EP0488264A3

Method of manufacturing a semiconductor device with improved electromigration resistance

Abstract

To improve electromigration resistance and stress migration resistance, when a film is formed by depositing Al or Al alloy on a semiconductor substrate (11), the film (13, 14) is formed stepwise by stepwise changing the heating temperature of the semiconductor substrate at at least two stages.

EP0488264A3, drawing sheet 1 — Sheet 1 of 1

Term

Term ended

Projected expiry passed 28 November 2011, 14.8 years ago.

1 sheet

Sheet 1

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during
EP0107259A2	Cites	European Patent Office (EPO)	X	Search report
EP0451571A2	Cites	European Patent Office (EPO)	XP	Search report
US4837183A	Cites	United States of America	A	Search report
SOLID STATE TECHNOLOGY. vol. 33, no. 3, March 1990, WASHINGTON US pages 73 - 79; D. PRAMANIK & A.N. SAXENA: 'ALUMINIUM METALLISATION FOR ULSI'	Non-patent	–	–	Search report

5 members in 4 offices; this record represents the family

This recordMember, by publication datePriority claim

Priority claims4

Priority claims
Document	Office	Kind	Date
33606290	Japan	–	1990-11-30
33606290	Japan	A	1990-11-30
29603591	Japan	–	1991-11-12
29603591	Japan	A	1991-11-12

Members5

Family members, oldest first
Document	Office	Kind
EP0488264A2	European Patent Office (EPO)	A2	1992-06-03
EP0488264A3This record	European Patent Office (EPO)	A3	1992-07-22
JPH04363024A	Japan	A	1992-12-15
US5407863A	United States of America	A	1995-04-18
KR950014267B1	Republic of Korea	B1	1995-11-24

13 legal events, as the office reported them to INPADOC

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Point at a mark for the event

Events

Legal events, newest first
	Event	Code
2005-10-05	Appeal reference modifiedAppealORIGINAL CODE: EPIDOSCREFNEAPAF	APAF
2003-03-05	Application refused18R	18R
2003-01-17	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION HAS BEEN REFUSEDSTAA	STAA
1999-01-19	Appeal reference recordedAppealORIGINAL CODE: EPIDOS REFNEAPAD	APAD
1998-08-05	Appeal reference recordedAppealORIGINAL CODE: EPIDOS REFNEAPAD	APAD
1998-07-23	Appeal dossier modifiedAppealORIGINAL CODE: EPIDOS NOAPEAPAB	APAB
1998-06-10	Appeal dossier modifiedAppealORIGINAL CODE: EPIDOS NOAPEAPAB	APAB
1995-01-18	First examination report despatched17Q	17Q
1992-07-22	Designated contracting statesAK	AK
1992-06-03	Request for examination filed17P	17P
1992-06-03	Designated contracting statesAK	AK
1992-06-02	Search report despatchedORIGINAL CODE: 0009013PUAL	PUAL
1992-04-17	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI