Method of forming compounds having si-n groups and resulting products

3~779L "METHOD OF FORMING COMPOUNDS ~lAVING 6 Si-N GROUPS AND RESULTING PRODUCTS' 11 12 13 14 16 BACKGROUND OF T8E INVENTI ON 17 18 1.

Field of the Invention 1~ The invention relates to the synthesis of 21 compounds (by which it is intended to include monomers, 22 oligomers and polymers) containing the structure Si-N in 23 the molecule. The inven~ion concerns primarily silazanes 24 which are useful to produce ceramic products on pyrolysis but it also relates to compounds which are siloxazanes 26 and/or other compounds containing the Si-N group.

27 28 2. DescriPtion of the Prior Art 29 Polysilazanes are useful among other things for 31 ~he preparation o~ silicon nitride, Si3N4, by 32 pyrolysis. Silicon nitride is a hard material and is 33 use ul in forming fibers ~or reinforcement of composite 34 materials. See, for example, (a) Department of Defense Proceedings. Fourth Me~al Matrix Composites Technical 36 Conferen~e, May 19-21, 1981, prepared for DOD Metal Ma~rix 37 Composites Informa~ion Analysis Center and ~b) J. J.

~3 [1~77~ -- 2 - 1 Brennan, "Program to Study SiC Fiber-Reinforced Glass 2 ~atrix Composites, ~nnual Report to Dept. of Navy (Nov.

3 1980), Contract No. N00014-78-C 0503O S A number of researchers have developed methods of 6 ~orming polysilazanes, among them Redl and Rochow, who, in 7 Angew.

Chemie. (1964) 76, 650 discuss the preparation of 8 polysilazanes by reaction ~1) (1) 4~CH3)2SiNH1~ ~ 4(CH3)2SiNII~11 12 Brewer and Haber, J.

Am.

Chem.

Soc. (1948) 70, 13 3888 and Osthoff and Kantor, Inorg.

Syn. (1957) 5, 61 teach 14 the reaction (2) 16 17 (2) (CH3)2SiC12 + NH3 ~ [(CH3)2SiNH]n + HCl 18 19 More recen~ work is described by Markle and others in R. A.

21 Markle, I.

Sekercioglu, D. L.

Hill, R. R.

Wills, and R. G.

22 Sinclair, "Preparation of SiXMyCz Fibers by the 23 Controlled Pyrolysis of Novel Organosilicon Polymeric 24 Precursors", Final Report to NASA, Marshall Flight Center, Alabama, (1981), Contract No. NAS8-33223.

26 27 Zoeckler and Laine in J.

Org.

Chem. (1983) 48, 28 2539-2541 describe the catalytic activation of the Si-N 29 bond and in particular the ring opening of octamethyl tetrasilazane, 31 32 4(CH3)2SiNH 33 34 and polymerization of the ring-opened intermediate.

Chain termination is effected by introducing 36 [(CH3)3Si~2NH as a co-reactant giving rise to 37 polymers (CH3)3 Si-[NHSi(CH3)2]n-NHSi(CH3)3 ~3~ 77a~ l where n may be 1 to 12 or more depending upon the ratio of 2 the chain ~erminator to ~he cyclic silazane. The catalyst 3 used was Ru3(CO)12. Other publications are as follows:

4 W~ Fink, Helv.

Chem.

Acta., 49, 1408 (1966); Belgian Patent 665774 (1965); Netherlands Patent 6,507,996 (1965); D. Y.

6 Zhinkis et. al., Rus.

Chem.

Rev., 49, 2814 (1980) and 7 references 51-58; K. A.

Andrianov et. al., Dok Akad. ~auk.

8 SSSR, 227, 352 (1976); Dok Akad.

Nauk. SSSR, 223, 347 9 (1975); L. H.

Sommer et. al., JACS 9I, 7061 (1969); L. H.

Sommer, J.

Org.

Chem. (1967) 32 2470; L. ~.

Sommer et. al., ll JACS 89, 5797 (1967).

12 13 The methods described in the literature cited 14 above and elsewhere have resulted in one or more of the followinq disadvantages: low yields of polysilazanes 16 coincident with a high yield of cyclomers, lack of control 17 over product selectivity or quality, etc. Often the 18 product is volatile and is therefore difficult to pyrolyze 19 if ceramic materials are desired from the solid or liquid polymer, or if it is solid, it is an intractable material 21 which cannot be readily shaped, if indeed it can be shaped 22 at all. The product is likely to be contaminated with 23 halogen, especially chloride and it may be extensively 24 cross linked and insoluble. In addition, the high ratio of Si to N in the polymers leads to formation of silicon along 26 with Si3N4 on pyrolysis. In some instances excess 27 carbon and SiC are also produced although they are not 28 always desirable.

29 SUMMARY OF THE INVENTION 31 32 It is an object of the invention to provide 33 improved methods of preparing compounds containing the Si-N 34 group.

36 It is another object to provide methods of 37 preparing compounds containing the Si-N group which permit ~3~ . ,~ 1 selective control of the product.

3 Another object is to provide methods whereby the 4 product of preparing compounds containing the S1-M group can be controlled during synthesisO 7 Another ob~ect is to provide methods whereby the 8 product of preparing compounds containing the Si-N group 9 can be modified after preparation.

