Structure manufactured on a photosensitively layered substrate by means of focussed laser radiation and method and apparatus for its fabrication

On a photosensitive coated substrate by focused laser radiation produced geometric pattern and method and apparatus for its preparation, in which depending on a format indicating the pattern elements and their exposure, by means of at least one modulated and focused laser beam disposed on the substrate, a photosensitive layer along parallel scanning lines equidistant from each other, pixel points equidistant from each other along the scanning lines, the geometric distance between adjacent pixel points in a scanning line being set smaller by a factor of at least four than the distance between adjacent scanning lines.