Mixture of metalloid oxide/metal-cerium oxide
4 claims: 1 independent, 3 dependent
- 1Verfahren zur Herstellung einer feinteiligen Ceroxid-Metall/Metalloidoxid-Mischung enthaltend pyrogen hergestellte Metall/Metalloidoxid und 0,001 bis 95 Gew.-% Ceroxid, mit einer spezifischen Oberfläche der erhaltenen Mischung zwischen 10 und 400 m 2 /g;dadurch gekennzeichnet, daß man pyrogen hergestelltes Metall/Metalloidoxid mit einer spezifischen Oberfläche zwischen 30 und 400 m 2 /g mit einer bei erhöhter Temperatur zum Oxid zersetzbaren Cerverbindung intensiv mischt und die Cerverbindung bei Temperaturen zwischen 300 und 600°C und bei Sinterzeiten zwischen 0,5 und 10 Stunden thermisch zum Oxid zersetzt.
- 2Verfahren nach Ansprüch 1, dadurch gekennzeichnet, daß man als mindestens eines der pyrogen hergestellten Metall/Metalloidoxide Oxide des Siliciums, Aluminiums, Bors, Titans oder Zirkoniums oder deren Mischungen bzw. deren Mischoxide mit einer bei erhöhter Temperatur zum Oxid zersetzbaren Cerverbindung intensiv mischt und die Cerverbindung thermisch zum Oxid zersetzt.
- 3Feinteilige Ceroxid Metall/Metalloidoxid-Mischung, erhältlich nach dem Verfahren laut Anspruch 1 oder 2.
- 4Verwendung der Oxide nach Anspruche 3 als Füllstoff in Polymeren oder als Poliermittel zum Polieren in der Elektronikindustrie.
Independent claims4
15 paragraphs, as filed
0001The invention relates to a fine-particle cerium-metal / metalloid oxide mixture, the process for its production and its use.
0002The invention relates to a process for producing a finely divided cerium oxide / metal / metalloid oxide mixture comprising pyrogenically produced metal / metalloid oxide and 0.001 to 95% by weight of cerium oxide, with a specific surface area of the mixture obtained between 10 and 400 m<sup>2</sup>/ g which is characterized in that pyrogenic, in particular metal / metalloid oxide produced by flame hydrolysis with a specific surface area between 30 and 400 m<sup>2</sup>/ g with a cerium compound which is decomposable at elevated temperature, preferably the cerium carbonate, is intensively mixed and the cerium compound is thermally decomposed to the oxide at temperatures between 300 and 600 ° C. and at sintering times between 0.5 and 10 hours.
0003In a preferred embodiment of the invention, oxides of silicon, aluminum, boron, titanium or zirconium or their mixtures or their mixed oxides can be mixed intensively with a cerium compound which can be decomposed to the oxide at elevated temperature as at least one of the fumed metal / metalloid oxides, in particular produced by flame hydrolysis and thermally decompose the cerium compound to the oxide
0004Another object of the invention is a finely divided cerium oxide metal / metalloidox mixture, obtainable by this process.
0005The mixture according to the invention can be used alone or in suspension as a polishing agent for polishing silicone wafers or other polishing tasks occurring in the electronics industry. It can also be used as a UV-absorbing filler for filling polymers.
example 1
0006950 g of the pyrogenic silica OX 50 are mixed with 83.5 g of cerium carbonate (Ce<sub>2</sub>(CO<sub>3</sub>)<sub>3</sub>x5H<sub>2</sub>O) Mix intensively for 30 minutes in a Lödige mixer. The powder is then heated in air at a temperature of 400 ° C for one hour. The cerium oxide content is 5% by weight and the resulting BET surface area is 44 m<sup>2</sup>/G.
Example 2
0007950 g of the pyrogenic silica OX 50 are mixed with 83.5 g of cerium carbonate (Ce<sub>2</sub>(CO<sub>3</sub>)<sub>3</sub>x5H<sub>2</sub>O) Mix intensively for 30 minutes in a Lödige mixer. The powder is then heated in air at a temperature of 500 ° C for one hour. The cerium oxide content is 5% by weight and the resulting BET surface area is 41 m<sup>2</sup>/G.
Example 3
0008900 g of the pyrogenic silica OX 50 are mixed with 167 g of cerium carbonate (Ce<sub>2</sub>(CO<sub>3</sub>)<sub>3</sub>x5H<sub>2</sub>O) Mix intensively for 30 minutes in a Lödige mixer. The powder is then heated in air at a temperature of 400 ° C for one hour. The cerium oxide content is 10% by weight and the resulting BET surface area is 44 m<sup>2</sup>/G.
Example 4
0009900 g of the pyrogenic silica OX 50 are mixed with 167 g of cerium carbonate (Ce<sub>2</sub>(CO<sub>3</sub>)<sub>3</sub>x5H<sub>2</sub>O) Mix intensively for 30 minutes in a Lödige mixer. The powder is then heated in air at a temperature of 500 ° C for one hour.