11 Another object i5 to provide novel compounds 12 containing the Si-N group.

13 14 The above and other objects of the invention will be apparent from the ensuing description and the appended 16 claims.

17 18 In accordance with the present invention a 19 precursor containing an Si-N group is caused to undergo cleavage of the Si-N bond or a compound containing ~he 21 silyl group Si-H is reacted with an -NH group to produce 22 hydrogen and one or more compounds containing an Si-N 23 group.

24 Both types of reaction are carxied out 26 catalytically using a catalyst which is effective to 27 activate the Si-N bond, the Si-H bond or the Si-Si bond.

28 29 Catalysts suitable for carrying out these reactions are metal complexes such as those in Table I 31 which are homogeneous catalysts that dissolve in the 32 reactants or in a solvent used to dissolve the reactants.

33 Heterogeneous catalysts such as those in Table II may also 34 be used. In general catalysts that activate the Si~H bond, the Si-N bond, or the Si-Si bond may be used.

36 37 The reactions are carried out in solution, the ~3~ -- 5 - 1 solvent being the reactants themselves or an added 2 solvent. Suitable solvents are set forth in Table III.

3 Temperature may range from -78 to 250, preferably 4 25 to 150. (All temperatures are CelsiusO) 9 H4RUd~(co)l2,Ru3(co)l2~ Fe3(C0~12, Rh6(C)16~ C2(C)8 (Ph3P)2Rh(CO)H, H2PtC16, nickel cyclooc~adiene, 11 S3(C)12~ I~4(C)12~ (Ph3P~2Ir(CO)H, Pd(OAc)2, 12 Cp2TiC12~(Ph3P)3RhCl~ H253(C)10~ Pd(P~3P)4 13 Fe3(CO)12/Ru3(CO)12 mixtures, also mixtures 14 of metal hydrides.

16 Table 2, Heterogeneous Cat~ysts 17 18 Pt/C, Pt/~aSO4, Cr, Pd/C, Co/C, Pt black, Co black 19 Pd black, Ir/A12O3, Pt/SiO2, Rh/TiO2, Rh/La2O3, Pd/Ag alloy, LaNis, PtO221 22 23 24 Ethers such as Et2O, CH3O-CH2CH2OCH3, THF, halocarbons such as CHC13, CH2C12, HClCF2, ClCH2CH2Cl, 26 aromatics such as PhH, PhCH3,Ph-OCH3.

27 28 Where the reaction is of the second t~pe (reaction 29 of an Si-H group with an -NH group) the -NH group may be in the form of ammonia, a primary amine RNH2, a secondary 31 amine RRNH (the Rs being the same or different or forming 32 part of a cyclic group), hydrazine, hydrazine derivatives.

33 More generally the source of the -NH group may be described 34 as R ~NH 36 R 37 where the R's may be the same or different and may form -- 6 - 1 par~ of a cyclic structure. R is commonly a hydrocarbon 2 group, eOg. alkyl (e.g. methyl, e~hyl, etc.), aryl (e.g.

3 phenyl), cycloaliphatic (e.g. cyclohexyl) or aralkyl (e.g.

4 benzyl) and the R's may be the same or differen~. R may also include an amino group, an alkoxy group, an ether 6 group, an ester group, a silyl group, hydrogen, an alkenyl 7 group, etc. The nitrogen of the -NH group may be present 3 in various forms such as ~NH, -MH-NH-, -N-N-, -N~ R2-N, -N R2-N-! etc.

11 R R Rl H H R3 R3 12 13 where Rl, R2 and R3 are defined as in R above, R2 14 being, however, a bivalent group.

16 The following specific examples will serve to 17 illustrate the practice and advantages of the invention.

18 19 Exam~le 1 Reaction of Diethylsilane with Ammonia 21 To 3.9 mmol (5 ml) of diethylsilane (Et2SiH2) 22 are added 25 ~mol of Ru3(CO)12 and the solution is 23 heated at 135C under 60 psi of NH3. The reaction is 24 very fast producing oligomers, polymers and H2. The H2 pressure rises to 110 psi and is released every 0.5 hours.

26 The reactor is again charged ~o 60 psi with NH3. After 27 1 h all of the Et2SiH2 reacts and no further release of 28 H2 occurs.

29 Example lA Reaction of Diethylsilane with Ammonia 31 32 To 20.0 mmol of diethylsilane (1.76 g) are added 33 25 ~mol of Ru3(CO)12 (16 mg) and the solution is heated 34 at 60C under approximately 80 psi of NH3. After 1 hour, 85% of the silane i5 converted to a mixture of 36 oligomers and the pressure increases by 200 psi due to H2 37 evolution. Although Et2SiH2 disappears totally after 2 ~ ~77~ 1 hours, chain oligomerization and cyclization continue for 2 12 hours. Oligomers of types A (n = 3-5; major) }3 (n 3 1-4; major) C (n ~ n' - 2 or 3), D (n ~ n' ~ n" + n"' = 2) 4 are found in ~he product mixture. Small quantities of other series ~ H~Et2SiNH]~H (n = 2-4) and 6 H2N[Et2SiNH~nH (n - 2) also appear in the solution g ~ H[Et2SiNH]nH 11 12 A 13 14 15~Et2SiNH]n-si~t2lN-~SiEt2NH]n~ SiEt2H 1 ~SiEt2NH]n-SiEt2H 16 17 18 C ~ I-[Et2SiNH]n'-SiEt2 19 L 21 ~ ;i-~NHSiEt2]n---N--~ 22 23 24 HEt2Si-[HNSiEt2}n'' 26 27 D 28 29 Example 2 31 32 To 30 mmol of tetramethyldisilazane (TMDS) are 33 added 25 ~mol of Ru3(CO)12 and the solution is heated 34 at 135c under 80 psi of NH3. TMDS disappears totally after 20 h and pol~nerization continues for 28 h. The 36 polymeric residue (heavy oil) is 2.44 sm (yield 61 wt%) 37 after distillation at 180/0.3 mm Hg with a Wt average MW 1 of 764. The major polymeric series i5 the linear 2 HSiMe2~NHSiMe2]xNHSiMe2H. Also smaller branched 3 chain polymers appear. Molecular weights greater than 2000 4 can be obtained by varying the reaction conditions.

6 Ex-am~ele 3 8 To 20 mmol o TMDS axe added 25 ~mol of 9 Ru3(CO)12 and the solution is heated at 135C under 100 psi of NH30 The conversion of TMDS is 94% after 1 h.

11 0.1 g of hydrazine are added and the solution is heated 12 again for 3 hours. The GC shows that most of volatile 13 products disappear. The high polymeric residue is 68 wt~ 14 after distillation at 180/0.3 mm Hg. Similar results are achieved by using 200 mg of 5% Pt/C ~activated under 16 H2) using identical conditions. The average molecular 17 weight is 1200.

18 19 Examle 4 21 To 75 mmol of TMDS are added 25 ~mol of 22 Ru3(CO)12 and the solution is heated at 135~C under 23 60 psi of ammonia. The hydrogen pressure produced in the 24 reaction is released every 1 hour and the reactox is charged again with 60 psi of NH3. TMDS disappears after 26 5 h. The initial turnover fre~uency (TF) for TMDS 27 disappearance is 260. The net total turnover number for 28 Si-N bond production is close to 4,480 after 8 hours.

29 Example S 31 32 To 20 mmol of tetramethyldisilazane (TMDS) and 20 33 mmol anhydrous hydrazine (NH2NH2) are added 25 ~mol of 34 Ru3(CO)12 and the solution is heated at 135C under nitrogçn. All the TMDS disappears after 3 hours and H2 36 pressure is obtained (TF = 528). The yield of the 37 polymeric residue after distillation of the volatile ~L3~ , 9 1 products is 75 wt percent. The average molecular weight 2 is 96~.

~ x~me~ eaction o~_n~h ~ Al-o~_Y 6 10O0 grams of nohexyl silane 9 n hexyl-Si~H 11 12 and 16 mg of Ru3(CO)12 as catalyst were heated at 13 60C under 150 psi of ammonia in a stainless s~eel 14 reactor. A pressure of 300 psi is produced during the first hour. The reactor is cooled to room temperature, the 16 pressure is released and the reactor is charged again with 17 150 psi of ammonia. This procedure is repeated several 18 times. After 1 hour, 68% of the substrate disappears 19 (according to calculations based on NMR analysis) and the reaction slows down. After 17 hours, only 12% of the 21 starting material remains in the oily solution. Only a 22 slight additional conversion is detected when the 23 temperature is raised to 90C. The addition of ano~her 24 16 mg of Ru3(CO)12 promotes further conversion to a viscous material concurrently with the disappearance of 26 hexylsilane. The N.M.R. and the VPO analyses are shown in 27 Table 4.

28 29 T~BLE 4 31 Time Form ofConversion Unit's Ratiob 32 (hours) Products l%) Si-H N-H Mn 33 lc light oil 68 1.28 0.72 -34 17c slightly viscous 88 1.18 2.18 921 24d viscous oil 91 1.06 2.20 962 28d~e very viscous oil 100 0.70 1.84 2772 36 36d,e wax 100 0.43 1.83 4053 37 ~L3~774 -. 10 1 a 2 Overall conversion was determined by NMR spectra in CDC13 3 (ppm). For n hexylsilane: Si-H 3.52 (t, 3); C-H 1.36 ~m, 8) and 0.92 (m, S).

For polysilazanes: Si-H 4.78 (m), 4.57 (m) and 4O35 (m); C H 1.32 (m) and 0.91 (m); N-H 0~62 (m, br).

7 bSi H and N~H unit ratios are determined by NMR using the 8 hexyl group integration as an internal standard.

CAt 60C11 .

12 dAt 90C.

13 14 eAfter addition of 16 mg Ru3(CO)l~.

16 17 The reaction mixture was analysed by NMR and GC-MS 18 techniques to determine t~pes of polymer. In Table 5 19 possible polymer types I, II, III, IV and V are set forth with elemental (C, H and N) analysis for each in the upper 21 part of the table and actual analyses of the reaction 22 mixture after 24 hours and 36 hours are set forth in the 23 lower part of the table.

24 26 27 28 29 31 32 33 34 36 37 77~ 11 1 Certain conclusions may be drawn from Table 5, as 2 follows 4 aO The initial conversion is very fast; the initial turnover frequency for silane 6 ~onversion is 2350 per hour.

8 bo The polymer at 24 hours contains large 9 quantities of Si-H bonds even when the molecular weights are highO Crosslinking, 11 is therefore prevented, possibly as a 12 result of steric hindrance.

13 14 c.

At 36 hours the high in~egration ratio of N-H to C-H strongly suggests that there 1~ are signi~icant quantities of the 17 -HN-ISi- and (N~H)1/2 18 NH2 -Si-NH19 functional groups.

Si-NH2 can also be detected by I.R. (absorbance in 1550 21 cm~1 in CC14). [ (NH)1/2 signifîes 22 that the NH group is shared with another 23 fragment of the polymer. ] 24 The GC-MS of the reaction solution shows a 26 series of linear and cyclic oligomers with substituents 27 on both the silicon, e.g., [(-N)3 Si-)] or nitrogen, 28 e.g., [~ - Si)3N]. The terminal Si-NH2 unit is not 29 observed in the GC-MS fragmentation patterns.

31 32 33 34 36 37 ~ 30~7a~ _ 12 1 Referring to Table 5, the types of repeating 2 units of I through V are s~t forth below.

4 n-hexyl n-hex _ - Si-N~- - ~Si-NH~ 6 H (NH)1/2 8 I II n-hex 12 - Si-NH - ~ SioN~ 13 N~2 n-hex 14 lII H-. ,i 1~ n-hex 17 18 IV 19 _ _ 21 n-hex 23 26 (H-si-n-hex)l/2 27 28 V 29 3 32 33 34 36 37 2 TABLE 5 3 .

4 ~h~ ~4~oL~ 3~ S _ Ty~/hours _ %C %H ~N 7 I 55nBl 11063 lt)o85 9 II 52.94 10.6615O44 11 III 50.00 lloll19.44 12 ~V 59O25 1~o93 5.76 13 V 58.37 11.35 7.57 14 16 28 h 54.Sl lO.9S10.84 17 36 h 52.54 10.7312.93 18 19 The following conclus.ions are drawn from Table 5.

21 The actual analyses at 28 hours conform closely to the 22 linear type I polymer.

23 24 26 27 28 29 3l 32 33 34 36 37 14 ~ 2 ~3~E~ ~ 6H5siH3 4 Phenylsilane (10.0 g) and Ru3(CO)12 (16 mg) are heat~d at 60C under 150 psi of ammonia in a 6 stainless steel reactor. The reactor is cooled several 7 times during the reaction to sample and to recharge with 8 ammonia.

After 3 hours, 84% of the phenylsilane is 9 converted to oligomers (calculated from NMR data). After 14 hours, the reaction temperature is increased to 90C 11 and after 18 hours 8 mg Ru3lCO)12 are added to the 12 mixture. Table 6 sums the observa.ions and the results 13 from the NMR and VPO analysesO 14 16 TABLE 6 17 18 Time Form ofConversion Unit's Ratio l9 (hoursL Products (%) _ Sl-H N-H Mn 21 3c slightly viscous 84 1.210.98 549 22 gc slightly viscous 95 1.131.32 -~ 23 14c very viscous 98 1.07 1.21695 24 18d hard wax 100 O.9B 1.031058 28d,e solid 100 0.47 1.47 __ 26 32d~e solid lO0 0.34 1.701432 27 28 29 (a)-(d) As in Table 4.

(e) Addition of 8 mg Ru3(CO)12 and 2 ml of toluene 31 (removed before molecular weight measurements).

32 33 The data for the 18 hour sample indicate the 34 formation of linear Type VI polymers (see Table 7). As additional catalyst is added and the temperature raised, 36 more ammonia is incorporated in the polymer. After 32 h, 37 the elemental and the NMR analyses indicate that the ~3~ ~15 ~ 1 polymer contains units of types VI, VII, and VIII in the 2 ollowing approximate ratios~ 3 ..

4 (~H)1/2) N~2 S l l 6 ~phsiHNH]oo36[phsiNH]o~sg~phsiNH~ooos 7 VI VII VIII 9 The polymer containing units VI, VII and VIII is ind~cated as IX below.

11 12 This solid polymer IX after 32 hours is soluble 13 in CC14, CH2Cl2, CHCl3 and toluene. It has a glass 14 transition point at 70-72C and softens considerable at 90C. Pyrolysis at 900C gives a 70% ceramic yield and 16 finally 35% yield when heated to 1550. Only alpha and 17 beta Si3N4 are observed by X-ray powder diffractometry 18 although the final ceramic product contains 29% carbon 19 (found by elemental analysis).

21 TABL~ 7 22 23 _ _ Elemental Analysis _ 24 TY~e!hours %C %H %N 26 VI 59.50 5.78 11.57 27 28 VII 56.25 5.47 16.40 29 VIII 52.94 5.8~ 20.58 31 32 18 h 59.37 5.67 11.81 33 32 h 57.42 5.58 14.21 34 IX 57.25 5.60 14.97 36 37 ~3~ _ 16 1 GC-MS analysis of the mixture after 3 hours of 2 heating xeveals that majority of the oligomers ~n - 1-3) 3 are type VI; minor products include cyclic compounds, 4 cyclomers with branching on a silane unit and, straight and S cyclic compounds branched on the nitrogen. Amlne capped 6 pol~mers are not observed.

8 ~m~ Reaction of a Hvdridosilazane [H2SiNMe]x (2~0 g; Mn = 560) and Ru3~CO)12 11 ~16 mg) are heated under several reaction conditions.

