Multi visual angle laser measuring head and its calibration method

Multi-angle of the laser measuring head and calibrating method

technical field

The improved of the present invention relates to three-dimensional face measuring device; and rack is more than one an angle of the laser measuring head and calibrating method, the measuring head of for accurately measuring and physique. The belonging to the scanning measuring apparatus technical field. A background technology technology method, the structure a measuring scheduled obtained the widespread application of the reverse-engineering and quality control domain. The wire structure a distance and axes coordinate measuring machine contact type measuring tradition of the large convex the measuring speed. The device for measuring head usually and one or two CCD camera is composed of a laser transmitter. The laser transmitter is sent out laser line, projection are measuring the object surface,The CCD camera capable of the is measuring on the object a diffuse reflection light. A for calibrating is a Coordinate of CCD camera image plane is converted to the measuring system of a three-dimensional Coordinate, realizes through the moving object or the movable measuring head to the scanning of the object. Wherein gauge head the direction of the scanning process is invariable, the laser horizontal direction is dozens, projects is invariable. The channel is the following a questions: 1), A object is respectively when the laser plane with lighter and slant angle, with a heeling error, and connected with the obliterated data. 2) Is works and measuring hole; the groove of for, and the laser plane irradiative to for opposite; and a result of their masks switch; and CCD camera a receiving the diffuse reflection light. 3), Each the device for measuring head and projects a laser plane; when the measuring structure and workpiece, multiple for unreadable of. And a result of the upper end, the structure a measuring head for a laser transmitter and a CCD camera; the helpless an when measuring structure and physique or a hole; the groove of for on. The invention content the head of the present invention in parallel to the precise measuring comprises a complex physique the workpiece, to the workpiece hole and groove isostructuralism the; and designs the multi-angle of the laser measuring head. The scanning measuring of the measuring head without the blind spot, which is a hole; the groove; gap of for full-automatic; and convex the scanning measuring speed, which is realized three-dimensional measuring in real sense. Duty of the invention is by the following technical solution, comprising developed more than one an angle of the laser measuring heads. Gauge head of which comprises: The CCD camera and three laser plane projectors, CCD1, CCD2 and CCD3 camera and laser projector plane l, 2 and 3 are crosswise-arranged device, and relative the same axis 00 ') is at 60. Uniformly distributed; The CCD1, CCD2 and CCD3 camera the first direction part of the optical axis and three laser plane projectors on 1:00; O'The light plane of the three laser projector plane l, 2 and 3 project 1, 2 and 3 of each to of measuring on the object, and a CCD camera and projects with a adjacent two laser plane projectors to the object and a diffuse reflection light. However, use of the measuring head is realized the three-dimensional scanning, detecting first connecting device of the calibrating to the measuring head. Horizontal measuring head of the present invention directly positioned is a two-dimensional Coordinate of CCD camera image plane; of realizing three-dimensional measuring to a converted into a three-dimensional Coordinate a world coordinate system, meanwhile, data of a connecting with three laser wire and combining and a coordinate and system. The gauge head and is of realizing of the axes coordinate measuring device, generally S 卩; the measuring head on the axes coordinate measuring device, and scanning measuring through measuring movement machine. First adjusting the measuring head is made of the light panel and scanning direction of laser projector plane 1 projects, vertical side of the scanning direction is close MM, and plane thereof is consistent with the YZ plane coordinate. A light plane by the pinhole imaging of 1 with the CCD1 of the camera and CCD3 camera, namely and a computer and Coordinate's transform relation to the world coordinate system. The invention is the calibrating method for multi-angle of the laser measuring head, wherein the calibration or, or end on the three-dimensional motion mechanism on the axes coordinate measuring device, wherein the gauge head, realising scanning measuring. The calibrating method of a lock and according to the following steps: (1) With a adjacent two camera CCD1 and CCD3 is system model is placed on the calibrating to the plane of mountain plane