Gas slab laser with improved electrode structure and multipass resonator

The invention relates to a gas laser block type according to the preamble of claim 1. Thus the invention relates to the generation of coherent Light with gas discharge laser devices and more particularly a gas laser from Block-type, which has an improved electrode assembly and a more provisional resonator without waveguides, ie with open cavity, improved Wär dissipation and cooling.

The prior art deals with various waveguides and CO₂Lasers block type, for example, US Patent 5,123,028, at col. 1, line 9 to Sp. 3 line. 13

Most lasers are not designed block-shaped, for example, US Patents 4,169,251 and 4,805,182, require a fairly large length to to provide energy. In a typical, well-known array, for example, in 4,169,251 are two long insulated electrodes parallel to each other, whereby a HF feed and transversely to the discharge in the region between the electrodes fed a reflected mirror at each end of the resonant cavity is traversed in a single pass. To a certain Lei to achieve Stung, the cavity must be long enough to light amplification to enable. So the length relative to the output power is large. These Construction leads to the problem that the length of the laser, the length of the outside arranged equipment determined in which the laser is installed. Great lengths for the laser cause obvious problems, for example, to the fact that the Laser is no longer transportable on normal tables can not be used and in the production is expensive. Another problem of such series laser Combinations of metal and ceramic (US 4,196,251) is that the Me -metallic electrodes and the ceramic walls nonuniform thermal cause expansions that lead to serious problems, namely a mechanical instability and misalignment due to deformation of the Laserroh res. Thus, while improved US 4,805,182 which is known from US 4,169,251 arrangement when exploiting the advantage of the same materials, ie an entirely metallic From leadership, yet the problem of large length remains unsolved to this in On order to achieve output power.

Thus, it is an object of the invention to provide a compact laser array and to create resonator so that the ratio of length to output ver is improved, so an adaptable design is made possible, thereby additional applications are possible.

Another object is to provide an improved cooling system with heat reduce to create, so that a rejection of the laser tube is avoided, and mechanical and operational instability and misalignments.

Another problem with the measures provided for in the aforementioned patents Rei henanordnung is in effect the "waveguide" -Lichtreflektion the Oberflä chen the electrodes and walls of the dielectric components in addition to the discharge zone as a result of the close proximity of these areas, which have a narrow symmetrical bore form in the discharge zone, leading to an uneven distribution of Energy in the beam in the near field, so that the beam for many applications un suitable is. If you also have this problem with a more evenly distributed wants or prevent far-field beam by filtering so but such solutions are not always available or practical and lead to additional least Ko first. In a compact laser with little space between the coupling-out and the focusing optics such solutions are anyway not optimal.

Thus, it is another object of the invention, a gas laser with Wi to create cavity in all directions, wherein a is substantially equal to distribution of energy at both close and far-field is possible, so to reduce the cost, and further the applications of the compact improve laser.

Waveguide laser block type have been known for some time. See US Patent 4,719,639. A more recent example is US Patent 5,123,028. The main advantages part of this waveguide laser block type is that they have a high performance can produce in a short active medium. This is because such lasers have a discharge area, the typically rectangular in cross-section is such that the full width of the active medium is available to a greater to achieve output power.

However, the use of two different types of resonator leads to Main disadvantage of the known waveguide lasers block type, that is one of Home poorer beam quality than the lasers in series design. See P. Laakmann "The Market Continues to Grow for Sealed Carbon Dioxide Lasers", In dustrial Laser Review, October 1993. This disadvantage can only with elaborate and relatively expensive optical systems are avoided. The resulting beam such a hybrid gas laser block type has different properties in different directions. In the narrow direction, the electric generating denoberflächen a waveguide effect. In the width direction, there is no physical limitation and the beam formed in a laser cavity with Wi cavity. The result is a higher beam divergence for the emerging Beam along the optic axis (narrow dimension) in relation to non- Waveguide axis (width dimension), s. <b>Fig.</b> 19 in US 5,123,028. This low Although beam quality can be partially corrected, but only with complex op technology systems, which are quite expensive. Thus, it is also an object of the inventions tion, a gas laser block type with high power and high efficiency create, the stable free space resonator without waveguide in two having directions and thus creates a uniform beam of high quality and wherein the installation of complex optical systems is unnecessary.

Further, gas laser from the folding type not new, s. US 4,805,182 in the <b>Fig.</b> 5 and 6. Further waveguide gas laser block type are known from a pleated th construction is needed to maximize higher performance in shorter arrangements to achieve. So portrays US 5,353,297 a hybrid resonator as a stable Wel waveguide in the narrow axis and unstable resonator than for the negative Branch in the wide axis works. Furthermore, two mirrors at each end of Electrodes used to educa a folded beam path in the wide axis len. Thus, the above problems are addressed. It is thus also an object of the invention to provide a compact gas laser block type to sheep fen, which uses a simple, inexpensive, mehrläufiges optical system in which the Laser light beam in a non-waveguide mode in all directions of the resonator tor discharge cavity operates.

Another problem with such gas lasers block type is the Ab support of the electrodes in the laser tube by a certain gap between the Electrodes insulated from the walls of the housing with minimal capaci ity and good thermal conductivity to achieve. The electrode gap is for the optimum laser operation critical. The distance between the electrodes and the Housing is critical to get the one hand a maximum heat transfer (A small distance is low), and on the other hand a maximum capacity of Design for the RF matching high quality (large distance low). That's the way it is another object of the invention to provide an improved electrode support for be agreed to provide distances to optimize the operating parameters of the laser.

Said object is inventively with the features of claims 1 or of claims 24 to 29 dissolved. Advantageous developments can be found in the subclaims.

One aspect of the invention is a gas laser block type with a gas inlet Final assembly with two parallel, electrically isolated electrodes arranged to form a substantially rectangular cross-section of gas discharge, the is sealed in the gas entrapment assembly filled with a laser gas mixture, an RF port for each electrode for supplying RF energy and a Arrangement reflective optical elements at opposite ends of Blow hole assembly as a laser resonator, wherein the minimum distance between the electrode is not smaller than the maximum cross section for a fundamental Mode of a stable laser resonator, of the substantially as a cavity-Laserreso nator is operated in any direction within the discharge region.

According to another feature, each electrode is a long T-shaped Elek electrode made of anodized aluminum, with an aluminum oxide coating having a thickness of about 0.025 to 0.01 mm.

Another feature of the invention is that for each RF port an opening in the blow hole assembly is provided by which the on circuit with game engages and a seal between the electrode terminal and the assembly is pressed together to seal the assembly, without the Electrodes to apply with forces.

Other features of this embodiment of the invention are that the reflective optical elements at least one optical element with a have concave reflecting surface, the reflecting optical elements have a partially reflective output coupler, the reflective optical Elements a multi-barreled laser resonator having at least two optical Ele form elements and the multi-barreled laser resonator, a partially reflective op having table element having a reflection coefficient which is a function the number of passes in the resonator is.

Another feature of this aspect of the invention lies in that at each End of the blow hole assembly is arranged an optical assembly, each case one end plate having an opening for end-side closing the gas inlet having circuit assembly, a first support plate at a pivot point the faceplate is attached, at least one reflecting mirror at the fixed first support plate and the opening in the end plate for the passage of light is aligned in the discharge area, between the end plate and the first support plate compressed sealing ring for sealing the Gaseinschluß- Module, wherein said first support plate about a vertical axis with a screw in a horizontal plane about the pivot point and about a horizontal axis from a Screw is adjustable about the pivot point in a vertical plane.

According to a further feature of this aspect of the invention, that an optical assembly at the front of Gaseinschlußgruppe angeord is net and a second support plate having an opening, the first at the Support plate is attached to a pivot point, a second reflective Spie gel to the second support plate in alignment with the opening to the reflection of light and is attached to the exit of light, a seal between the first support plate and said second support plate for sealing the blow hole assembly together is suppressed, and the amount of the second support plate about a vertical axis from a Screw in a horizontal plane relative to the pivot point and a horizontal axis of a screw in a vertical plane to the pivot point is adjustable.

A second aspect of the invention is characterized in that a plurality of solid, deformable support members are arranged between the electrodes, with where the spatial distance between the electrodes is adjustable.

According to a further feature of this aspect of the invention, that each support member consists of a ring and of a screw, with the entgegenge sat ring side in a direction for expanding the electrodes in the transverse direction are compressible, to the electrodes are fixedly mounted in the assembly, and that defomierbaren components anodized (anodized) aluminum be to stand.

According to a further feature of this aspect of the invention, a plurality short cylindrical spacer with small section for spacing the Electrodes against the inner walls of the assembly provided to a to achieve minimum capacity.

A third aspect of the invention is seen in that each electrode has a large surface near the inner wall of the gas occlusion assembly comprises to improve the heat transfer, that two long heat sinks to the connect outer surfaces of the blow hole assembly, namely near the big Surfaces of the electrodes within the assembly, that a respective cover plate each heat sink is mounted, a plurality of elastic spacers between the Ab and cover plates of the module are provided, and the heat sinks and the Ab cover plates a resiliently arranged inclusion form, of the Gaseinschluß- assembly (<b>110</b>) And having a uniform heat transfer permits, while thermal, assembly defomierende forces are eliminated.