12 The results are shown in Table 8. The starting reactant 13 -[H2SiNMe]x- is prepared from H2SiC12 and MeNH2 14 in ether solution as reported by Seyferth and Wiseman (Polymer Chem.

Div.

Preprints; Paper presented at the 16 spring meeting of ACS, April 1984). The products are 17 [H2SiNMe]4 and a linear oligomer HNMe~SiH2NMe]x- H 18 (x is approximately 10).

19 21 22 23 24 ~6 27 28 29 31 32 33 34 36 3?

~ 17 - ~o -- E~ o _~ o~ ,~ ~ ._~ N j ~ L O u ~o ~ O a )J '~ O a) ~ ~ o Q~ ~ .~ E3 0 ~ ~ o CO~ U :E: C ~ U ~ = U~ o ~ o Z S N ~ l ~ ~ o ~ ~ ~ ~ _ ~ ~ ~ U Ul O Q~ ~ 'O O ~ 3 ~ ~ ~ ~ ~ " ~ o u , ~ ~ ~ ~ ~ 0 111 _ 5 ~ ~ _ ~ æ o ~ o ~ Cl U I -' ~ ~ ~ _ _ ~3~ - 18 ~ 2 xamPle 9 Po_ymerizatlon o~ ky_____ne with Ammonia 4 Ethylsilane, (EtSiH3, 8 g) is condensed in~o a stainless steel reactor, containing Ru3~CO)12 (16 mg) 6 in 1 ml of toluene, cooled in a dry ice/ace~one container.

7 T~e reactor is then pressurized with 100 psi of ammonia 8 (at -78C). A total pressure of 250 psi is obtained when 9 the reactor is heated to room temperature. The solution is heated at S0. The reactor is cooled a~ter 1 hour to 11 room temperature, depressurized ~releasing H2), loaded 12 wi~h an additional 150 psi of ammonia and reheated at 60 13 for an hour then cycled again for 2 hours. The resulting 14 solution (after 4 h) is very viscous. The solvent is evacuated (R.T., 0.1 mm) and the waxy polymer is heated 16 again at 90 for another 2 hours to form a soft rubber.

17 Pyrolysis of the rubber at between 200 and 900C gives 18 58% of ceramic material. The NMR and IR spectra of the 19 polymer produced after 4 hours show the following peaks:

NMR (8, CDCl3):Si-H (4.90-4.40, m); CH3 (0.95, t); N-H 21 (1.0-0.8 br); CH2 (0.58, q). (The ratio of the Si-H to 22 the Et-Si and N-H absorbance i5 1: 24 which suqgests that 23 the polymer consists of approximately 30% [EtSiHNH] units 24 and the rest are [Et(NH2)SiNH] and [Et(NH)o.sSiNH]).

26 I.R. (cm-1, CH2Cl2), Si-NH-Si (3385, 1170, 27 950); Si-NH2 (1545); Si-H (2108); Si-Et [1235, 1012).

28 29 3l 32 33 34 36 37 ~!13~ -- 19 - ~10 ~ 3 1,1,3,3 tetramethyldisiloxane ~5.36 g, 40 mmol 4 (HMe2Si)20) and Ru3(CO)12 (32 mg, 50 ~mmol) are heated at 60c under NH3 ~150 psi). The pressure 6 produced in the reactor is released and the reactor is 7 recharged with NH3 several times. 80% of the disiloxane 8 is converted after 1.5 hoursO The reaction is heated 9 continuously for 20 hours.

ll GC MS analysis indicates the following pattern:

12 13 A = -[Me2sioMe2siNH]n- (n = 2-5) 14 B - H [Me2SiOMe2SiNH]~ SiMe2OSiMe2H l~ (n = 1-6) 17 1~ 19 A 70% yield is obtained after high vacuum distillation (180C/0.5 mm). A2 is isolated as solid (white 21 crystals, mp. 37, a single NMR absorbtion at 0.12 ppm.

22 The residue is a viscous oil with Mn = 5690 daltons.

23 24 Elemental analysis:

%C %H %N S O 26 27 Polymer B 32.658.849.5238.10 10.88 28 Found 32.679.108.5641.89 7.02 29 This is an example of preparing a polysiloxazane 31 3332 ~O-Si- N - Sl~ 34 R H R . _ n 36 37 and these polysiloxazanes are believed to be novel ~3~ ~ 20 1 compositions of matter. R may be hydrogen or an organic 2 group (defined as above followin~ Table 3 ) .

The nitrogen 3 may be substituted, e.g. by an organic group R. The 4 subscxipt n may have various values, 6 Example 11 Reaction of O tamethylc~clotetras_lazan 8 Octamethylcyclotetrasilazane, re~erred to as 1, 9 was reacted under various conditions with (~) and without 10 (-) [ (CH3)3Si]2NH and with various catalystsO 11 Results are set forth in Table 9.

12 13 14 16 17 18 19 2~ 21 22 23 24 ;

26 27 28 29 31 32 33 34 36 37 ~3~77~ -- 21 - . ~ ~ o 3 co co u~ 1~ O O r- Ul ~ ~ ~:

~ ~ ~ ~ S ~ o ~ ~ ~ ~ U~~ o O_ ~ 3 ~ ~ N ~~ ~ ~ U ~ ~ ~ C~~ o C: U C U~ ~ ~ .~ :E: ~ ~ ~o 3 a~ o~D I a~ 0 c ,~ ~n O ~o S 3 :~ ~ C .

