EP0807964A4

Device for treating planar elements with a plasma jet

Abstract

This record has no abstract on file.

EP0807964A4, drawing sheet 1 — Sheet 1 of 11

Term

Term ended

Projected expiry passed 11 April 2015, 11.5 years ago.

Parties

Owner: AZ CORP
Applicants: ZAKRYTOE AKTSIONERNOE OBSCHESTVO NAUCHNO PROIZVODSTVENNAYA FIRMA "AZ"
Inventors: TOKMULIN, Iskander Malikovich ul. Voinov-Internat, Lyubertsy, 140013, Russian Federation
BAGRY, Igor Petrovich, Lobnya, 141730, Russian Federation
BALATS, Boris Mikhailovich, Moscow, 111020, Russian Federation
SINYAGIN, Oleg Vyacheslavovich, Fryazino, 141120, Russian Federation
and 3 more inventorsShow fewer
VIROVETS, Aleksei Borisovich, Moscow, 127577, Russian Federation
SHAMSHURIN, Vyacheslav Gennadievich, Lobnya, 141730, Russian Federation
ANTROPOV, Aleksandr Mikhailovich, Ramenskoe, 140143, Russian Federation

Examination

Examiner: Schaub, Guy
Agent: Waldren, Robin Michael

Reach

Cites: 1 non-patent work⁠
Family: 15 members in 8 offices⁠EP3CA2DE2JP2KR2RU2USWO

Classification

CPC: H10P72/78H10P50/242H10P72/3304
IPC: H05H1 46H01L21 205H01L21 302H01L21 3065H01L21 677H01L21 683+1 more

11 sheets

Sheet 1
Sheet 2
Sheet 3
Sheet 4
Sheet 5
Sheet 6
Sheet 7
Sheet 8
Sheet 9
Sheet 10
Sheet 11

Citations
Reference	Relation	Cited during
No further relevant documents disclosed	Non-patent	Search report

15 members in 8 offices

This recordMember, by publication datePriority claim

Priority claims3

Priority claims
Document	Office	Kind	Date
95100180	Russian Federation	–	1995-01-13
95100180	Russian Federation	A	1995-01-13
9500063	Russian Federation	W	1995-04-11

Members15

Family members, oldest first
Document	Office	Kind
CA2210130A1	Canada	A1	1996-07-18
WO9621943A1	World Intellectual Property Organization (WIPO)	A1	1996-07-18
RU95100180A	Russian Federation	A	1996-10-27
RU2075135C1	Russian Federation	C1	1997-03-10
EP0807964A1	European Patent Office (EPO)	A1	1997-11-19
DE807964T1	Germany	T1	1998-03-12
KR19980701318A	Republic of Korea	A	1998-05-15
JPH11502049A	Japan	A	1999-02-16
EP0807964A4This record	European Patent Office (EPO)	A4	2002-05-22
KR100322524B1	Republic of Korea	B1	2002-07-03
JP3568958B2	Japan	B2	2004-09-22
US6845733B1	United States of America	B1	2005-01-25
CA2210130C	Canada	C	2007-08-14
EP0807964B1	European Patent Office (EPO)	B1	2009-09-16
DE69536005D1	Germany	D1	2009-10-29

23 legal events, as 3 offices reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code	Office
2015-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2015-05-06	Patent expired after termination of 20 yearsExpiredPE20	PE20	GB
2015-04-14	Expiry of rightR071	R071	DE
2014-08-29	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2014-08-29	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2014-06-30	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2010-08-25	No opposition filedOpposition26N	26N	EP
2010-07-23	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2010-07-23	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2009-10-29	Corresponds to:REF	REF	EP
2009-09-16	Designated contracting statesAK	AK	EP
2009-09-16	European patent grantedGrantedFG4D	FG4D	GB
2009-08-14	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2009-08-11	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2009-03-17	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2004-05-26	First examination report despatched17Q	17Q	EP
2002-05-22	Supplementary search report drawn up and despatchedA4	A4	EP
2002-05-22	Information provided on ipc code assigned before grant7H 01L 21/3065 A, 7H 05H 1/24 B, 7H 01J 37/32 B, 7H 01L 21/00 BRIC1	RIC1	EP
1998-03-12	De: translation of patent claimsDET	DET	EP
1997-12-26	Fr: translation of claims filedEL	EL	EP
1997-11-19	Request for examination filed17P	17P	EP
1997-11-19	Designated contracting statesAK	AK	EP
1997-10-03	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP