Antireflection coating for a temperature sensitive substrate

A multilayer antireflection coating (10) for a temperature sensitive substra te (15) such as plastic. One layer is a DC reactively sputtered metal oxide whi ch may be deposited quickly and without imparting a large amount of heat to the substrate. Another layer has a refractive index lower than the substrate.</S DOAB> A multilayer antireflection coating (10) for a temperature sensitive substrate (15) such as plastic. One layer is a DC reactively sputtered metal oxide which may be deposited quickly and without imparting a large amount of heat to the substrate. Another layer has a refractive index lower than the substrate.