laser projector l, projectsTHE) after to 2 with a adjacent two camera CCD1 and CCD2 composed of system model is placed on the calibrating the plane of the laser projector plane is 2 projection; C) is the same method, 3 with a adjacent two camera ccd2 and ccd3 composed of system model is placed on the calibrating the plane of the laser projector plane is 3 projection; THE) integral light plane l, 2 and 3 inner point coordinates: The upper calibrating process is a blocking three a performing; each step sections of the mapping relation of light plane and adjacent two CCD camera. To with different and three light plane data of the scanning method, each light panel 1 is consistent with the YZ plane of axes coordinate measuring device, wherein the plane 1 a two-dimensional data of direct and YZ Coordinate a vapour of measuring device, capable of the three-dimensional Coordinate connected with the measuring device X shaft coordinates, and three-dimensional scanning measuring. (1 )Light system according layer is 1 is consistent with the YZ plane of axes coordinate measuring device, wherein the plane 1 a two-dimensional data of direct and YZ Coordinate a vapour of measuring device, capable of the three-dimensional Coordinate connected with the measuring device X shaft coordinates, realising three-dimensional scanning measuring; (2 )Each of THE step) and C) a step is determined the light 2) and an plane 3 precise with, and extract the plane 2, 3 is opposite to the plane 1 included angle; 2 And an plane 3 a two-dimensional data decomposition the plane of along the axes coordinate measuring machine the axes coordinate part, and three coordinates end of the coordinate measuring device is a to obtain the three-dimensional data the three part; (3 )And THE (1) with light plane 1 and reference, and D) a (2 )with the plane 2 and an plane 3 of a three-dimensional data of obtaining and a wireless conversion, a three-dimensional Coordinate lines and a 2 or the plane 3 obtain the three-dimensional Coordinate and optical system according 1 information of the sample, and axes unifications of three light plane type multi-point. A is) to further 1 is composed of system model is placed on calibrating the step is the following with a adjacent two camera CCD1 and CCD3 the plane: (1 )For adjusting the measuring head is made of the plane of the plane laser projector 1 projects 1 with the scanning vertical direction, and gauge head scanning direction is close MM, and light panel 1 is consistent with the YZ plane coordinate of axes coordinate measuring device; (2 )Is the light 1) and type of transformer CCD1 camera and CCD3 camera (4); <formula>formula see of document page 6</formula> (4) and (4) and transformer (l,, Is a three-dimensional Coordinate of world coordinate system, (w processor, are ccd image plane and pixel unit and two-dimensional Coordinate; P type of the conversion single-colour ratio,/is a lens focal distance; the A^, A^) is unit distance's the connecting element are is an image plane, a point of the parameter conversion to obtain a camera, (w. , Processor). Uses the Coordinate primarily, a, is the coordinate system to the world coordinate system and method, and r7f represents a world); systemthe r shaft of the camera coordinate system, (r2,) to 7 ' represents world coordinate system/shaft of the camera coordinate system, (r3 r6 to set represents a world coordinate system z shaft of the camera); system (4) And based on: Pinhole conversion single-colour; supposing <formula>formula see of document page 6</formula> 1) and a camera coordinate system to world coordinate system relationship: <formula>formula see of document page 7</formula> selected calibrating: instrumentIs a triangle location block as to be calibrated, instrument(4 )Is connected and calibrating block: Control the measuring head, and light 1) and triangle location block, part of the laser module of line of the triangle location block by light panel 1 is a point, and determined for with the CCDl the image plane Coordinate of camera and CCD3 camera which are; (5 )Is co-planer reverse standardization model test transformer (4) is unknown parameter: 1 To the multiple positions as aiming point of the light plane of (4 )method, (4) is solve Unknown parameter-n the aiming replacing failed point model is formulas . A/body, righteousness '. '); AND(6 )Each light is 1 to the plane coordinate and L-SHAPED, l CCD1 and CCD3 is a two-dimensional counterfeit relation, the invention can a second row using model and second row and fourth end of determining for a counterfeit relates, the type electrode (4) is simplify is: Wind r, + r7w0 wind is + r8w0 wind (+ /zw0. r8 fz. (5) And a two-dimensional Coordinate of CCD3 camera image plane the CCDl camera changed using model line of the light plane 1 a two-dimensional Coordinate. B employ) is to further 2 is composed of system model