According to a further feature of this aspect of the invention, that the heat sinks have a plurality of threaded holes and the cover plates are provided with a plurality of conical holes drilled opposite the Threaded holes are slightly inwardly offset so that at the onset of Screws through the conical holes the heat sink close to the gas inlet circuit assembly abuts, thereby compressing the elastic spacers be and the cover plates po in close distance to the blow hole assembly sitionieren.

In a fourth aspect of the invention it is provided that an electronic assembly mounted on the resiliently arranged entrapment and to the RF-On circuiting, and in that in each case a blower unit, each heat sink covers and a plurality of air channels for dissipating heat from the Gaseinschluß- Module and the electronic components is formed.

According to a further feature of this aspect of the invention, that in each heat sink vorgese pipes for cooling liquid for heat dissipation hen are.

Further aspects of the invention will become apparent from the following descrip tion based on the drawing. So has an inventive gas laser with Wi Cavity following advantages:

<ul><li>1. a compact design with short length and high power, so that the laser is transportable and multiplies the applications.</li><li>2. The heat sink assembly is resiliently mounted so that Deformie ments are avoided due to torsion and the mechanical and operational Sta stability is increased.</li><li>3. A favorable geometric arrangement leads to a robust construction High Bauverdichtung so that the overall size and cost is reduced. 4. In the more common version is the near field of energy the laser beam is substantially uniform, so that the laser beam in close After focusable bourhood of the output mirror.</li><li>4. The multi-barrel design can be used to connect a symmetri rule Gaussian beam with the same divergence in all directions within the to produce beam cross-section in order better a simple beam exit system To use.</li><li>5. High thermal conductivity and heat dissipation results in a better operational stability.</li></ul>

The drawing shows:

<b>Fig.</b> 1 is a schematic representation of the spatial relationships between tween the diameter of the Gaussian beam in the fundamental mode and the Electrodes within the laser cavity block type according to the invention (Stable resonator in both directions).

<b>Fig.</b> 2 is a side view (as in <b>Fig.</b> 6 seen) the beam path inside a stable resonant cavity with two passes;

<b>Fig.</b> 3 is a side view (as in <b>Fig.</b> 6 seen) the beam path inside a stable Freiraumresonators with five passes;

<b>Fig.</b> 4 is an exploded perspective view of the electrodes and their support;

<b>Fig.</b> 5 is an exploded perspective view of the laser tube construction group;

<b>Fig.</b> 6 is a section along the line 6-6 in <b>Fig.</b> 5;

<b>Fig.</b> 7 is an exploded perspective view of the Laserrohr- and Heat sink assembly;

<b>Fig.</b> 7A is an enlarged partial section of the conical, offset holes the cover plate of <b>Fig.</b> 7;

<b>Fig.</b> 8 is an exploded perspective view of the inventive KISSING cavity laser block type with a heat sink for an electronic construction group and cooling fans;

<b>Fig.</b> 8A is a partial view of a water cooling;

<b>Fig.</b> 9 is an exploded perspective view of the adjustable The mirror assembly on the front side of the laser of <b>Fig.</b> 5;

<b>Fig.</b> 10 is an enlarged section of the front mirror assembly along the Li nien <b>10-10</b> in <b>Fig.</b> 9;

<b>Fig.</b> 11 is an exploded perspective view of the rear Spie gelbaugruppe the invention in <b>Fig.</b> 5;

<b>Fig.</b> 12 is an enlarged section taken along line 12-12 in <b>Fig.</b> 11;

<b>Fig.</b> 13, 14 and 15 are schematic sections of further modified embodiment forms a cavity laser block type according to the invention.

A. CAVITY GAS LASER FROM BLOCK TYPE WITH A RESONATOR MULTIPLE PASSAGES

As from <b>Fig.</b> 1 shows, the invention is directed to a gas laser <b>10</b> the slab Type with a stable resonator and on the fundamental mode of stable Resonator from. The result is a novel gas laser from the slab type without waves chief, ie a laser with clear in both directions.

As from <b>Fig.</b> 1 shows schematically, has the gas laser <b>10</b> two parallel long electrodes <b>11</b>. <b>12</b>That a discharge space with the height "A" and the Length "L" form at the ends of the mirror <b>14</b>. <b>15</b> with the diameters D2 and D1 provided. The Gaussian beam<b>17</b> represents the fundamental mode of stable resonator is in the discharge area, when a high-frequency excitation takes place. The output mirror<b>15</b> is only partially reflective, so that a laser beam of light <b>16</b> can emerge.

