Nova Patents
EP0947469A3

Abrasive

Abstract

The abrasive of the present invention is composed of ceric oxide particles heated at a temperature of 50 to 250°C in an aqueous medium in the presence of an ammonium salt or of a reducing substance. The abrasive is used for polishing preferably of semiconductor devices.

Term

Term ended

Projected expiry passed 30 July 2017, 9.2 years ago.

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Every citation, both ways

Citations
DocumentRelationOfficeCategoryCited duringRelevant claims
GB2075478ACitesUnited KingdomASearch report
GB2102780ACitesUnited KingdomDASearch report1,2,4-6,8
HIRANO M ET AL: "THE HYDROTHERMAL SYNTHESIS OF ULTRAFINE CERIUM(IV) OXIDE POWDERS", JOURNAL OF MATERIALS SCIENCE LETTERS,GB,CHAPMAN AND HALL LTD. LONDON, vol. 15, no. 14, pages 1249-1250, XP000628318, ISSN: 0261-8028Non-patentSearch report