is placed on calibrating the step is the following with a adjacent CCDl camera and CCD2 camera the plane: (1 )The plane 2 precise and: A selection measuring plane by the measuring head, 1, 2 and 3 of projects the light plane to the sample, and a: Light 1) and an plane 2 faces at A: 00, light 2) and an plane 3 faces at B: 00, light 3) and an plane 1 part on C: 00, wherein(2 )Each A positions and C positions of the light plane 1, wherein (5) extracting A point and C point coordinates based on model; transformer(3 )Layer AND positions of the plane l, (4) extracting THE spots based on model transformer the Coordinate; (4 )To THE) method of (1 )step, and measuring head along the is the outlet unceasingly the plane vertical direction of obtaining, a series of three laser bar; the thereof is measured in the panel crossing point of A in A2, A, '). , A, B2, B, a, C'), C2, (. ; A(OF the crossing point of A, A, A2, A:, THAN, B, b, c, B2, B3 thanThe sample, and fits plane the direction of the plane 2 precise; and(6 )And the head of 2 as aiming point of the light plane; after(7 )Is the light 2) and mapping relation of CCD1 camera and CCD2 camera; Transformer (5) and 3 matrix with respectively composed of obtaining the transformer (6), <formula>formula see of document page 7</formula> substrate of a aiming point direct test system of linear equations, finding for extracting PHASE of the transformer (6) unknowns 8) is 歩 of a B) a step same method, 3 forming system model is placed on calibrating with a adjacent CCD2 camera and CCD3 camera is the light panel and following steps of (1 )of the plane 3 precise and: A module for measuring the measuring head, 2 and 3 projects the light plane l to the same the sample, and a: Light 1) and an plane 2 faces at A: 00, light 2) and an plane 3 faces at B: 00, light 3) and an plane 1 part on C: 00, wherein(2 )Each A positions and C positions of the light plane 1, wherein (5) extracting A point and C point coordinates based on model; transformer(3) Layer AND positions of the plane, one (4) extracting THE spots based on model transformer the Coordinate; ©) Method of (1 )further according to DIFFERENT, and measuring head along the is the outlet unceasingly the plane vertical direction of obtaining, a series of three laser bar; the thereof is measured in the panel crossing point of A, A2, A3 THAN, b, c, B2, B3' body, C', C2, (than; (5 )Adopts crossing point of B, b, c, B2, B., than, B, D, C2, (thanThe sample, and fits plane the direction of the plane 3 precise; and(6 )And the head of 3 as aiming point of the light plane; after(7 )Is the light 3) and mapping relation of CCD2 camera and CCD3 camera; A sampling composed of obtaining the transformer the transformer (5) 3x3 frame (7), 62; THE lower-mobility 65 w 1 to 7, 68 1 1 acts according to the fixed aiming point direct test system of linear equations, finding for extracting the transformer (7) unknown 8 is of the merits of v the invention comprising: aIs applied the multi-angle of the laser measuring head for scanning, detecting the gauge head direction is fixed oo'的, a direction represents gauge head direction of the axis. Light plane of each three laser plane projectors is by 0 and a projection direction, and guaranteed with the same position of the light emitting direction objects, each of the CCD camera and optical axis is intersect is 0 ' part, the is further guaranteed capable of receiving the position of with a diffuse reflection light. And method for scanning, detecting to the simple structure, the three laser plane projectors capable of emitting light is connected with a point, wherein the CCD camera and is for receiving the laser plane projectors' diffuse reflection light, the scanning measuring speed of the box are three times of single plane laser projector measuring head. The measuring structure and object, in particular, a groove; the gap of the objects, and a result of the masks switch; three laser plane projectors unreadable of each to the object on the same and same area, wherein the CCD camera unreadable for receiving on the object the same and a diffuse reflection light. The case, unreadable for measuring on the object from three are the same, and further layer is covered with directivity, except the blind hole; and mechanical capable of the cover is a direction, i.e., cover is one or two laser plane projectors' light, impossible is allocated with a three laser plane projectors' light, similarly, wherein the CCD camera is capable of with one or two is cover, further impossible of three is cover. Therefore, the structure and arbitrary shape, at least the plane of laser projector plane of the scanning measuring process and project to the object and simultaneously, at least a CCD camera and receiving the diffuse reflection light. The other phone, the scanning measuring of the measuring head without the blind spot, wherein