Flip chip silicone pressure sensitive conductive adhesive

0001This invention is directed to integrated circuits and to improvements in the interconnections used therein.

0002Most modern electronic systems include one or more integrated circuit (IC) chips bonded to a suitable ceramic substrate, which in turn is connected to an electronic package such as a module, card, board or gate.

0003In many electronic systems, solder bump interconnections are used to eliminate the expense, unreliability and low productivity, of wirebonding of chips to their substrate. Thus, the so-called Controlled Collapse Chip Connection (C4), for example, utilizes solder bumps deposited on solder wettable metal terminals on the IC chip and matching footprints of solder wettable terminals on the substrate.

0004This upside-down chip or <i>flip chip</i> is aligned to the substrate and all of the joints are made simultaneously by reflowing the solder. Flip chip joining is opposite to traditional back-side-down methods of bonding, in which the active side of the chip, i.e. facing up, is wirebonded. In the flip chip, the back of the chip is free of mechanically or electrically delicate surface features.

0005While the flip chip interconnection method has been largely successful in various applications, it suffers from certain disadvantages, among which are its susceptibility to mismatches between the coefficients of thermal expansion for the chip and the substrate. Thus, mismatches between these materials produce high shear stresses in the solder joints, which compromises the reliability of the flip chip interconnection.

0006As a solution, a new conductive adhesive is introduced containing randomly dispersed populations of conductive particles. These particles are distributed to provide electrical conductivity through only the thickness of the adhesive or the particles are distributed to provide electrical conductivity through the bulk of the adhesive in all directions. Surprisingly, our adhesive possesses the advantages of being repairable, reworkable and capability of entire removal from a bonded device with heat and/or solvent. These features unexpectedly allow such devices to be temporarily positioned, tested, removed and repositioned permanently, without damage to the device. During the process, if one or more of the chips are found defective, it is simply removed and replaced with ease.

0007In a first embodiment, our invention provides a tacky conductive adhesive that is repeatedly utilized to test the integrated circuit of any die (chip) prior to its further processing. The tacky conductive adhesive material is also used as a die (chip) attachment adhesive. Our formulation of the tacky conductive adhesive includes a silicone resin, a silicone gum, a conductive particulate material such as silver-clad glass fibers and may include a peroxide catalyst. For this first embodiment, the conductive adhesive material must have a tacky character to work in electronic applications, as the tackiness ensures that intimate contact is made with the circuit, so it is adequately tested.

0008In a second embodiment, our invention relates to a tacky conductive adhesive that is easily utilized for flip chip production processes. The tacky conductive adhesive is prepared by combining a silicone resin, a silicone gum, a conductive particulate material such as silver-clad glass hollow microspheres and a peroxide catalyst.

0009Our second embodiment represents an economical solution in the manufacture of flip chip devices. It is also suitable as a conductive adhesive for solderless flip chip applications, although it is primarily used in conjunction with solder flip chip applications. This approach provides a simple method for securing a flip chip to the interconnects on a substrate without using solder materials, which typically lack the elasticity and toughness to afford good reliability. Our conductive adhesive is applied to each bond pad on the flip chip and then cured to provide a tacky surface.

0010In our second embodiment, we use a simple mixture of a tacky adhesive formulation, together with conductive spherical particles. We have found that any of three types of conductive particulate materials are suitable and can be used.

0011A first conductive particulate material is spherical gold particles having an average diameter of 3-5 micrometers (microns).

0012As second conductive particulate material, and the type most preferred in our invention, are spherical hollow glass microspheres coated with silver, gold, nickel or copper. One particularly useful particulate of this second type is silver-coated glass microspheres having an average particle diameter ranging from 3 to 5 micrometers (microns).

0013A third conductive particulate material is spherical particles of metal alloys. Specific examples of this third type are 39Sn/10Cu with an average diameter of 10 mils (254 micrometers), 49Pb/5Sn with an average diameter of 16 mils (406 micrometers), 49Pb/10Sn with an average diameter of 3 mils (76 micrometers) and 49Au/20Sn with an average diameter of 3 mils (76 micrometers). All three types of the foregoing conductive spherical particles are commercial products and readily available in the marketplace.

0014To illustrate the manner in which our conductive adhesive of the second embodiment functions, the conductive spherical particles are first disposed in the matrix of the adhesive. The particles do not touch each other, so they are not conductive within the matrix itself. However, when the mixture of the conductive spherical particles and the adhesive are placed on a bond pad of a flip chip and then the flip chip with its bond pads is coated with the mixture, pressed together with the substrate interconnect, electrical contact is attained between the bond pad and the interconnect.

0015If desired, the conductive adhesive is also conductive in its bulk in all directions by altering the disposition of conductive particles in the adhesive matrix, i.e. the particles touch each other, so they are conductive within the matrix itself.

0016Figures 1A and 1B are simplified functional representations of a conventional Controlled Collapse Chip Connection (C4) in the prior art.

0017Figure 2 is a similar representation of one embodiment of our Controlled Collapse Chip Connection, including the chip and substrate of Figures 1A and 1B, but also showing our new conductive adhesive, which is used in place of the solder balls in Figures 1A and 1B.

0018Figures 3(a), 3(b) and 3(c), are simplified functional representations of another embodiment of our Controlled Collapse Chip Connection, similar to Figure 2, but including a pad on the substrate for holding our new conductive adhesive. In this embodiment, the conductive adhesive is used in conjunction with the solder balls. These three Figures show the modes of assembly and disassembly, i.e. insert mode 3(a), mate mode 3(b) and removal mode 3(c).

0019Figure 4 is a simplified functional representation of yet another embodiment of our Controlled Collapse Chip Connection, similar to Figure 3(b), but includes a socket on the substrate for holding our new conductive adhesive. The socket functions to retain the adhesive.

0020Figures 5(a), 5(b) and 5(c), are simplified functional representations of still another embodiment of our Controlled Collapse Chip Connection, similar to Figures 3(a), 3(b) and 3(c), but including an adhesive tape containing conductive adhesive columns instead of solder balls. These three Figures show the mode of assembly, i.e. the tape itself in Figure 5(a), the tape adhered to the chip in Figure 5(b) and the tape sandwiched between the chip and the substrate in Figure 5(c).

0021With reference to the drawings, Figures 1A and 1B depict one typical arrangement of a conventional Controlled Collapse Chip Connection (C4) to which our invention can pertain. Thus, a flip chip is connected to a substrate using solder balls, as is known in the art. The interior of the substrate shown in Figures 1A and 1B includes the various layers of electrical inputs and outputs used for signal and power distribution or redistribution.

0022In Figure 2, we show one of our embodiments in which we have taken the chip and substrate of Figure 1A and substituted our new conductive adhesive for the solder balls shown in Figure 1A.

0023Figures 3(a)-3(c) represent another of our embodiments in which our new conductive adhesive is used in conjunction with the solder balls in Figure 1A. These figures show how a pad is provided on the substrate for holding our new conductive adhesive during its use in the assembly and disassembly modes, i.e. insert mode 3(a), mate mode 3(b) and removal mode 3(c).

0024Figure 4 depicts a similar arrangement, but includes the perfecting feature of a socket on the substrate pad for holding our new conductive adhesive to retain the adhesive.

0025Figures 5(a)-5(c) depict an additional one of our improvements in Controlled Collapse Chip Connections, but instead of using adhesive balls or bumps, we employ an adhesive tape containing our conductive adhesive in the shape of columns. The tape is seen in Figure 5(a). It is shown adhered to the chip in Figure 5(b) and it is then sandwiched between the chip and the substrate as seen in Figure 5(c).