The parameters of the resonator and the size of the electrodes are as follows selected: The diameter of the fundamental mode of the resonator <b>10</b> should be able to dress ner than the distance A between the electrodes <b>11</b>. <b>12</b> be. For example, if the Length 500 mm, the output mirror is flat and has the reflecting mirror a Radius of curvature of 4.0 m, so is the outer diameter of the fundamental Fashion (close to the curved mirror) about 4.5 mm. If the distance between selected electrodes to A = 5.0 mm, and has the output mirror a clear Opening of the same size with 5.0 mm, so the laser can the fundamental mode produce, as <b>Fig.</b> 1 shows.

In this case, however, the efficiency of utilization of the total volume the active medium in the discharge region is very low (for example, only about 30% when the width "B" of the slab laser (perpendicular to the drawing plane in <b>Fig.</b> 1 measured) only 15 mm). To increase the effectiveness of the use, a resonator mehrläufiger <b>30</b>. <b>50</b> used. In<b>Fig.</b> 2 has this resonator <b>30</b> three levels, namely a concave rear view mirror <b>31</b> with total reflection and two front flat mirror <b>32</b>. <b>34</b>, Namely a (partially reflecting) From coupling mirror <b>32</b> and an intermediate flat mirror <b>34</b> (Total reflection). The Surface of the output mirror <b>32</b> is perpendicular to the optical axis of the system; while the rear-view mirror<b>31</b> and the intermediate levels <b>34</b> a slight Angle to the optical axis of the system occupy, so that the multi-barreled Re flexion of the laser beam from the mirror <b>32</b> the mirror <b>31</b> and back to the mirror <b>34</b> and then turn to the mirror <b>31</b> and finally to the mirror <b>32</b> travels, so that the beam multiple times (ie twice) the active medium interspersed. The mirror <b>31</b>. <b>32</b>. <b>34</b> are such that after several Refektionen to the mirrors of the Beam returns to the original position at the output coupler and at <b>33</b> exits. In this case, the utilization of the medium close to 90%.

In <b>Fig.</b> 3 operates the resonator <b>50</b> similar to the resonator <b>30</b> in <b>Fig.</b> 2, with the Except that the number of passes of two (<b>Fig.</b> 2) to five increases and depends on the width "B" of the electrodes. The output mirror<b>52</b> for the off enters the light beam <b>53</b> is partially reflective and the rear-view mirror <b>51</b> and Zwi rule mirror <b>54</b> are fully reflective. If A and B 5.0 mm 15 mm, then sets it is found that the optimum number of passes is five. In this case, the Maximum output power. With A 7 mm and B 21 mm, the distance between tween the mirrors 500 mm and the radius of curvature of the mirror is 4 m, and then the optimum number of passes eight or nine (not illustrated provides). It is essential to point out that with a flat output mirror<b>32</b>. <b>52</b> and intermediate levels <b>34</b>. <b>54</b> (Or with the same radius of curvature), the structure the output mode is the same as at one time and not on the presence number of passes depends. The number of passes only changes the optimum Reflection at the output coupler, the greater the number of passes, the greater is the overall gain, and thus the smaller is the optimum coefficient of Reflection on output mirror to achieve the optimum power output. For example, if the aforementioned resonator with only one passage the optimum reflectance about 92%, so it is in the aforementioned Resonator having five passes about 70%.

B. ELECTRODE ASSEMBLY

Out <b>Fig.</b> 4 shows that the electrode assembly <b>90</b> the invention two electrodes <b>91</b>. <b>92</b> having each T-shaped cross-section, with upright fla chen flanges <b>93</b> and an inner lateral flange <b>94</b>, The electrodes are made made of aluminum and have a thick, hard anodized insulative coating alumina from 0.025 to 0.01 mm thickness. On the inside of the vertical as th flange <b>93</b> each electrode there are two incisions <b>95</b> in the upper part of the flange <b>93</b> and two notches <b>95</b> in the lower part of the flange <b>93</b>, Each A section has a flat bottom <b>105</b>, On the outer side of the flange<b>93</b> each Electrode there are two cutouts <b>96</b>, Which is about a quarter of the distance from each are arranged the electrode end. Each cutout<b>96</b> is from the other so beab standet that they close the upper and lower outer edge of each electrode <b>91</b>. <b>92</b> are to stabilize the electrode attachment.

If the electrodes are placed in the assembly to one another, then a support ring <b>97</b> in each case a pair of opposite indents <b>95</b> fitted and serves as a deformable support to maintain a predetermined optimal distance the electrodes <b>91</b>. <b>92</b> to achieve. The outriggers<b>97</b> are deformable rings. Each supporting part <b>97</b> can be with a screw <b>98</b> deform by over opposite sides of the ring are compressed and thus the electrodes <b>91</b>. <b>92</b> apart, said spacer <b>99</b> (Described below) to on the outside of inner walls of a tube (<b>111</b>) lay. In this way, the predetermined optimum distance between the electrodes at the upper and lower ends as well as at the front and back in accordance with the <b>Fig.</b> 4 and 6, wherein the electrodes <b>91</b>. <b>92</b> symmetrically and firmly in the pipe <b>111</b> are supported. The rings <b>97</b> are preferably made of aluminum and with a hard anodized Alumina insulating provided. Alternatively, stainless steel be used.