the type of the object hole; the groove; gap of for. Each three laser plane projectors of the same axis is separated 120. Are arranged; when the measuring head and scanning operation, and adjusting a laser plane and gauge head vertical motion, which are two laser plane and gauge head places a vertical, at the time of the scanning process, the two laser plane made of the scannings of horizontally and: First, along the scanning of measuring head, motion other is the scanning of measuring head vertical motion direction. An measuring head capable of realizing scannings of two directions of a movement direction. Comparing to the single laser measuring head, wherein the measuring hole the groove; are matched and vertical plane. Multi-angle of the laser measuring head of the invention is for accurately measuring and physique, measuring hole; the groove; gap of for usage. To the traditional laser linear scanning measuring head, which can realize three-dimensional measuring in real sense. Capable of multiple angle measuring objects, with a fixing angle, specifically suitable for pressing part of the thin plate for the measuring; the main body of mobile phone panel, the measuring structure of complex type components. On digital and detailed composed of illustrated embodiments chart 1 is a structure drawing leds of multi-angle of the laser measuring head. Digital 2 is a pinhole imaging model drawing leds of multi-angle of the laser measuring head. Digital 3 is multi-angle of the laser measuring head structure drawing leds for calibrating apparatus and calibrating block. Digital 4 is the calibration method of light plane relation drawings leds of multi-angle of the laser measuring head. Digital 5 is the multi-angle of the laser gauge head measuring embodiment 2. Digital 6 is the multi-angle of the laser gauge head measuring embodiment 3. More than one an angle of the laser indicator for heads of. Shown as a digital 1, comprising: The CCD camera (i.e:. CCD1, CCD2 and CCD3) and three laser plane projectors (i.e:. Laser 1, laser 2, lasers 3), CCD1, CCD2, CCD3 and laser 1, laser 2, 3 laser are crosswise-arranged device, and relative the same axis 60 OO'间隔. Uniformly distributed; The CCD1, CCD2 and CCD3 optical axis and three laser 1, laser 2, 3 laser projection direction faces (1.0 '); The light plane l and source plane 2, an plane the three laser 1, laser 2, 3 lasers project 3 of each are respectively arranged on the object, and a CCD camera and wherein two adjacent laser plane projectors' diffuse reflection light; Namely CCD1 light receiving surface 1 and an plane 2 diffuse reflection light; CCD2 light receiving surface 2 and an plane 3 diffuse reflection light; CCD3 light receiving surface 1 and an plane 3 diffuse reflection light. However, use of the measuring head is realized the three-dimensional scanning, detecting first connecting device of the calibrating to the measuring head. Horizontal measuring head of the present invention directly positioned is a two-dimensional Coordinate of CCD camera image plane; of realizing three-dimensional measuring to a converted into a three-dimensional Coordinate a world coordinate system, meanwhile, data of a connecting with three laser wire and combining and a coordinate and system. The gauge head and is of realizing of the axes coordinate measuring device generally, namely; the measuring head on the axes coordinate measuring device, and scanning measuring through measuring movement machine. First adjusting the measuring head is made of the light panel and scanning direction of laser projector plane 1 projects, vertical side of the scanning direction is close MM, and plane thereof is consistent with the YZ plane coordinate. A light plane by the pinhole imaging of 1 with CCD1 and CCD3 model, namely and a computer and Coordinate's transform relation to the world coordinate system. The pinhole imaging is the invention shown as a digital 2, (; V^LFor three-dimensional coordinate world; systemIs according ^h coordinate plane is consistent with the YZ plane coordinate of axes coordinate measuring device. The coordinate system limit is: At centre (00: (optical centre), RESPECTIVELY arranged and optical axial lines; Camera image plane coordinate system limit is: At centre (00: (optical axis and DOWN image planar crossing point of), RESPECTIVELY „K, in A Thermometer, comprising shaft. The (is, 厶,) is in three-dimensional coordinate world system the object uses the p type three-dimensional Coordinate; the x, at least, and is the same as the p three-dimensional Coordinate the camera coordinate system, (j^, yj represents the image coordinates,/for ideal imaging system focal distance. Image unit in camera coordinate system is a pixel, a (w. , Processor). for. The storage centre coordinates, and space point conversion single-colour to reference plane image. The invention calibrating the controlled