0010The cerium oxide content is 10% by weight and the resulting BET surface area is 42 m<sup>2</sup>/G. <tables id="tabl0001" num="0001"><table frame="all"><tgroup cols="8" colsep="1" rowsep="1"><colspec colnum="1" colname="col1" colwidth="19.68mm" /><colspec colnum="2" colname="col2" colwidth="19.68mm" /><colspec colnum="3" colname="col3" colwidth="19.68mm" /><colspec colnum="4" colname="col4" colwidth="19.68mm" /><colspec colnum="5" colname="col5" colwidth="19.68mm" /><colspec colnum="6" colname="col6" colwidth="19.68mm" /><colspec colnum="7" colname="col7" colwidth="19.68mm" /><colspec colnum="8" colname="col8" colwidth="19.68mm" /><thead valign="top"><row><entry namest="col1" nameend="col8" align="left">Analysis of the powder samples contained in Examples 1 to 4:</entry></row><row><entry namest="col1" nameend="col1" align="center">example</entry><entry namest="col2" nameend="col2" align="center">CeO<sub>2</sub> % By weight</entry><entry namest="col3" nameend="col3" align="center">Sintering temperature [°]</entry><entry namest="col4" nameend="col4" align="center">Sintering time [°]</entry><entry namest="col5" nameend="col5" align="center">Ramming density [g / l]</entry><entry namest="col6" nameend="col6" align="center">BET surface [m<sup>2</sup>/G]</entry><entry namest="col7" nameend="col7" align="center">Drying loss % By weight</entry><entry namest="col8" nameend="col8" align="center">Loss on ignition % By weight</entry></row></thead><tbody valign="top"><row><entry namest="col1" nameend="col1" align="center">1</entry><entry namest="col2" nameend="col2" align="center">5</entry><entry namest="col3" nameend="col3" align="center">400</entry><entry namest="col4" nameend="col4" align="center">1</entry><entry namest="col5" nameend="col5" align="center">139</entry><entry namest="col6" nameend="col6" align="center">44</entry><entry namest="col7" nameend="col7" align="char" char=",">0,3</entry><entry namest="col8" nameend="col8" align="char" char=",">0,4</entry></row><row><entry namest="col1" nameend="col1" align="center">2</entry><entry namest="col2" nameend="col2" align="center">5</entry><entry namest="col3" nameend="col3" align="center">500</entry><entry namest="col4" nameend="col4" align="center">1</entry><entry namest="col5" nameend="col5" align="center">143</entry><entry namest="col6" nameend="col6" align="center">41</entry><entry namest="col7" nameend="col7" align="char" char=",">0,1</entry><entry namest="col8" nameend="col8" align="char" char=",">0,2</entry></row><row><entry namest="col1" nameend="col1" align="center">3</entry><entry namest="col2" nameend="col2" align="center">10</entry><entry namest="col3" nameend="col3" align="center">400</entry><entry namest="col4" nameend="col4" align="center">1</entry><entry namest="col5" nameend="col5" align="center">173</entry><entry namest="col6" nameend="col6" align="center">44</entry><entry namest="col7" nameend="col7" align="char" char=",">0,05</entry><entry namest="col8" nameend="col8" align="char" char=",">0,7</entry></row><row><entry namest="col1" nameend="col1" align="center">4</entry><entry namest="col2" nameend="col2" align="center">10</entry><entry namest="col3" nameend="col3" align="center">500</entry><entry namest="col4" nameend="col4" align="center">1</entry><entry namest="col5" nameend="col5" align="center">172</entry><entry namest="col6" nameend="col6" align="center">42</entry><entry namest="col7" nameend="col7" align="char" char=",">0,05</entry><entry namest="col8" nameend="col8" align="char" char=",">0,5</entry></row><row rowsep="0"><entry namest="col1" nameend="col8" align="justify">Loss on drying (2 h at 105 ° C, based on DIN / ISO 787 / II, ASTM D 280, JIS K 5101/21).</entry></row><row rowsep="1"><entry namest="col1" nameend="col8" align="justify">Loss on ignition (2 h at 1000 ° C, based on DIN 55921, ASTM D 1208, JIS K 5101/23, based on the substance dried at 105 ° C for 2 h).</entry></row></tbody></tgroup></table></tables>
0011The pyrogen used, by flame hydrolysis of SiCl<sub>4</sub> produced silica OX 50 (manufacturer Degussa) has the following physico-chemical characteristics:<tables id="tabl0002" num="0002"><img file="EP0803471B1_D0001.tif" /></tables>
1 sheet
Sheet 1
Every citation, both ways
| Document | Relation | Office |
|---|---|---|
| EP0649885A | Cites | European Patent Office (EPO) |
| WO9322103A | Cites | World Intellectual Property Organization (WIPO) |
| US4360388A | Cites | United States of America |
9 members in 5 offices; this record represents the family
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 19616780 | Germany | – | |
| 19616780 | Germany | A |
Members9
| Document | Office | Kind | |
|---|---|---|---|
| CA2203468A1 | Canada | A1 | |
| EP0803471A2 | European Patent Office (EPO) | A2 | |
| DE19616780A1 | Germany | A1 | |
| JPH10130004A | Japan | A | |
| EP0803471A3 | European Patent Office (EPO) | A3 | |
| US5897675A | United States of America | A | |
| JP3195269B2 | Japan | B2 | |
| CA2203468C | Canada | C | |
| EP0803471B1This record | European Patent Office (EPO) | B1 |
25 legal events, as 3 offices reported them to INPADOC
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Numbers
- Publication
- 0803471
- Application
- 971044995
Titles3
- German
- Ceroxid-Metall / Metalloidoxid-Mischung
- English
- Mixture of metalloid oxide/metal-cerium oxide
- French
- Mélange oxyde de métalloide/métal-oxyde de cérium
Classification
- CPC, 7
- C09K3/14
- C01B13/185
- C01P2006/10
- C01P2006/12
- C01P2006/82
- C08K3/22
- C09K3/1454
- IPC, 9
- B24D3 00
- C01B13 18
- C01F17 00
- C01G23 04
- C01G23 07
- C01G25 02
- C08K3 22
- C09K3 14
- H01L21 304
Designated states3
- Contracting states, 3
- Germany
- France
- United Kingdom
