EP0907076A3
Methods of fabricating integrated, aligned tunneling tip pairs
Abstract
Self-aligned, opposed, nanometer dimension tips (12, 22) are fabricated in pairs, one of each pair being located on a movable (24) single crystal beam, with the beam being movable in three dimensions with respect to a substrate (18) carrying the other tip (12) of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers (120, 122, 124, 126) formed on the supporting beams (62, 64). Spring means (76, 80, 86, 88) in each beam allow axial motion of the beam. The tips (12, 22) and beams (62, 64) are fabricated from single crystal silicon substrate (18) and the tips (12, 22) may be electrically isolated from the substrate (18) by fabricating insulating segments (40, 54) in the beam structure.
Term
Term ended
Projected expiry passed 12 May 2012, 14.4 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
1 sheet
Sheet 1
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| EP0262253A1 | Cites | European Patent Office (EPO) | Y | Search report | 1,2,5-16,18 |
18 members in 6 offices
Priority claims14
| Document | Office | Kind | Date |
|---|---|---|---|
| 699390 | United States of America | – | |
| 69939091 | United States of America | A | |
| 69939091 | United States of America | A | |
| 868138 | United States of America | – | |
| 86813892 | United States of America | A | |
| 86813892 | United States of America | A | |
| 92912228 | European Patent Office (EPO) | A | |
| 92912228 | European Patent Office (EPO) | A | |
| 699390 | – | – | – |
| 868138 | – | – | – |
| 92912228 | – | – | – |
| EP19920912228 | – | – | – |
| US19910699390 | – | – | – |
| US19920868138 | – | – | – |
Members18
| Document | Office | Kind | |
|---|---|---|---|
| WO9220842A1 | World Intellectual Property Organization (WIPO) | A1 | |
| US5235187A | United States of America | A | |
| EP0584233A1 | European Patent Office (EPO) | A1 | |
| JPH06507718A | Japan | A | |
| US5449903A | United States of America | A | |
| EP0584233A4 | European Patent Office (EPO) | A4 | |
| EP0584233B1 | European Patent Office (EPO) | B1 | |
| EP0907076A2 | European Patent Office (EPO) | A2 | |
| AT177875T | Austria | T | |
| ATE177875T1 | Austria | T1 | |
| DE69228681D1 | Germany | D1 | |
| DE69228681T2 | Germany | T2 | |
| EP0907076A3This record | European Patent Office (EPO) | A3 | |
| EP0907076B1 | European Patent Office (EPO) | B1 | |
| AT334477T | Austria | T | |
| ATE334477T1 | Austria | T1 | |
| DE69233641D1 | Germany | D1 | |
| DE69233641T2 | Germany | T2 |
50 legal events, as 4 offices reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | Office | |
|---|---|---|---|
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Notification of lapseLapsedST | ST | FR | |
| Gb: european patent ceased through non-payment of renewal feeCeasedGBPC | GBPC | EP | |
| Patent ceasedCeasedPL | PL | CH | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Change of the address of the representativeRENTSCH & PARTNER;FRAUMUENSTERSTRASSE 9, POSTFACH 2441;8022 ZUERICH (CH)PCAR | PCAR | CH | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| No opposition filedOpposition26N | 26N | EP | |
| No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE | PLBE | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA | STAA | EP | |
| Fr: translation filedET | ET | EP | |
| Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents actLapsedNLV1 | NLV1 | EP | |
| New agentNV | NV | CH | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Corresponds to:REF | REF | EP | |
| European patent takes effect as a national patent in ch/liEP | EP | CH | |
| Divisional application: reference to earlier applicationAC | AC | EP | |
| Designated contracting statesAK | AK | EP | |
| European patent grantedGrantedFG4D | FG4D | GB | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| (expected) grantORIGINAL CODE: 0009210GRAA | GRAA | EP | |
| Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS | GRAS | EP | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP | GRAP | EP | |
| Title (correction)METHOD OF FABRICATING INTEGRATED, ALIGNED TUNNELING TIP PAIRSRTI1 | RTI1 | EP | |
| Party data changed (applicant data changed or rights of an application transferred)RAP3 | RAP3 | EP | |
| First examination report despatched17Q | 17Q | EP | |
| Request for examination filed17P | 17P | EP | |
| Designated contracting statesAK | AK | EP | |
| Information provided on ipc code assigned before grant7H 01J 37/063 A, 7G 01B 7/34 B, 7G 01N 27/00 B, 7H 02N 1/00 BRIC1 | RIC1 | EP | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | EP | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | EP | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | EP | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | EP | |
| Divisional application: reference to earlier applicationAC | AC | EP | |
| Designated contracting statesAK | AK | EP | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP |
Numbers
- Publication
- 0907076
- Publication, DOCDB
- 0907076
- Publication, EPODOC
- EP0907076
- Application
- 98116809
- Application, DOCDB
- 98116809
- Application, EPODOC
- EP19980116809
Titles3
- German
- Herstellungsverfahren für integrierte ausgerichete Tunnelspitzenpaare
- English
- Methods of fabricating integrated, aligned tunneling tip pairs
- French
- Procédé de fabrication pour des paires de pointes à effect tunnel alignées
Classification
- CPC, 5
- H02N1/008
- G01Q20/04
- G01Q60/16
- Y10S977/874
- B82Y35/00
- IPC, 11
- G01B7 34
- B81B1 00
- B81B3 00
- G01B7 00
- G01N37 00
- G01Q20 04
- G01Q60 16
- G01Q70 12
- G01Q70 14
- H01J37 28
- H02N1 00
Designated states15
- Contracting states, 15
- Austria
- Belgium
- Switzerland
- Germany
- Denmark
- Spain
- France
- United Kingdom
- Greece
- Italy
- Liechtenstein
- Luxembourg
- Monaco
- Netherlands (Kingdom of the)
- Sweden