Nova Patents
EP0349911A3

Micromanipulator

Abstract

For micro-movement of an object relative to a predetermined processing or analysis position, a micromanipulator is specified which can be used, for example, to execute object movements in raster tunnel microscopes (RTM). The micromanipulator has a plurality of movement elements (2, 2 ', 2˝) which at the same time support and move the object (1). For the execution of micro-movements, the movement elements are piezoelectrically adjustable, the supports (3, 3 ', 3˝) can be moved by deforming piezoelectric material. In order to be able to perform macro movements with the micromanipulator, macro movements can also be performed with at least one of the moving elements (2). Suitable for this purpose is the support (3) of the movement element (2) itself. The support (3) can be used in a piezoelectrically deformable bush (7).

EP0349911A3, drawing sheet 1
Sheet 1 of 1

Term

Term ended

Projected expiry passed 30 June 2009, 17.2 years ago.

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