0026The adhesive used to make our conductive adhesive is a silicone pressure sensitive adhesive (SPSA) which comprises a resin component and a polymer component. SPSAs typically contain at least two primary components; namely a linear siloxane polymer and a tackifier resin essentially consisting of triorganosiloxane (M) units (i.e., R3SiO_1/2 in which R denotes a monovalent organic group) and silicate (Q) units (i.e., SiO_4/2). Such <i>MQ</i> resins are used to prepare SPSA compositions and generally have M/Q molar ratios in the range of 0.6-0.9.

0027SPSAs are known in the art from US 5,248,739. They include (a) a high molecular weight polydimethylsiloxane gum (or copolymer) and (b) an MQ resin wherein the M/Q ratio is 0.5 to 1.0; and SPSAs comprising an MQ resin, silicone gum and a peroxide curing agent. These compositions generally employ a resin/polymer ratio of 40/60 to 60/40 by weight.

0028Our SPSA composition contains: <ul id="ul0001" list-style="none" compact="compact"><li>(A) 10-60 percent by weight of a soluble organopolysiloxane resin essentially consisting of R₃SiO_1/2 siloxane units and SiO_4/2 siloxane units, wherein each R denotes a monovalent radical selected from hydrocarbon radicals or halogenated hydrocarbon radicals, at least 1/3 of all R radicals being methyl and the mole ratio of R₃SiO_1/2 siloxane units to SiO_4/2 siloxane units in the soluble organopolysiloxane resin has a value of from 0.75-1.0; and</li><li>(B) 40-90 parts by weight of a polydiorganosiloxane having the general formula R¹R²₂SiO(R²₂SiO)_nSiR²₂R¹ wherein each R² denotes a monovalent radical selected from hydrocarbon radicals or halogenated hydrocarbon radicals, at least 1/2 of all R² radicals being methyl, each R¹ denotes a radical selected from R² or OH groups and the subscript n is a number having an average value of at least 50.</li></ul>

0029Component (A) is a soluble organopolysiloxane resin essentially consisting of R₃SiO_1/2 siloxane units and SiO_4/2 siloxane units. By the term <i>soluble,</i> it is meant that the organopolysiloxane can be dissolved, substantially completely, in either a hydrocarbon liquid such as benzene, toluene, xylene and heptane; or in a silicone liquid such as a volatile cyclic or linear polydiorganosiloxane. Preferably the resin is soluble in component (B).

0030In the formula for component (A), R denotes a monovalent radical selected from hydrocarbon radicals or halogenated hydrocarbon radicals, preferably having less than 20 carbon atoms and most preferably having from 1-10 carbon atoms. Examples of suitable R radicals include alkyl radicals such as methyl, ethyl, propyl, pentyl, octyl, undecyl and octadecyl; cycloalphatic radicals, such as cyclohexyl; aryl radicals such as phenyl, tolyl, xylyl, benzyl and 2-phenylethyl; alkenyl radicals such as vinyl; and chlorinated hydrocarbon radicals such as 3-chloropropyl or dichlorophenyl.

0031To enhance the solubility of component (A) in component (B), it is desirable to select the predominant R radicals of the former to match the predominant R² radicals of the latter. Preferably, at least one-third, and more preferably substantially all R radicals in the formula for component (A), are methyl radicals. The methyl radicals can be distributed in any desired arrangement among the R₃SiO_1/2 siloxane units; however, it is preferred that each R₃SiO_1/2 siloxane unit bear at least one, and more preferably at least two, methyl radicals. Examples of preferred R₃SiO_1/2 siloxane units include Me₃SiO_1/2, PhMe₂SiO_1/2 and Ph₂MeSiO_1/2, where Me denotes methyl and Ph denotes phenyl.

0032Component (A) includes a resinous portion wherein the R₃SiO_1/2 siloxane M units are bonded to the SiO_4/2 siloxane Q units, each of which is bonded to at least one other SiO_4/2 siloxane unit. Some SiO_4/2 siloxane units are bonded to hydroxyl radicals resulting in HOSiO_3/2 units (i.e., TOH units), thereby accounting for the silicon-bonded hydroxyl content of the organopolysiloxane resin and some are bonded only to other SiO_4/2 siloxane units.

0033Component (B) is a polydiorganosiloxane having the general formula R¹R²₂SiO(R²₂SiO)_nSiR²₂R¹. Each R² denotes a monovalent radical selected from hydrocarbon radicals or halogenated hydrocarbon radicals and each R¹ denotes a radical selected from R² radicals or OH groups. Examples of R² radicals include the hydrocarbon and halogenated hydrocarbon radicals noted above for R, as well as monovalent hydrocarbon radicals which contain olefinic unsaturation, such as alkenyl and cycloalkenyl radicals, examples thereof being vinyl, allyl, butenyl, hexenyl, cyclohexenyl and beta-cyclohexenylethyl. Component (B) is comprised of a single polydiorganosiloxane or a mixture of two or more different polydiorganosiloxanes.

0034Component (B) typically comprises a polydiorganosiloxane in which at least 50%, and preferably at least 85%, of the R² radicals are methyl radicals. The methyl radicals are distributed in any manner in the polydiorganosiloxane. R¹ can be an R² radical or a hydroxyl radical. For example, both R¹ radicals can be R² such as methyl, vinyl, phenyl or hydroxyl. Alternatively, the R¹ radicals can be different, such as methyl and vinyl or methyl and hydroxyl. In addition, component (B) can comprise trace amounts of siloxane branching sites, such as R²SiO_3/2 units and SiO_4/2 units, provided that this component remains flowable.

0035Component (B) preferably essentially consists of a polydiorganosiloxane having the general formula R''R'₂SiO(R'₂SiO)_nSiR'₂R'' wherein each R' denotes methyl, phenyl or alkenyl, at least 85 percent of which are methyl radicals and each R'' denotes an OH radical. The average value of the subscript n in the above formula depends on the type of SPSA being prepared. For formulations which include sufficient solvent to impart a practical working viscosity to the final SPSA composition, the average value of n is typically greater than 200.

0036The average value of n used preferably provides an organopolysiloxane component (B) having a viscosity at 25°C. of 50 millipascal-seconds (50 centipoise) to 100 kilopascal-seconds (100,000,000 centipoise), the viscosity being a function of the R² radicals on this polymer. The preferred viscosity of component (B) depends on the specific properties desired in our SPSA. Our SPSAs utilizing a gum based polydiorganosiloxane as component (B), have a viscosity in the range of 0.3 to 100 kilopascal-seconds (300,000 to 10,000,000 centipoise) when measured at 25°C.

0037Polydiorganosiloxanes most preferred for component (B) in our conductive adhesive compositions include hydroxyl-terminated polydiorganosiloxanes, some examples of which are HOMe₂SiO(Me₂SiO)_nSiMe₂OH, HOR²₂SiO(Me₂SiO)_0.94n(Ph₂SiO)_0.06nSiR²₂OH, HOR²₂SiO(Me₂SiO)_0.95n(MeViSiO)_0.05nSiR²₂OH and HOR²₂SiO(Me₂SiO)_0.88n(Ph₂SiO)_0.12nSiR²₂OH, wherein Me, Vi and Ph, denote methyl, vinyl and phenyl, respectively. Both R² radicals at the terminal portions are the same as those of at least one of the other siloxane units present in the polydiorganosiloxane; and n has its previously defined meaning.

0038The optimum relative amounts of components (A) and (B) that are used to form our conductive SPSA compositions are best determined by routine experimentation, since adhesive performance is at least a function of the molecular weights of resin (A) and polymer (B). Typically, however, 10-60 percent by weight of component (A) is used with 40-90 percent by weight of component (B). These amounts are non-volatile amounts.