~ ~ ~ '~ O C ~ r .C U a ~ ~ ~ o ~ ~ _, C o o z l c ~ ~ c u~ 0 a~ ~ c c c .q 3 ~ 0 0 0 r I I + I ~ ~ + o u~ :C l ~ U ~ C ~ ~ O ~ E3 0 _~ 0 ~ ~ o ~ C ~ S 0~ ~rl ~ ~ ~ 0 ~ E~ CS~ o SU JJ ~ ~ . C o ~3 S ,C _~ ~ ~ Co J~ O O~ UE~ 3 0 O O ~ O ~ 0 ~ @u~ C Z O u~ u~ ~ ~ ~ ~ 1~ ~ _I C ~1 o JJ ~ ~ ~ O a) ,~ ~ 4 ~ S~ ~ ~n s: S ~ o ~ ,~ o ~ ~ o~ ~ _ ~Y; 0 ~ U 2~ 2 In the Ru3(CO)12 and H2SO~ catalysis ~he 3 conversion of 1 was higher in the absence of 4 ~(CH3)3Si]~NH although, in all three catalytic S methods, the total weight of polymers obtained is greater 6 when [(CH3)3Si]2NH is added. one must consider the 7 fact that the catalys~ also attacks the disilazane Si N 8 bonds, so the total turnover number for breaking these g bonds is greater when [ICH3)3Si]2NH is used.

11 The average molecular weight analyses show ~ha~in 12 spite of the higher yield of polymers thexe is a decrease 13 in the molecular weight when the capping agent is used.

14 This process can be improved by using higher ratios of 1 to [(cH3)3si]2NH~ 16 17 The above results strongly suggest that the 18 catalytic reaction approaches an equilibrium. When the 19 reaction, catalyzed by H2SO4, is run until an equilibrium is achieved and then another equivalent of acid 21 is added, no further reaction is observed.

22 23 The volatile oligomers fractions isolated by 24 distillation, when reacted again with the catalyst, produced additional amounts of polymers. The same series 26 of reactions shown in Table 9 are run with 27 hexamethylcyclotrisilazane (2) instead of 1 as the starting 28 material. All o them are reactive, producing the same 29 oligomers and polymers, including 1. That is to say, an equilibrium results and selective separation of products 31 from the equilibrium mixture can be carried out. For 32 example the 1 _ ~ 2 equilibrium mixture may be distilled, 33 thereby removing the lower boiling components including 2 34 and driving the reaction to the right.

36 37 ~31~77~ - 23 GC-MS Analysis Identification of polymer types produced in the rea~ions deacri~d in T~bl~ ~, w~r~ p~r~orm~d by GC-M~.

This method is limited to polymers with molecular weights less than 1000. We have observed typès A and B in reaction ~1). B is the major product in run 4 ~n = 1-8) and A [-Me2SiNH~]n Me3SiNH~Me2SiNH]n-SiMe3 A B appears in small quantities (n = 3-7). Another set of polymers observed in even smaller quantities are C (n + n' = 2.7) and D (n + n' + n" + n"l = 2-6). C and D are crosslinked through nitrogen groups.

[ SiNH] n-'~si-[SiNH]n-SiN-[SiNH]n---Si_ N--[SiNH]n Si ~ Si-[NHSi]n--N _Si-[NHSi C D In the above, Si signi~ies -SiMe2- and Si_ signifies -SiMe3. In run 3 because of the high molecular weight no significant products could be detected by the GC-MS. Most likely there are more crosslinks from this run which also explains the high molecular weight. Run 6 shows the same types as the parallel reaotion with Ru3(CO12) but the quantities o~ C and D are larger. The Pt/C catalysis without the capping agent gives series A and other quantitive series E, F that indicate bi- and tri-cyclo crosslinked compounds.

..

~3~77~ - 24 2 rSi- [ NHSi ] n 3 N-Si- ~ NHSi ~ N Lsi_ [NHSi~ 6 E g F contains another ~ing- In E, ntotal (iOe- n + ~ ~ n ) = 5-~; in F, n~otal = ~~9 11 12 13 The polymers produced by H2S04 catalysis contains types 14 A (n = 5,6), B (n = 2-8; major products), and C(n = 2-5) in run 2 and A (n = 5-9) in run 4. In both cases the GC-MS l~ analyses show an amount of oxygenated products in which 17 oxygen replaced amine groups.

18 l9 Example 12 21 To 1.8 gr polydimethylsilylhydrazine 22 ~Me25iNHNH]x prepared as follows:

23 24 (CH3)2SiC12 + NH2NH2 ~ (CH3)2 SiNHNH]n + NH2NH3Cl 26 (average MW 1130) dissolved in 5 ml of toluene are added 27 25 ~mol of Ru3(CO)12 and the solution is heated at 28 135C under hydrogen. The clear solution turns cloudy 29 and viscous (at room temperature). 1.3 g of a soft solid product is obtained after distillation of the volatile 31 products and solvent at 180/0.3 mm Hg. The solid has a 32 Wt average MW 1220 and starts to soften at 60C. The 33 same treatment for the starking material in the absence of 34 catalyst gives a slightly cloudy solution at room temperature (clear during heating). The Wt average MW 36 decreases to 612~ The product is a solid after 37 distillation and does not soften up to 250C.

