of America | – | |
| 4606197 | United States of America | P | |
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| 859468 | United States of America | – | |
| 85946897 | United States of America | A | |
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| 5317697 | United States of America | P | |
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| 10594 | United States of America | – | |
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| 9809480 | United States of America | W | |
| 9809480 | United States of America | W | |
| 10594 | – | – | – |
| 46061P | – | – | – |
| 53176P | – | – | – |
| 73843 | – | – | – |
| 859468 | – | – | – |
| US19970046061P | – | – | – |
| US19970053176P | – | – | – |
| US19970859468 | – | – | – |
| US19980010594 | – | – | – |
| US19980073843 | – | – | – |
| WO1998US09480 | – | – | – |
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| WO9850989A9 | World Intellectual Property Organization (WIPO) | A9 | |
| TW381363B | Taiwan Province of China | B | |
| EP0980595A2This record | European Patent Office (EPO) | A2 | |
| US6111902A | United States of America | A | |
| US6160828A | United States of America | A | |
| US6330262B1 | United States of America | B1 | |
| JP2002500823A | Japan | A | |
| US6396860B1 | United States of America | B1 | |
| EP0980595A4 | European Patent Office (EPO) | A4 | |
| EP0980595B1 | European Patent Office (EPO) | B1 | |
| AT281011T | Austria | T | |
| ATE281011T1 | Austria | T1 | |
| DE69827246D1 | Germany | D1 | |
| DE69827246T2 | Germany | T2 | |
| JP2009065215A | Japan | A | |
| JP4289512B2 | Japan | B2 | |
| JP5726399B2 | Japan | B2 |
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Numbers
- Publication
- 0980595
- Publication, DOCDB
- 0980595
- Publication, EPODOC
- EP0980595
- Application
- 98922166
- Application, DOCDB
- 98922166
- Application, EPODOC
- EP19980922166
Titles3
- German
- ORGANISCHE LASER
- English
- ORGANIC LASERS
- French
- LASERS ORGANIQUES
Classification
- CPC, 7
- H01S5/36
- H01S3/0632
- H01S3/0635
- H01S3/168
- H01S5/041
- H01S5/142
- H01S5/18305
- IPC, 9
- C09K11 06
- H01S3 063
- H01S3 08
- H01S3 0943
- H01S3 16
- H01S5 04
- H01S5 183
- H01S5 30
- H01S5 36
Designated states24
- Contracting states, 19
- Austria
- Belgium
- Switzerland
- Cyprus
- Germany
- Denmark
- Spain
- Finland
- France
- United Kingdom
- Greece
- Ireland
- Italy
- Liechtenstein
- Luxembourg
- Monaco
- Netherlands (Kingdom of the)
- Portugal
- Sweden
- Extension states, 5
- Albania
- Lithuania
- Latvia
- Romania
- Slovenia