ATE454483T1
Atomic layer deposition using metal amidinates
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 14 November 2023, 2.9 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
3 priority claims, no other members on record
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 42697502 | United States of America | P | |
| 46336503 | United States of America | P | |
| 0336568 | United States of America | W |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 3783541
Titles2
- German
- ATOMLAGENABSCHEIDUNG (ALD) MIT HILFE VON METALLAMIDINATEN
- English
- ATOMIC LAYER DEPOSITION (ALD) USING METAL AMIDINATES
Classification
- CPC, 11
- C23C16/404
- C23C16/06
- C07C257/14
- C23C16/18
- C23C16/40
- C23C16/403
- C23C16/406
- C23C16/45553
- C23C16/45525
- C07C237/00
- C07F19/00
- IPC, 4
- C23C16 18
- C23C16 40
- C23C16 44
- C23C16 455