Small cylindrical spacer <b>99</b> fit into the pair of cut-outs <b>96</b> at the external sides of the electrodes <b>91</b>. <b>92</b> and so call a certain distance between the outer side of the vertical flanges <b>93</b> the electrodes <b>91</b>. <b>92</b> and the inner sides of the tube <b>111</b> out (<b>Fig.</b> 4, 6). The cylindrical spacers<b>99</b> may have different shapes, such as ball or washer. The spacer <b>99</b> are preferably made of aluminum and have also a hard anodized aluminum oxide coating. Alternatively, ceramic use or stainless steel.

mounting blocks <b>100</b> for RF feed are at the upper inner sides the electrodes <b>91</b>. <b>92</b> with screws <b>101</b> in holes <b>102</b> secured and bear RF connectors <b>103</b>That are connected to an RF source and isolated by the upper wall of the tube <b>111</b> extend. As will be explained, via the RF feed and the vacuum closure of the tube <b>111</b> a gas-tight Seal.

As from <b>Fig.</b> 6, the electrode assembly is <b>90</b> in the pipe <b>111</b> incorporated, wherein the spacer <b>99</b> in the cut-outs <b>96</b> sit and Ab backup rings <b>97</b> in the cut-outs <b>95</b>Wherein the screws <b>98</b> when turning pm clockwise rings <b>97</b> deform, while the electrodes <b>91</b>. <b>92</b> apart press and the spacer <b>99</b> firmly in their cutouts and the Innenwän to the pipe <b>111</b> hold, so as to keep the electrode side in the pipe in position, wherein a gap <b>40</b> with a given narrow spacing "A" results. The rings <b>97</b> have further cutouts <b>104</b> (<b>Fig.</b> 4) at their inner edges, so that the peripheral portions <b>106</b> the rings <b>97</b> in the cuts <b>95</b> fit and above the ground <b>105</b> of cuts <b>95</b> lie (<b>Fig.</b> 4). The vertical height of Umfangsab slice <b>106</b> the rings <b>97</b> (<b>Fig.</b> 4) is selected so that it and the top bottom <b>108</b> the electrodes <b>91</b>. <b>92</b> rich and therefore a certain top and lower distance between the electrodes <b>91</b>. <b>92</b> of the upper and inner interior wall the tube <b>111</b> results (<b>Fig.</b> 6) so that so that the electrode <b>91</b>. <b>92</b> in the pipe <b>111</b> are set vertically. In this way, the electrodes are very close to the inner walls of the tube <b>111</b>But are necessary to isolate spaced. The before ferred distance from electrode to the wall is 0.5 mm. By following the ex object between electrode and tube (the greater the distance, the smaller the Ka capacity) is the assembly of the electrode / tube inherent capacity minimal held and does not interfere with the rapid initial movement of the electrode on the part of RF feed. On the other hand, the thermal conductivity is greater the bran ner, the distance is. The proximity of the long flat outer surfaces<b>93</b> the electrodes to the inner walls of the tube <b>111</b> provides for a good thermal conductivity ness. The laser gas mixture is further with helium, a good thermal Lei ter enriched. Thus, one achieves an optimal balance between material, To provide spacing and gas for a quick start of the laser and to the Heat from the discharge area <b>40</b> quickly dissipate, so that so much is contributed during operation for cooling the device.

The aforementioned construction provides a gap <b>40</b> narrow width "A" and a width dimension "B" (<b>Fig.</b> 6) and having a length "L" as shown in <b>Fig.</b> 1 is shown.

C. LASER TUBE ASSEMBLY

According to <b>Fig.</b> 5, the laser tube assembly from the electrode assembly <b>90</b> of the <b>Fig.</b> 4, the tube <b>111</b>, A forward double mirror assembly <b>120</b> and a rear view mirror assembly <b>150</b>, These are described below.

The laser assembly <b>110</b> is assembled by first the Elek trodenbaugruppe <b>90</b> in the pipe <b>111</b> used and the screws <b>98</b> the Clock sense twisted around the spacers to the inner walls of the tube <b>111</b> sym metrically spaced set. The RF connectors<b>103</b> are disks <b>113</b> and insulating rings <b>112</b> plugged in and in threaded holes <b>107</b> to the fastening supply blocks <b>100</b> screwed, wherein a further securing of construction group <b>90</b> in the pipe <b>111</b> results.

According to <b>Fig.</b> 6 moves the spacer <b>113</b> pressed inwardly and the sealing ring <b>112</b> to the surface <b>112</b>a of the mounting blocks <b>100</b>When the Connection <b>103</b> into the threaded bore <b>107</b> is screwed. The ring<b>112</b> presses together and seals the interior wall <b>112</b>b of the bore <b>114</b> in the pipe <b>111</b> from, as well as the outer diameter of the cut- <b>112</b>c in terminal <b>103</b>, The Sealing is effected without the electrodes <b>91</b>. <b>92</b> be raised because of the Game between the terminal <b>103</b> and the spacer <b>113</b> in the hole <b>114</b>, Thus, the forces remain on the electrodes<b>91</b>. <b>92</b> equally distributed.

1. Front Double mirror assembly

<b>Fig.</b> 5 shows the assembly <b>120</b> for the double front mirror before sealingly at the front of the tube <b>111</b> is attached. Sealing and Be fixing the assembly <b>120</b> (As well as the rear mirror assembly <b>150</b>) done preferably by welding. It can be this but also by bonding with an epoxy resin or achieve with a screw fastening and sealing ring.

As seen from <b>Fig.</b> 9 and 10 is 5, is the front mirror assembly <b>120</b> from a front face plate <b>121</b> with an annular groove <b>122</b> for a sealing ring <b>125</b> and having a rectangular beam aperture <b>123</b>Essentially the gap <b>40</b> between the electrodes <b>91</b> and <b>92</b> equivalent.

A support plate <b>127</b> for an intermediate level is on the front plate <b>121</b> With three set purple, <b>131</b>b and <b>131</b>c mounted, the through bores <b>130</b> in the support plate <b>127</b> to grab. These screws are in threaded holes<b>124</b> in the front face plate <b>121</b>Wherein the ring <b>125</b>A to the ring <b>125</b> in the groove <b>122</b> suppressed and thus forms a gas tight seal (<b>Fig.</b> 10). Furthermore, the interim will rule mirror <b>126</b> in a recess on the inside of the support plate <b>127</b> For held the intermediate levels (<b>Fig.</b> 10). The screws<b>131</b>a and <b>131</b>are c perpendicular to the screw <b>131</b>b.

The mirror <b>126</b> totally reflected and is of the adjusting screw <b>131</b>a in set a vertical plane about a horizontal axis. The mirror<b>126</b> leaves with the adjusting screw <b>131</b>c in a horizontal plane about the vertical Set axis. By turning the screws<b>131</b>a and <b>131</b>c, so tilting the supporting plate <b>127</b> for the intermediate levels in their respective levels at the point of attachment the fixed scroll <b>131</b>b. The sealing ring<b>125</b> is loosened accordingly if at <b>131</b>a, <b>131</b>c settings are made without the seal Verlie ren.

The support plate <b>127</b> has a central opening <b>128</b> and an annular groove <b>129</b> at the Outside for a Auskoppelfassung. Further, in the triangle or rechtwinkklig arranged threaded bores <b>132</b> provided for Auskoppelfassung. Of the output coupler <b>141</b> is at the intermediate mirror support plate <b>127</b> by means of a triangle shaped socket <b>134</b> attached. The version<b>134</b> is on the support plate <b>127</b> so be strengthens that the ring <b>134</b>a on the inside of the frame <b>134</b> (<b>Fig.</b> 10) against the seal <b>133</b> in the groove <b>129</b> the support plate <b>127</b> suppressed and thus a gas-tight manufactures sealing. The Auskopplerfassung<b>134</b> has a central opening <b>135</b> and on the outside of an annular groove <b>136</b> for inserting a sealing ring <b>140</b>, Of the output coupler <b>141</b> is attached to the outside of the frame and pressed against the seal <b>140</b> by means of a disc <b>141</b> (<b>Fig.</b> 10), the version of the <b>134</b> With screw <b>143</b> is mounted in the bores <b>144</b> the disk <b>142</b> sit in threaded holes <b>139</b> amended <b>134</b> are screwed. The version<b>134</b> is on the support plate <b>147</b> the intermediate level with set screws <b>137</b>a, b, c attached, the through bores <b>138</b> grab and into threaded holes <b>132</b> the output coupler jack on the outside of the plate <b>127</b> are attached. The screw<b>137</b>b forms a fixed pivot, while the screw <b>137</b>a and <b>137</b>c to right angled lie and thus a setting in a plane perpendicular to the hori zontal axis by means of the screw <b>137</b>c and a horizontal plane about a vertical axis using the adjustment screw <b>137</b>a permit. The sealing ring<b>133</b> is thus compressed and the output coupler <b>141</b> can be as perpendicular to the optical axis of the system can be adjusted.

