EP0940652A3

Surface shape recognition sensor and method of fabricating the same

Abstract

A surface shape recognition sensor of this invention includes at least a plurality of capacitance detection elements having sensor electrodes arranged in the same plane on an interlevel dielectric film formed on a semiconductor substrate to be insulated/isolated from each other, capacitance detection means for detecting the capacitances of the capacitance detection elements, and a stationary electrode disposed on the interlevel dielectric film to be insulated/isolated from the sensor electrodes. When an object to be recognized touches the upper surface of the stationary electrode, the capacitances detected by the capacitance detection elements change in accordance with the recesses/projections on the upper surface.

EP0940652A3, drawing sheet 1
Sheet 1 of 1

Term

Term ended

Projected expiry passed 4 March 2019, 7.6 years ago.

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