by triangle location block as, and shown the digital 3. The measuring head of a light plane l and triangle location block 5 faces, the light panel 1 is a location block five two laser line 4 points of a central point, and determined for with image plane Coordinate of a corresponding; The calibrating 5) arranged on the axes coordinate measuring computer work bench 6 on. To the 1 to the multiple positions as aiming point of the light panel, each of the positions of the light plane, the calibration method for sending the co-planer reverse standardization. The aiming replacing failed point model formulas (4), a solve the unknown parameter for radially restraint method of (RAC). Layer the plane 1 a plane coordinate x^jv, B 厶 with CCD1 and CCD3 is a two-dimensional counterfeit relation, therefore and a second row using model and second row and fourth end of determining for a counterfeit relates. The transformer (4) is simplify is: the <formula>formula see of document page 9</formula> of transformer (5) and a two-dimensional Coordinate of CCD3 image plane CCD1 changed into the plane 1 a two-dimensional Coordinate. Layer the light panel 1 is consistent with the YZ plane of axes coordinate measuring device, wherein the plane 1 a two-dimensional data of direct and YZ Coordinate a vapour of measuring device, capable of the three-dimensional Coordinate connected with the measuring device X shaft coordinates, for three-dimensional scanning measuring with laser plane l. The invention is the calibrating method for multi-angle of the laser measuring head, wherein the calibration or, or end on the three-dimensional motion mechanism on the axes coordinate measuring device, wherein the gauge head, realising scanning measuring. The calibrating method of a lock and according to the following steps: A) is 1 with a adjacent two CCD1 and CCD3 composed of system model is placed on the calibrating the light system according laser projector plane is 1 projection; THE) after to 2 with a adjacent two CCD1 and CCD2 composed of system model is placed on the calibrating the plane of the laser projector plane is 2 projection; C) is the same method, 3 with a adjacent two CCD2 and CCD3 composed of system model is placed on the calibrating the plane of the laser projector plane is 3 projection; THE) is--Light plane l, 2 and 3 inner point coordinates. A of the invention is) to further 1 is composed of system model is placed on calibrating the step is the following with a adjacent two CCD1 and CCD3 the plane: (1 )For adjusting the measuring head is made of the plane of the plane laser projector 1 projects 1 with the scanning vertical direction, and gauge head scanning direction is close MM, and light panel 1 is consistent with the YZ plane coordinate of axes coordinate measuring device; (2 )Is the light 1) and type of transformer CCD1 camera and CCD3 camera (4); <formula>formula see of document page 10</formula> the (4) and transformer (, ruler and f is a three-dimensional Coordinate of world coordinate system, (w vf is a CCD image plane and pixel unit and two-dimensional Coordinate; P type of the conversion single-colour ratio,/is a lens focal distance; the iV, A^) is unit distance's the connecting element are is an image plane, a point of the parameter conversion to obtain of the camera; the two. , Processor). Uses the Coordinate primarily, a, G, Is the coordinate system to the world coordinate system and method, h . . f represents a world); systemthe r shaft of the camera coordinate system, (r2 in r8f represents world coordinate system/shaft of the camera coordinate system, (r3 r6 r9 7) represents a world coordinate system z shaft of the camera); system (4) And based on: Pinhole conversion single-colour; supposing <formula>formula see of document page 10</formula> a camera coordinate system to world coordinate system relationship: <formula>formula see of document page 10</formula> (2), camera image plane Coordinate to computer and actual Coordinate transformation relationship: set is A^ a + a. (3), And presence; (3 )Selected calibrating: instrumentIs a triangle location block as to be calibrated, instrument(4 )Is connected and calibrating block: Control the measuring head, a light plane l with the triangle location block, part of the laser module of line of the triangle location block by light panel 1 is a point, and determined for with the CCD1 the image plane Coordinate of camera and CCD3 camera which are; (5 )Is co-planer reverse standardization model test transformer (4) is unknown parameter: 1 To the multiple positions as aiming point of the light plane of (4 )method, (4) is solve the unknown parameter the aiming replacing failed point model formulas: Is a. A/a ~ ' . , '); AND(6 )Each light is 1 to the plane coordinate and h, xj^ and CCDl and CCD3 is a two-dimensional counterfeit relation, the invention can a second row using model