0039Although these SPSAs are cured by heating to temperatures of up to 300°C. for a suitable length of time, it is preferred that a catalyst (C) be included, to obtain superior adhesive properties. Catalyst (C) is any reactive material that is effective to convert component (B) from its normally flowable state to a non-flowable state. Preferred are organic peroxides such as benzoyl peroxide; dicumyl peroxide [C₆H₅C(CH₃)₂O]₂; 2,5-dimethyl-2,5-di-(t-butylperoxy) hexane; and 2,4-dichlorobenzoyl peroxide (DCBP). Benzoyl peroxide is a particularly effective organic peroxide catalytic agent. The organic peroxide catalyst is used in an amount of 0.5-3.0 percent by weight, based on the weight of components (A) and (B).

0040Curing of our adhesive compositions is accomplished by heating at temperatures up to 300°C., preferably 80-200°C., for a suitable length of time, typically 2-30 minutes. These compositions are also curable by ultraviolet light or electron beam radiation.

0041The compositions are made by homogeneously mixing 10-60 percent by weight of component (A) and 40-90 percent by weight of component (B), in the presence of a non-reactive solvent. Solvents useful in our invention include hydrocarbons such as toluene, xylene, heptane and mineral spirits; volatile siloxanes such as octamethylcyclotetrasiloxane or hexamethyldisiloxane; halohydrocarbons; alcohols; esters; ketones; and combinations of these solvents. The amount of solvent depends on the viscosity of the polydiorganosiloxane component (B). Higher viscosity polydiorganosiloxane polymers require more solvent than lower viscosity polydiorganosiloxane polymers, to facilitate the preparation, handling and applying, of our compositions.

0042Suitable mixing means that are used in their preparation include a spatula, a drum roller, a mechanical stirrer, a three-roll mill, a sigma blade mixer, a bread-dough mixer and a two-roll mill. Preferably, the peroxide catalyst (C) is added to the above mixture just before the product is used.

0043These SPSAs remain flexible and will readily stick to a substrate whether it is flexible or rigid, thus minimizing stress on the chip which may arise from any differences in the coefficients of thermal expansion between the chip and the substrate. They may also be applied by any suitable means such as rolling or spreading and then cured as described above.

0044Another important aspect of these adhesives is that they were surprisingly found to provide complete protection to aluminum bond pads during prolonged exposure to salt-fog. An additional aspect of these adhesives is that no other mechanical means is required to maintain the electrical connection.

0045The substrate may be any solid material including metals such as aluminum, silver, copper, iron and their alloys; organic polymeric materials including polyolefins such as polyethylene or polypropylene; fluorocarbon polymers such as polytetrafluoroethylene or polyvinylfluoride; silicone elastomers; silicone resins; polystyrene; polyamides such as nylon; polyester or acrylic polymers; siliceous materials such as glass; and ceramic materials such as alumina, zirconia, aluminum nitride and beryllia.

0046Tacky conductive adhesives most suitable for our invention contain 10-60 percent by weight of the silicone resin and 40-90 percent by weight of the siloxane gum. The peroxide catalyst is present in an amount of 0.5-3.0 percent by weight, based on the weight of the silicone resin and the siloxane gum.

0047When fibers are used as the conductive particulate material to make our tacky adhesive conductive, the conductive fibers are used in an amount corresponding to 60-70 percent by weight, based on the weight of the silicone resin and the siloxane gum.

0048When microspheres or spherical metallic particles are used as the conductive particulate material to make our tacky adhesive conductive, the conductive microspheres or spherical metallic particles are used in an amount corresponding to 2-45 percent by weight, based on the weight of the silicone resin and the siloxane gum.

0049Generally, any solvent present can be removed from our adhesive mixture by heating the mixture at 66-93°C. for one minute. The mixture is then cured by heating it at 177-204°C. for two minutes when benzoyl peroxide is used as catalyst; or by heating it at 132°C. for two minutes when the catalyst is 2,4-dichlorobenzoyl peroxide.

