EP0803904A3
Substrate support
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 21 April 2017, 9.4 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| EP0619381A1 | Cites | European Patent Office (EPO) | A | Search report | 1-29 |
| EP0693774A2 | Cites | European Patent Office (EPO) | A | Search report | 1-29 |
| US4692836A | Cites | United States of America | YD | Search report | 18,19 |
| US5096536A | Cites | United States of America | YDA | Search report | 1-6,9,21 |
| US5160152A | Cites | United States of America | AD | Search report | 10-17 |
| US5230741A | Cites | United States of America | A | Search report | 1-29 |
| US5270266A | Cites | United States of America | A | Search report | 1-29 |
| US5530616A | Cites | United States of America | PA | Search report | 1-29 |
| US5609720A | Cites | United States of America | PX | Search report | 1,2,8,9,21,22 |
| PATENT ABSTRACTS OF JAPAN vol. 014, no. 002 (E - 868) 8 January 1989 (1989-01-08) | Non-patent | – | – | Search report | – |
8 members in 5 offices; this record represents the family
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 64114796 | United States of America | A |
Members8
| Document | Office | Kind | |
|---|---|---|---|
| EP0803904A2 | European Patent Office (EPO) | A2 | |
| KR970072048A | Republic of Korea | A | |
| JPH1041378A | Japan | A | |
| US5761023A | United States of America | A | |
| EP0803904A3This record | European Patent Office (EPO) | A3 | |
| TW360937B | Taiwan Province of China | B | |
| KR100303076B1 | Republic of Korea | B1 | |
| JP4176848B2 | Japan | B2 |
8 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application withdrawnWithdrawn18W | 18W | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION HAS BEEN WITHDRAWNSTAA | STAA | |
| First examination report despatched17Q | 17Q | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | |
| Designated contracting statesAK | AK | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Application
- 97106583
Titles3
- German
- Substratträger
- English
- Substrate support
- French
- Support de substrat
Classification
- CPC, 7
- H10P72/7614
- H10P72/0602
- G03F7/707
- G03F7/70708
- H10P72/722
- H10P72/0402
- H10P72/72
- IPC, 2
- G03F7 20
- H10P14 24
Designated states1
- Contracting states, 1
- Sweden