and second row and fourth end of determining for a counterfeit relates, the type electrode (4) is simplify is: the <formula>formula see of document page 11</formula> (5) is model transformer (5) and a two-dimensional Coordinate of CCD3 camera image plane the CCD1 camera changed into the plane 1 a two-dimensional Coordinate. A light panel 2 is system model with CCD1 and CCD2 and performing calibrating the step is the following: To the plane 2, comprising the triangle location block as to be calibrated the instrument, which is element of light plane 2 precise, and capable of controlling gauge head of as aiming point of the sample, and; the laser is the device for processing the sensor light control plane of direction. The invention adopts the following method of light plane 2 precise and: Scans a plane by the measuring head, and projects light plane to the same plane, to digital 4 light plane 1 and 2 faces at A: 00, an plane 2 and 3 faces at B: 00, an plane 3 and 1 part on C 00: . Each A positions and C positions of the light plane is 1 terminals, Coordinate of (5) extraction by a transformer; THE positions of the plane is one, the three-dimensional coordinate space of the model (4) determined, such THE position Coordinate of further extraction. The specified one of the following: (1 )The plane 2 precise and: A selection measuring plane by the measuring head, 1, 2 and 3 of projects the light plane to the sample, and a: Light 1) and an plane 2 faces at A: 00, light 2) and an plane 3 faces at B: 00, light 3) and an plane 1 part on C: 00, wherein(2 )Each A positions and C positions of the light plane 1, wherein (5) extracting A point and C point coordinates based on model; transformer (D, each THE positions of the light plane, one (4) extracting THE spots based on model transformer the Coordinate; (4 )To THE) method of (1 )step, and measuring head along the is the outlet unceasingly the plane vertical direction of obtaining, a series of three laser bar; the thereof is measured in the panel crossing point of A, A2, A3 THAN, BAB. , And the d, C2, C is one. ; (5 )Adopts crossing point of A, A, A2, A3 Than, B, B, B2, B): thanThe sample, and fits plane the direction of the plane 2 precise; and(6 )And the head of 2 as aiming point of the light plane; after(7 )Is the plane 2 and mapping relation of CCD1 and; CCD2A sampling is obtaining the transformer (6), <formula>formula see of document page 11</formula> of the transformer (5) 3><3 matrix of the aiming point direct test system of linear equations, finding for extracting the transformer (6) unknown 8] whereinA8 0 is a B) a step same method, and 3 is system model is placed on calibrating the step is the following with a adjacent CCD2 and CCD3 to the plane: (1 )The plane 3 precise and: A module for measuring the measuring head, 2 and 3 projects the light plane l to the same the sample, and a: Light 1) and an plane 2 faces at A: 00, light 2) and an plane 3 faces at B: 00, light 3) and an plane 1 part on C: 00, wherein(2 )Each A positions and C positions of the light plane 1, wherein (5) extracting A point and C point coordinates based on model formula: (3 )Layer AND positions of the plane, one (4) extracting THE spots based on model transformer the Coordinate; (4 )To THE) method of (1 )step, and measuring head along the is the outlet unceasingly the plane vertical direction of obtaining, a series of three laser bar; the thereof is measured in the panel crossing point of A, A2, A:, THAN, B2, B:, Than, Cb C2, C: , Than; (OF the crossing point of B, B^B2, B3 Than, C, Ci, C2, (thanThe sample, and fits plane the direction of the plane 3 precise; and(6 )And the head of 3 as aiming point of the light plane; after(7 )Is the plane 3 and mapping relation of CCD2 and; CCD3Transformer (5) and 3 matrix with a sampling obtaining the transformer (7), A, A to 1, 68 1 1 acts according to the fixed aiming point direct test system of linear equations, finding for extracting the transformer (7) unknown 8 w is side; three light plane type multi-point Coordinate integral: The upper calibrating process of the invention is a blocking three a performing; each step sections of the mapping relation of light plane and adjacent two CCD camera. To with different and three light plane data of the scanning method, each light panel 1 is consistent with the YZ plane of axes coordinate measuring device, wherein the plane 1 a two-dimensional data of direct and YZ Coordinate a vapour of measuring device, capable of the three-dimensional Coordinate connected with the measuring device X shaft coordinates, and three-dimensional scanning measuring. (1 )Light system according layer is 1 is consistent with the YZ plane of axes coordinate measuring device, wherein the plane) in two-dimensional data of direct and YZ Coordinate a vapour of measuring device, capable of the three-dimensional Coordinate connected with the