774 1 ExamPle 13 3 Octamethylcyclotetra~ila~ane 1 is reacted with 4 ~(CH3)3Si]2NH in the presence of various catalysts.

The reaction conditions, catalysts and results are set 6 ~or~h in Table 10.

11 12 13 14 16 17 1~ 19 21 22 23 24 26 27 28 ~9 31 32 33 34 36 37 77~ -- 26 ~ 2 TABLE 10 4 Deco~pos i t ion 5 Run Catalyst Temp (C) Time (h) Conversion (~) of Catalyst 7 1 RU3(C0)12 135 6 22 8 8 2 ~U3(C0)12 180 15 80 m 9 3 Ru3(C0)12/H2 135 1 78 -10 4 Ru3(C0)12/H20 135 3 33 5 11 5 ~u3(C0)12/Fe(CO)s 1~ 6 26 12 6 Ru3(C0)12/Fe3(C0)12 135 3 80 8 13 7 Fe3(C0)12 135 14 8 Fe3(C0)12H2 135 3 80 f 15 9 OB3(CO)12 135 ~ 1610 83(C)12 180 20 78 __ 1711 Os3(C0) 12/H2 135 6 73 __ 1812 H2093(CO)lo 135 3 78 __ 1913 Bh6(CO)16 135 20 55 g 2014 Rh6(C0)16/H2 135 3 78 g 2115 Ir4(Co)l2 135 -~ 2216 Ir4(Co)l2 180 15 70 m 2317 Ir4(co)l2/H2 135 3 t 76 f 2418 Pt/C 135 3 75 __ 2519 PtO2 180 15 25 __ 2620 Pd/C 135 3 78 __ 27 28 29 31 32 33 34 36 37 ~.3~77~L - 27 2 Comments on Table 10 are as follows: The molar 3 ratio of 9, the silazane ~(C~3)3Si]2NH and catalyst 4 was 250:84:1. The reaction was carried out under hydrogen where indicated, as in Run No, 3, or water in Run No. 4, 6 otherwise under nitrogen. The hydrogen was at 1 atmosphere 7 pressure. The time figures indicate the shor est time in 8 which there was no further conversion of 1. ~utyl ether 9 was used as an internal standard for gas chromatographlc analysis. In the decomposition o~ catalyst column, "s" ll means slow, "m" means moderate and ll~il means fastO In Run 12 No. 4 the ratio of Ru3(CO)12 to H2O was 1:220 In Run 13 No. 18, 200 mg of 5% Pt/C are used and in Run NoO 20, 150 14 mg of 5% Pd/C are used with 4.15 grams of 1.

16 It will be seen that in the presence of hydrogen 17 (Runs No. 3, 8, 11, 14 and 17) the reaction was much faster 18 and gave significantly higher yields than in comparable 19 runs with nitrogen.

The mixed catalyst in Run No. 6 resulted in a fast reaction and a high yield even in the 21 absence of hydrogen. In Run No. 12 a nitrogen atmosphere 22 is used. The reaction rate and yield are comparable to Run 23 No. 11 where a hydrogen atmosphere is used, because of the 24 presence of hydrogen in the complex. In Runs Nos. 7, 9 and 15 no appreciable reaction occurred.

26 27 28 29 31 32 33 34 36 37 ~3~ - 28 2 ~mE~ Reaction of Hexamet_y~cyclotrisilazane 3 ~l~r_A~ 9~ y~ A reactox loaded with hexamethylcyclotrisilazane, 6 2, ~4.4 g) and Ru3lCO)12 (16 mg) is pressurized with 7 NH3 (150 psi) and H2 (150 psi~, then heated at 135C 8 for 18 hours. The cyclotrimer is converted in 84% yield to 9 form two major series of products-cyclomers IA; n = 4-13) and branched c~clomers 11 (B; n~ 6) analyzed by GC-MS.

12 13 14 SiMe 2 67 4Me2SiNH ~ HIN ~--~e2SiNH ~ H 18 Me2S ~ /SiMe2 19 H A 21 22 23 24 26 Example 15 Co~olymerization of Phenylsllane and 27 1!1,3,3,-tetramethYldisilazane 28 29 To a mixture of phenylsilane (4.32 g, 40 mmol) and 1,1,3,3,tetramethyldisilazane (5.32 g, 40 mmol) is added 31 Ru3(CO)12 (16 mg, 25 ~mol).

The solution is heated at 32 60 under 150 psi of ammonia.

After 5 h, the GC shows 33 high boiling products and the loss of 95% of the starting 34 materials. After 8 hours the reaction temperature is increased to 90C and after another 2 hours to 135C.

36 The reaction run for 30 hours. The final result i5 a 37 viscous oil consisting o a mixture of products. very 7~ ~ 29 1 little comes off the gc at this point which indicates high 2 molecular weight products. Evaporation of the remaining 3 volatile products (230/2 mm) laaves a waxy residue. IR, 4 NM~ and GC/MS of this product are taken to examine the copolymerization between the two startiIlg substrates. An 6 Si-H bond appears clearly in the IR spectxum but it cannot 7 be observed in the NMR spectrum which is analytically less 8 sensitive. The elemen~al analysis and the NMR integration 9 suggest that the copolymer contains the following average 10 structure.

