ATE477589T1
A method of producing a substrate by transferring a donor wafer comprising foreign species, and an associated donor wafer
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 7 October 2023, 3 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
16 members in 6 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 0212405 | France | A |
Members16
| Document | Office | Kind | |
|---|---|---|---|
| FR2845523A1 | France | A1 | |
| EP1408545A2 | European Patent Office (EPO) | A2 | |
| JP2004179630A | Japan | A | |
| US2004121558A1 | United States of America | A1 | |
| EP1408545A3 | European Patent Office (EPO) | A3 | |
| FR2845523B1 | France | B1 | |
| US7008859B2 | United States of America | B2 | |
| US2006060922A1 | United States of America | A1 | |
| US2008248631A1 | United States of America | A1 | |
| US7535115B2 | United States of America | B2 | |
| US7645684B2 | United States of America | B2 | |
| EP1408545B1 | European Patent Office (EPO) | B1 | |
| AT477589T | Austria | T | |
| ATE477589T1This record | Austria | T1 | |
| DE60333712D1 | Germany | D1 | |
| JP4854921B2 | Japan | B2 |
Numbers
- Application
- 3292465
Titles2
- English
- METHOD FOR PRODUCING A SUBSTRATE BY TRANSFERRING A DONOR WAFER WITH FOREIGN ATOMS, AND A CORRESPONDING DONOR WAFER
- German
- VERFAHREN ZUR HERSTELLUNG EINES SUBSTRATS DURCH DEN TRANSFER EINES GEBER-WAFERS MIT FREMDATOMEN, UND EIN ENTSPRECHENDER GEBER-WAFER
Classification
- CPC, 4
- H10P90/1916
- H10P32/14
- H10P32/174
- H10W10/181
- IPC, 3
- H10P95 00
- H01L27 12
- H10P32 14