As is known, a plurality of optical arrangements are possible. An age native embodiment combines the function of Auskopplerspiegels <b>141</b>, of the partially reflected and partially permeable, of the total reflection. between mirror <b>126</b> in a single mirror for example, the upper and lower portions are provided for these separate functions.

2. rearview mirror assembly

The rearview mirror assembly <b>150</b>As known from the <b>Fig.</b> 5, 11 and 12 visible is composed of a rear end plate <b>151</b> for sealing the rear end of the tube <b>111</b> with a central opening <b>152</b> suitable for gap <b>40</b> and at the Outdoor center with an annular groove <b>153</b>, In this sits a rear mirror seal<b>155</b> and a mirror frame <b>157</b> for the mirror <b>156</b>Also totally reflective, sitting in a groove on the inside and on the rear end plate <b>151</b> fixed, so that the ring <b>157</b>a sealing ring <b>155</b> in the groove <b>153</b> compresses and thus gas-tight seals (<b>Fig.</b> 12). The version<b>157</b> is to the end plate <b>151</b> with settings screw <b>159</b>a, b and c attached to the through holes <b>158</b> as amended <b>157</b> grab and into threaded holes <b>154</b> the plate <b>151</b> are screwed. So that he are the same triangular mirror adjustment, as well as in the case the mirrors at the front end of the assembly <b>120</b> is provided. Here is the screw <b>159</b>a pivot point and the screws <b>159</b>b and <b>159</b>c are quite angle thereto, namely in a horizontal and vertical plane and allow so the adjustment in horizontal and vertical plane relative to the screw <b>159</b>a.

D. LASER TUBE HEAT DISSIPATION

This module <b>160</b> is from <b>Fig.</b> 7 recognizable and consists of the assembly <b>110</b> of the <b>Fig.</b> 5 together with cooling plates <b>161</b>. <b>162</b>, covers <b>164</b>. <b>165</b> and sealing rings <b>167</b>, The cooling plates sitting on the side of the module<b>110</b> and with drilling <b>163</b> provided on their insides. The upper and lower cover<b>164</b>. <b>165</b> with a plurality of annular recesses <b>166</b> ver on the inner sides see. Out<b>Fig.</b> 7A it can be seen that the bores <b>169</b> in the covers ko cally and over the threaded holes <b>163</b> in the cooling plates <b>161</b>. <b>162</b> are slightly offset inward. The covers are on the cooling plates<b>161</b>. <b>162</b> with screws <b>168</b> secured by the cover and the holes <b>169</b> are inserted and into the threaded holes <b>163</b> the cooling plates are screwed. When tightening the screws <b>168</b> press on the outer conical edges the holes <b>169</b> and pull the cooling plates firmly inward at the outer sides the tube <b>111</b> for a good heat transfer, whereby the sealing rings <b>167</b> in the recesses <b>166</b> and clamped at the top and bottom of the tube <b>111</b> are pressed.

To make the cooling plates <b>161</b>. <b>162</b> with the covers <b>164</b>. <b>165</b> a building group for the laser tube <b>110</b> with good heat dissipation to the heat sinks on the Side surfaces of the tube <b>111</b>While the covers <b>164</b>. <b>165</b> by together quantity expressed seals <b>167</b> elastically by the top and bottom of the tube <b>111</b> spaced.

This mounting of the heat sink has very particular advantages, since the La serrohr and the cooling plates on the entire length of the laser tube in operation to Unlike the prior art know no torsion. Thus inventions tion in accordance with the heat sinks and covers firmly on the side surfaces of the La SERS held while at the same time the upper and lower covers by the upper and bottom of the laser assembly <b>110</b> spaced and contact only the compressed sealing rings <b>167</b> takes place. Instead of the seal ring<b>167</b> can find another elastic spacer use. Thus, the pipe <b>111</b> lengths, but torsional stress can be minimized, which to füh ren that distortions in the rectangular cross-section of the overall arrangement auftre th so that the mirror change their position. At the same time, the distance between tween the tube <b>111</b> and the elastically mounted cover small enough so that the thermal conductivity of the laser tube assembly <b>110</b> on the right PLEASE CONTACT -generating heat sinks <b>161</b>. <b>162</b> is more than sufficient to produce a corresponding to achieve cooling of all components.