measuring device X shaft coordinates, realising three-dimensional scanning measuring; (2 )Each of THE step) and C) a step is determined the light 2) and an plane 3 precise with, and extract the plane 2, wherein the plane 3 is opposite to the plane 1 included angle; 2 And an plane 3 a two-dimensional data decomposition the plane of along the axes coordinate measuring machine the axes coordinate part, and three coordinates end of the coordinate measuring device is a to obtain the three-dimensional data the three part; (3 )And THE (1) with light plane 1 and reference, and D) a (2 )with the plane 2 and an plane 3 of a three-dimensional data of obtaining and a wireless conversion, a three-dimensional Coordinate lines and a 2 or the plane 3 obtain the three-dimensional Coordinate and optical system according 1 information of the sample, and axes unifications of three light plane type multi-point. And the light 2) and an plane 3 a two-dimensional data unreadable directly transformation and three-dimensional data, each 2 and an plane 3 direction oneself passes through the measuring the measuring point aiming a plane, the extracting of the two light plane to the plane 1 included angle, 2 and an plane 3 a two-dimensional data decomposition the plane of along the axes coordinate measuring machine the axes coordinate part, and three coordinates end of the coordinate measuring device is a to obtain the three-dimensional data the three components. Although the data in the light plane transformed at the time of the three-dimensional Coordinate, the bottom reference is different, the object part of the same area three laser line of obtaining unreadable superpose are generated, i.e., wherein three sheets of data with a wireless relationship. The light plane l and reference, and is a wireless conversion of the three-dimensional data of the light 2) and an plane 3 and is obtained. Digital 4, wherein asking three surfaces faces, for a series of coupler, A power supply A2, A: , Than; The positions of two light plane l, and a light plane 2, the axes and device for on the two surfaces are different, of which the light plane is 1) is device al}, a b2h device (al) of the light plane is 2) and reference, the three-dimensional Coordinate of central is of cell (the al divination (a2i to enable 2 to obtain the three-dimensional Coordinate and optical system according 1 information of the plane; Editable three-dimensional Coordinate of the light plane 3 invention claims a similar method for three-dimensional Coordinate of central of the movable and an l plane obtain. The is realized by the unifications of three optical multi-point planimetric. For calibrating by the multi-angle of the laser measuring head calibration method of this invention result embodiment 1: <formula>formula see of document page 13</formula>1) and transformer (4): parameter iV „is determined by the CCD camera technique parameter: =118.75309, IV. =119.23984))The axes is arranged layer is an image plane Coordinate centre (384, 288). The transformer (4) unknown parameter of the following: Result of the first subindex: a0.23147 To 0.999732. 0.000336 result of 0.447638 to 0.010465 0.894154 -0.893918 -0.020546 or 0.447760 is a 17.38216 mm and subindices is: 0.234345 -0.999732' 0.0003421)? 0.4467567 Is 0.010352 to 0.895975 -0.895842 -0.0204682 or 0.4475386 is 17.38327) mm2 transformer (6): parameter Result of the first subindex: aa, =-18.941347, a2 =1.562596, a3 =360.05454, a4 =0.116966 is fl5 9.876304, a6 is 284.34659, a7 is an result of 0.000026, a8 is the second 0.004266 subindex: aa]=-18.941243, A2 =1.562693, a3 =360.05403, a4 is 0.116853 a5 is 9.876295, a6 is 284.346326, a7 is -0.000027, a8 is 0.0042573) Transformer (7): parameter Result of the first subindex: aResult of =-17.842455, 62, =1.4623768 is r3 354.246823, r3 is 0.093523 to 65 =9.357658, the second 66 subindex: aIs T-SHAPED (0.1989958 )is 0.057260 to 200.75987) is 7r 0.1986343 (-0.0574622) 200.759241 7282.561 maos 6 ' 67 =-0.000022: 68 Is 0.0040346, is an is 17.842532 to =9.357685, 62 =1.4623345, r3 =282.561926, =0.093547 0.004031 is the measuring head scanning, detecting the invention, energy63 =354.246681 67 =-0,000022, Applied the invention the multi-angle of the laser measuring head measuring embodiment: Digital 5 is a measuring embodiment 2. The chart comprises the current, a surface, wherein the measuring hole is. Digital 6 is a measuring embodiment 3. The chart is a remote control panel, comprising the current, wherein the measuring head scanning, detecting the capable of the perfect measuring the object surface, wherein said energy measurement 5 hole type for internal. The domain's of the claims a understand of the invention's protection range of protecting, piece of surrounding the upper embodiment, a adding and exchange is a, comprising a surpassed the invention the protection range of protecting.