EP0828618A4
Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 3 June 2016, 10.3 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
7 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5 Sheet 6 Sheet 7
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| EP0343038A1 | Cites | European Patent Office (EPO) | A | Search report | 1-3,8,10-12,25,26,30,31,36,47,49-53 |
| US4555303A | Cites | United States of America | – | Search report | – |
| US5163458A | Cites | United States of America | – | Search report | – |
| EP0343038A | Cites | European Patent Office (EPO) | – | – | – |
| See also references of WO 9638311A1 | Non-patent | – | – | Search report | – |
27 members in 8 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 19950458136 | United States of America | – | |
| 45813695 | United States of America | A | |
| 9608436 | United States of America | W |
Members27
| Document | Office | Kind | |
|---|---|---|---|
| CA2163967A1 | Canada | A1 | |
| WO9428568A1 | World Intellectual Property Organization (WIPO) | A1 | |
| AU6962394A | Australia | A | |
| US5387842A | United States of America | A | |
| US5403453A | United States of America | A | |
| US5414324A | United States of America | A | |
| US5456972A | United States of America | A | |
| EP0700577A1 | European Patent Office (EPO) | A1 | |
| KR960702844A | Republic of Korea | A | |
| CA2222620A1 | Canada | A1 | |
| WO9638311A1 | World Intellectual Property Organization (WIPO) | A1 | |
| JPH08511898A | Japan | A | |
| AU6148496A | Australia | A | |
| EP0700577A4 | European Patent Office (EPO) | A4 | |
| AU679237B2 | Australia | B2 | |
| US5669583A | United States of America | A | |
| EP0828618A1 | European Patent Office (EPO) | A1 | |
| AU695099B2 | Australia | B2 | |
| KR19990022248A | Republic of Korea | A | |
| WO9915711A1 | World Intellectual Property Organization (WIPO) | A1 | |
| AU9570998A | Australia | A | |
| JPH11507990A | Japan | A | |
| US5938854A | United States of America | A | |
| RU2154363C2 | Russian Federation | C2 | |
| US6146724A | United States of America | A | |
| EP0828618A4This record | European Patent Office (EPO) | A4 | |
| CA2163967C | Canada | C |
7 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application deemed to be withdrawnWithdrawn18D | 18D | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA | STAA | |
| Supplementary search report drawn up and despatchedA4 | A4 | |
| Designated contracting statesAK | AK | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 0828618
- Application
- 969190370
Titles3
- English
- METHOD AND APPARATUS FOR CLEANING SURFACES WITH A GLOW DISCHARGE PLASMA AT ONE ATMOSPHERE OF PRESSURE
- French
- PROCEDE ET DISPOSITIF POUR NETTOYER DES SURFACES PAR PLASMA A DECHARGE LUMINEUSE SOUS UNE PRESSION D'UNE ATMOSPHERE
- German
- VERFAHREN UND VORRICHTUNG ZUM REINIGEN VON OBERFLÄCHEN MITTELS EINES GLIMMENTLADUNGSPLASMAS UNTER ATMOSPHÄRENDRUCK
Classification
- CPC, 24
- H10P70/12
- B44C1/22
- B08B7/0035
- B29C59/14
- B29C2059/145
- B29K2023/12
- B63B1/34
- B64C23/005
- B64D15/14
- C23G5/00
- H01J37/32082
- H01J37/32174
- H01J37/32532
- H01J37/32541
- H01J37/3277
- H01J2237/335
- H01J2237/336
- H05B7/16
- H05H1/46
- B64C2230/12
- D04H1/56
- Y02T50/10
- Y02T70/10
- C23F1/00
- IPC, 16
- B08B7 00
- B29C59 14
- B63B1 34
- B64C23 00
- B64D15 14
- C23F4 00
- C23G5 00
- D04H1 56
- F15D1 12
- H01J37 32
- H01L21 302
- H01L21 304
- H01L21 306
- H01L21 3065
- H05B7 16
- H05H1 46
Designated states18
- Contracting states, 18
- Austria
- Belgium
- Switzerland
- Germany
- Denmark
- Spain
- Finland
- France
- United Kingdom
- Greece
- Ireland
- Italy
- Liechtenstein
- Luxembourg
- Monaco
- Netherlands (Kingdom of the)
- Portugal
- Sweden