E. FINAL ASSEMBLY OF GAS LASERS

According to <b>Fig.</b> 8, the finished gas laser assembly <b>200</b> from the assembly <b>160</b> for the pipe with heat sink, an electronic assembly <b>170</b> and two fan groups <b>190</b>. <b>191</b>,

The electronic assembly <b>170</b> is multiple, known conductor plates <b>151</b> provided that equipped with various electronic components and to which a high frequency generator with impedance matching <b>172</b> and other electronic elements belong. These components are between two provided with flags heatsinks <b>176</b>. <b>177</b> incorporated in and constitute the building group <b>170</b>, A cover plate<b>178</b> with screws <b>179</b> in threaded holes <b>180</b> at the top of the heat sinks <b>176</b>. <b>177</b> attached. This module<b>170</b> is at the laser tube assembly <b>160</b> with end plates <b>181</b>. <b>182</b> and screws <b>184</b> in drilling <b>185</b> and threaded holes <b>186</b> at the ends of the modules <b>160</b>. <b>170</b> attached. So the assemblies<b>160</b>. <b>170</b> of the end plates <b>181</b>. <b>182</b> held together. fan<b>190</b>. <b>191</b> are on the side of the heat sink with screw <b>192</b> in holes <b>193</b> on the side faces of the heat sinks <b>161</b>. <b>162</b> and <b>176</b>. <b>177</b> attached. The faceplate<b>181</b> has an opening <b>183</b> for the exit of Light beam from the output coupler <b>141</b>,

Since the fan units lie on the outer sides of the heat sinks, form the cooling plates several long channels that flow through the air in the longitudinal direction will. The air enters from both sides at each end of the cooling plates. Thus, the Heat in the system effectively dissipated and overheating is avoided.

<b>Fig.</b> 8A shows an alternative cooling with liquid. Instead of the air ducts between the cooling plates <b>161</b>. <b>162</b> and <b>176</b>. <b>177</b> are boxes <b>161</b>a, <b>162</b>a with crude ren provided for cooling water. This has the advantage of a lower noise development, because you can set the cooling device separately, further Verun Cleaners result suspended in the air is avoided, as just for me ical applications is desired, as well as improved Temperaturbe mastery of.

The <b>Fig.</b> 13 to 15 show modifications of the electrode system. The before ferred embodiment, but has already been explained.

<b>Fig.</b> 13 shows two long base plates <b>300</b>That with screws <b>302</b> above and below to the front and rear ends of the base plates on the housing <b>301</b> BEFE are Stigt. Tightening the screws<b>302</b> performed by a end in the pipe <b>301</b> insertable wrench, as the screws <b>302</b> In addition to the outer forming the electrodes are. Here are at each base plate<b>300</b> known with stuffs several long plates <b>303</b>. <b>304</b> and <b>305</b> internally mounted, and an elec electrode <b>306</b>That a certain distance from the other electrode <b>306</b> having, via respective plates <b>305</b>. <b>304</b> and <b>303</b> on the inside of the other Ba sisplatte <b>300</b> is attached. Because of the electrical contact of the base plates<b>300</b> with the housing <b>301</b> via the screw <b>302</b> are the spacer plates <b>303</b>. <b>304</b>. <b>305</b> isolated and preferably made of anodized aluminum. RF Einspei solutions <b>13</b> connect the terminals <b>303</b> with the electrodes <b>306</b>, In this Ausfüh bodiment is not provided, the electrodes are spread apart in order to be spaced apart to keep. As a result of the superposed plates<b>303</b>. <b>304</b> and <b>305</b> is increases the thermal conductivity and the construction inherent high Ka capacity reduced.

<b>Fig.</b> 14 shows a further embodiment of the invention with similar Ba sisplatten <b>300</b> on housing <b>301</b> and electrodes <b>306</b> each other at a distance insulating spacers <b>303</b>That the base plates <b>300</b> are fixed and in where both sides grooves <b>303</b>A and <b>303</b>B are milled. The smaller electrode and reduce the grooves, the total capacity, remains a high thermally conductive, receive speed.

A further embodiment of the present invention shows <b>Fig.</b> 15 with larger electrodes <b>306</b>That directly to the base plates <b>300</b> on housing <b>301</b> secured are. On the outer sides of the electrodes<b>306</b> are grooves <b>306</b>A, thus reducing the capacity of the large electrodes. The operating characteristics of the embodiments in accordance with the <b>Fig.</b> 14 and 15 are those of the <b>Fig.</b> 13 superior. The optimal Anord tion shows <b>Fig.</b> . 6

F. MODEL

The following dimensions are provided for the dimensions of a model: A = 5.0 mm;B = 15.0 mm;L = 44.5 mm;RF input power = 300 W;Frequency = 40.6 MHz;Output power = 25 to 30 W;Wavelength = 10.6 m.mu.;Ambient temperature = 25 ° C;5,6 m³/ Min (200 cfm) cooling air (100 cfm on each side)

The gas mixture is CO₂, Nitrogen, and helium in a ratio of 1: 1: 7 and 5 % By volume of xenon at a total pressure between 25 and 100 Torr.

The preferred material for the tube, the cooling plates and cover plates is Aluminum because of the high thermal conductivity, low cost and simp cher production.