0050In the examples below, the silicone resin component of our adhesive was a siloxane resin copolymer essentially consisting of (CH₃)₃SiO₂ units and SiO_4/2 units, in a molar ratio of 0.75-1.0 and containing 2.4-2.9 weight percent of hydroxyl groups, based on solids as determined by Fourier Transform Infrared Spectroscopy (FTIR), according to ASTM E-168. The silicone polymer component was a hydroxyl terminated polydimethylsiloxane gum having a plasticity number of 1.4 to 1.5 mm (54-61 mils) based on ASTM D926. It is a high molecular weight siloxane gum conforming generally to the formula HOMe₂SiO(Me₂SiO)_nSiMe₂OH, where n has a value of 10,000.

0051The following example illustrates our first embodiment of tacky conductive adhesive which includes silicone resin, siloxane gum, silver-clad glass fibers as the conductive particulate material and peroxide catalyst. This particular system is described as a Reversible Die Bonding Test Process.

Example I

0052Our tacky conductive adhesive was prepared by combining (a) 1.061 grams of a mixture of 30% of the silicone resin and 20% of the siloxane gum in xylene, the mixture containing 0.5 gram of solids; (b) 1.666 grams of a solution of the siloxane gum in toluene, the solution containing 0.5 gram of solids; (c) 0.01 gram of benzoyl peroxide; (d) 0.19 gram of toluene; and (e) 1.857 grams of silver-clad glass fibers. The silver-clad glass fibers had a size distribution of 10-125 µm, a mean diameter of 35 µm and a dry bulk resistivity of 0.003 ohm-centimeters. The overall final solids composition of this tacky conductive adhesive was 35 weight percent of silicone resin and siloxane gum (25.85 percent resin and 74.15 percent gum) and 65 weight percent of silver-clad glass fibers. We found that if the concentration of the silver-clad glass fibers was 70 weight percent or higher, the system lost its tacky character. We also determined that conductivity appeared to drop when the concentration of the silver-clad glass fibers was less than 60 weight percent. The cured tacky material was prepared by first dissolving benzoyl peroxide in toluene in an aluminum dish. The silicone resin and the siloxane gum solutions were then added. The resulting solution was stirred to disperse the peroxide catalyst. Next, the silver-clad glass fibers were added and the mixture was stirred 10 minutes to obtain a uniform solution. The tacky conductive material was heated at 37°C. for 3 hours until all solvent was removed. The material was cured by heating at 150°C. for 30 minutes. A volume resistivity of 0.058 ohm-centimeters was obtained for this particular formulation. The tacky conductive adhesive material of this example had good cohesive strength and possessed excellent adhesion to the aluminum dish in which it was cured.

0053The following examples represent our second embodiment of tacky conductive adhesive prepared from silicone resin, siloxane gum, spherical microspheres or metallic particles as the conductive particulate material and peroxide catalyst.

Example II

0054A tacky conductive adhesive was prepared by combining (a) 1.868 grams of a mixture containing 30% of silicone resin and 20% of siloxane gum in xylene, the mixture containing 1.0 gram of solids; (b) 0.01 gram of benzoyl peroxide; (c) 0.19 gram of toluene; and (d) 0.733 gram of silver-coated hollow glass microspheres having an average diameter of 3 µm. We made the conductive adhesive by first dissolving benzoyl peroxide curing catalyst in toluene. The solution of silicone resin and siloxane gum and the benzoyl peroxide solution were then mixed together. This required 2-5 minutes of mixing time. The silver-coated hollow glass microspheres were added to this solution of adhesive and catalyst. This addition required 10 minutes of mixing time. After obtaining a uniformly mixed material, it was heated for 2 hours and 25 minutes at 35°C. to remove the solvent. After all solvent was removed, the material was cured at 150°C. for 30 minutes. Electrical tests on this very tacky adhesive showed that it was not conductive within itself. However, when it was pressed between two 2.5 by 7.6 cm (1 by 3 inch) aluminum coated glass slides, adhesion and conductivity was obtained.