11 12 [PhSiHNH]1.3[Me2~iNH~2 13 x 14 Elemental analysis:

1~ 17 C H N =S 18 19 Calculated for X:46.69 7.61 15.23 30.44 Found : 46.45 7.05 15.91 30.88 21 22 ExamPle 16 Reaction Between Hexamethylcyclotrisilazane 23 and DiethYlsilane 24 15 mg (25 ~mol) of Ru3(CO)12 are added to 2.19 26 g (10 mmol) of hexamethylcyclotrisilane l-[Me2SiNH]3-) 27 and 0.88 g (10 mmol) of diethylsilane (Et2Si~2) and the 28 solution is heated at 135C for 20 h.

29 N-diethylsilane-hexamethylcyclotrisilazane 31 Me2Si 32 33 HN N-SiHEt2 34 1 l Me2Si SiMe2 36 37 HN _ 30 1 is the major product (3.7 mmol) identified by GC-MS and 2 NMR. Other minor products are (HEt2Si)2NH and 3 N-dimethylsilane-hexamethylcyclotrisilazane. A residue of 4 28% yield remains after evaporation at 180C ~0.5 mm).

The N-diethylsilyl-cyclotrisilazane is isolated by 6 distillation and identified by ~C-MS and NMR.

8 ExamplQ 17 ~ 9~ ~3~ 9 Hexamethylcyclotrisilazane with Ammonia 11 To 4.39 gr of 4Me5iH-NMe ~ are added 16 mg of 12 Ru3(CO)12 and the solution is heated under 150 psi of 13 ammonia at 60C~ The reactant disappears after 5 hours.

14 The reactor is again charged with ammonia and heated again at 90 for 33 hours. The product is a viscous oil having 16 Mn = 691 which giv~s 57% yield of ceramic material. GC-MS 17 analysis of the oligomeric fraction indicates the 18 substitution of Si-H groups by Si-NH groups together the 19 substitution of N-Me groups by N-H in the cyclomeric structure.

21 22 Example 18 Polymerizatlon of TetramethYldisilazane 23 in the Presence of Ammonia 24 (a) To 100.0 mmol of TMDS (13.3 g) are added 26 50.0 ~mol of Ru3(CO)12 (32.0 mg) and the solution is 27 heated under ammonia under various reaction conditions as 28 noted in Table 11. The volatile oligomers were separated 29 from the solution by vacuum distillation (up to 180/300 ~). The residue i~ the nonvolatile fraction.

31 32 Our initial evaluation of this reaction, using 33 either the homogeneous ruthenium catalyst or activated Pt/C 34 gives cyclomers (n=3-7), linear oligomers, n=2 11), and very small amounts of branched oligomers, (n=1-7 <5%) as 36 evidenced by the GC-MS analyses.

37 ~0~7~7 r~ , o ,;,. ,~ ~i ).~ ~ ~a o o ~ 8 ~ o~ u~ o',,`l a ~ æc _ o ¦ ~ o ,~ U h C ~ Z ~ ,~, ~ oO ~o o ~ ' '' ,.

C ~u~Q a ~ $ ~ ~ ~ 0 ~ ~ O C 0~^1 ~.~ 0 . 8 a) ~.

o ~ ~ o . ~ U~ _ a u, p ~ ~ ~ .3 --' ~ ~ a~ aJ - 32 ~ 1 GENERAL DISCUSSION 3 It will ~e apparent that two general types of 4 reaction occur. In type (a) (cleavage of an Si-N bond, S 111ustrated by Examples 11-14~ a rin~ is opened a~ an Si-N 6 group to separate he silicon and nitro~en (or an open 7 chain is cleaved at an Si-N group) and the resulting 8 ~ragment or fragmen~s react with one another and/or with a 9 reactant such as ammonia, an amine, hydrogen, etc. The immediate reac~ion products will underso further reaction, 11 which may comprise the second ~ype of reaction tsee below)~ 12 13 In type (b) re~ction (reaction of Si-H with a 14 nitrogen compound HNRR~ a compound Si-NRR results as the immediate product and will undergo further reaction with 1~ SiH or with the products of reaction or with an added 17 reactant. The R~s, which may be the same or diff2rent and 18 which may be parts of a cyclic structure, are as defined 19 above.

21 In the type ~b) r@action the Si-H reactant may be 22 silane itself, SiH4. Also in the type (b) reaction where 23 the silazane 24 R R- Nl-Si-H 26 H R 27 28 is reacted with H2NR the disilazane 29 31 RN -Si-N- R 32 H R H 33 34 which is a new compound, results (R deined as above).

Where TMDS is reacted with ammonia the resulting product is 36 37 i =33 - 130~ 2 ~Sl-N ~ 3 L~ 4 x 6 where x is greater than unityO The product is a mixture.

8 It will be apparent that cleavage of an Si-N group 9 or reaction of Si-H with H-N usually leads to successive reactions which may be cleavage [type (a)] or Si-H + H-N 11 [type (b)] reactions or a mix of both types of reactions.

12 It should also be noted that Si-Si bonds are cleaved under 13 many of the reaction conditions d~scribed above resulting 14 in Si-H groups which undergo reaction with H-N groups.

16 It will therefore be apparent that ~ew and useful 17 methods of preparing oligomers and polymers having Si-N 18 groups have been provided as have new and useful 19 compositions of matter.

21 22 23 24 26 27 28 29 33l 32 33 34 36 37