Micromanipulator
Abstract
For micro-movement of an object relative to a predetermined processing or analysis position, a micromanipulator is specified which can be used, for example, to execute object movements in raster tunnel microscopes (RTM). The micromanipulator has a plurality of movement elements (2, 2 ', 2˝) which at the same time support and move the object (1). For the execution of micro-movements, the movement elements are piezoelectrically adjustable, the supports (3, 3 ', 3˝) can be moved by deforming piezoelectric material. In order to be able to perform macro movements with the micromanipulator, macro movements can also be performed with at least one of the moving elements (2). Suitable for this purpose is the support (3) of the movement element (2) itself. The support (3) can be used in a piezoelectrically deformable bush (7).

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Projected expiry passed 30 June 2009, 17.2 years ago.
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1 sheet
Sheet 1
Every citation, both waysCites: the store holds 4 of 5
| Document | Relation | Office | Category | Cited during |
|---|---|---|---|---|
| EP0252174A1 | Cites | European Patent Office (EPO) | A | Search report |
| EP0252745A2 | Cites | European Patent Office (EPO) | A | Search report |
| EP0262408A2 | Cites | European Patent Office (EPO) | Y | Search report |
| DE3610540A1 | Cites | Germany | YD | Search report |
| IBM TECHNICAL DISCLOSURE BULLETIN, Band 22, Dezember 1979, Seiten 2897-2898, Armonk, NY, US; G. BINNIG et al.: "Piezo drive with coarse and fine adjustment" | Non-patent | – | – | Search report |
15 members in 7 offices
Priority claims4
| Document | Office | Kind | Date |
|---|---|---|---|
| 3822504 | Germany | A | |
| 3822504 | Germany | A | |
| 3822504 | Germany | – | |
| DE19883822504 | – | – | – |
Members15
| Document | Office | Kind | |
|---|---|---|---|
| DE3822504A1 | Germany | A1 | |
| EP0349911A2 | European Patent Office (EPO) | A2 | |
| JPH0266841A | Japan | A | |
| DE3844659A1 | Germany | A1 | |
| EP0349911A3This record | European Patent Office (EPO) | A3 | |
| DE3822504C2 | Germany | C2 | |
| DE3844821C2 | Germany | C2 | |
| US5325010A | United States of America | A | |
| EP0349911B1 | European Patent Office (EPO) | B1 | |
| AT128270T | Austria | T | |
| ATE128270T1 | Austria | T1 | |
| DE58909442D1 | Germany | D1 | |
| ES2080734T3 | Spain | T3 | |
| GR3018451T3 | Greece | T3 | |
| JP2802317B2 | Japan | B2 |
42 legal events, as 5 offices reported them to INPADOC
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| Event | Code | Office | |
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| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Se: european patent has lapsedLapsedEUG | EUG | EP | |
| Nl: ceased due to reaching the maximum lifetime of a patentCeasedNLV7 | NLV7 | EP | |
| Announcement of lapse in spainLapsedFD2A | FD2A | ES | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Patent expired after termination of 20 yearsExpiredPE20 | PE20 | GB | |
| Patent ceasedCeasedPL | PL | CH | |
| Be: patent expiredExpiredBE20 | BE20 | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| European patent in force as of 2002-01-01IF02 | IF02 | GB | |
| No opposition filedOpposition26N | 26N | EP | |
| No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE | PLBE | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA | STAA | EP | |
| Validation in greece3018451FG4A | FG4A | GR | |
| Definitive protectionFG2A | FG2A | ES | |
| Fr: translation filedET | ET | EP | |
| Gb: translation of ep patent filed (gb section 77(6)(a)/1977)GBT | GBT | EP | |
| It: translation for a ep patent filedITF | ITF | EP | |
| It: translation for a ep patent filedITF | ITF | EP | |
| Corresponds to:REF | REF | EP | |
| Designated contracting statesAK | AK | EP | |
| Corresponds to:REF | REF | EP | |
| (expected) grantORIGINAL CODE: 0009210GRAA | GRAA | EP | |
| First examination report despatched17Q | 17Q | EP | |
| Designated contracting statesAK | AK | EP | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | EP | |
| Request for examination filed17P | 17P | EP | |
| Party data changed (applicant data changed or rights of an application transferred)RAP3 | RAP3 | EP | |
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| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP |
Numbers
- Publication
- 0349911
- Publication, DOCDB
- 0349911
- Publication, EPODOC
- EP0349911
- Application
- 111893
- Application, DOCDB
- 89111893
- Application, EPODOC
- EP19890111893
Titles3
- German
- Mikromanipulator
- English
- Micromanipulator
- French
- Micromanipulateur
Classification
- CPC, 8
- G01Q10/04
- B25J7/00
- G01Q60/16
- H01J37/20
- H02N2/025
- H02N2/046
- H02N2/067
- B82Y35/00
- IPC, 10
- B25J7 00
- G01N27 00
- G01N37 00
- G01Q10 02
- G01Q10 04
- G01Q60 16
- G02B21 32
- G12B1 00
- H01J37 20
- H10N30 20
Designated states1
- Contracting states, 1
- Sweden