Exmaple III

0055We prepared a uniform solution by combining (a) 1.868 grams of a mixture containing the silicone resin and the siloxane gum in xylene, the mixture containing 1.0 gram of solids; (b) 0.01 gram of benzoyl peroxide; and (c) 0.19 gram of toluene. These materials were mixed for 5-10 minutes. This uniform solution was used in the examples below, to prepare two more tacky conductive adhesives, which are further illustrative of our invention. The adhesives prepared in Examples IV and V were applied and electrically tested in the same manner as in Example II and with similar results.

Example IV

0056We combined (a) 0.1019 gram of the solution prepared in Example III and (b) 0.06065 gram of particles of a 39Sn/10Cu alloy (99.9% pure) with an average diameter of 10 mils (254 micrometers). These materials were mixed for 5-10 minutes, dried at 35°C. for 2 hours and cured at 150°C. for 30 minutes. This conductive material had excellent adhesion to the substrate. When pressed between two conductive substrates, the composition was conductive.

Example V

0057We combined (a) 0.35326 gram of the solution prepared in Example III and (b) 0.25593 gram of particles of a 49Pb/5Sn alloy (99.9% pure) with an average diameter of 16 mils (406 micrometers). These materials were mixed for 5-10 minutes, dried at 35°C. for 2 hours and cured at 150°C. for 30 minutes. This conductive material had excellent adhesion to the substrate. When pressed between two conductive substrates, the composition was conductive.

Exmaple VI

0058The purpose of this example was to determine if a salt-fog would corrode the bond pads of a device coated with our conductive adhesive. To make this determination, we coated an aluminum metalized wafer with the conductive adhesive prepared in Example I. The coating was then applied to the wafer by a shim tape draw-down method and the resulting coating had a thickness of 380 µm. The coated aluminum metalized wafer was subjected to salt-fog exposure according to the American Society for Testing and Materials Test Method B-117, using a 0.5% solution of NaCl as the salt-fog. The salt-fog had a pH of 7.0. After salt-fog exposure for 72 hours, the conductive adhesive coating was scraped away from the bond pads and no corrosion was present.

0059These tacky conductive adhesives have utility in various applications, including the several embodiments shown in the drawings.

0060With respect to the embodiment in Figures 5(a)-5(c) in particular, our tacky conductive adhesive can be formed into columns, instead of balls or bumps, as depicted in Figure 5 (a). In this embodiment, it is applied between the flip chip and substrate as a tape, which includes several superimposed layers of materials. Thus, removable layers form top and bottom surfaces of the tape. These removable layers are made of a sheet or film-like material such as paper, polyethylene, polypropylene, polytetrafluoroethylene, poly(vinyl chloride) or polyester. When paper is used as the removable layer, it is typically treated or coated with polypropylene or silicone oil, to provide release from the adhesive portions of the tape.

0061Below the removable layers are two adhesive layers for providing adhesion of the tape to the surfaces of the flip chip and substrate. These adhesive layers are made of the tacky adhesive of our invention, i.e. the silicone resin and siloxane gum, but without conductive particles. In addition, other conventional PSAs made from natural or synthetic materials were used, such as natural rubber-based PSAs; styrene-butadiene rubber-based PSAs; polyisobutylene-based PSAs; acrylic-based PSAs; or vinyl acetate copolymer-based PSAs.

0062As the non-conductive layer in Figure 5(a), there is employed any suitable insulating material, such as an epoxy resin, silicone resin, silicone elastomer or silicone rubber, polytetrafluoroethylene or polyethylene terephthalate.

0063According to this embodiment of our invention, the tape in Figure 5(a) is sandwiched between the flip chip and the substrate as depicted in Figures 5(b) and 5(c), with the conductive adhesive columns aligned to make contact with the bond pads of the flip chip and the corresponding interconnects of the substrate.

0064Conductive SPSAs of our invention are compatible with, and are useful in conjunction with, first-level packages categorized as fully hermetic, quasi-hermetic or plastic encapsulated.