ATE516617T1

Laser sensor for self-mixing interferometry with increased detection range

Abstract

The present invention relates to a laser sensor for self-mixing interferometry. The laser sensor comprises at least one semiconductor laser light source emitting laser radiation and at least one photodetector (6) monitoring the laser radiation of the laser light source. The laser light source is a VECSEL having a gain medium (3) arranged in a layer structure (15) on a front side of a first end mirror (4), said first end mirror (4) forming an external cavity with an external second end mirror (5). The proposed laser sensor provides an increased detection range and can be manufactured in a low-cost production process.

Term

Projected expiry 29 April 2028.

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15 members in 6 offices

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Priority claims
DocumentOfficeKindDate
07107653European Patent Office (EPO)A
2008051648International Bureau of the World Intellectual Property Organization (WIPO)W

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WO2008135903A2World Intellectual Property Organization (WIPO)A2
WO2008135903A3World Intellectual Property Organization (WIPO)A3
EP2147489A2European Patent Office (EPO)A2
CN101682169AChinaA
US2010134803A1United States of AmericaA1
JP2010526315AJapanA
EP2147489B1European Patent Office (EPO)B1
AT516617TAustriaT
ATE516617T1This recordAustriaT1
CN103840369AChinaA
JP5685438B2JapanB2
US9397476B2United States of AmericaB2
US2016290785A1United States of AmericaA1
CN103840369BChinaB
US10502547B2United States of AmericaB2