ATE445141T1
Method for controlling a recess etch process
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 12 August 2023, 3.1 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
47 members in 10 offices
Priority claims6
| Document | Office | Kind | Date |
|---|---|---|---|
| 40321302 | United States of America | P | |
| 40861902 | United States of America | P | |
| 28640902 | United States of America | A | |
| 28641002 | United States of America | A | |
| 40111803 | United States of America | A | |
| 0325156 | United States of America | W |
Members47
| Document | Office | Kind | |
|---|---|---|---|
| US2004032592A1 | United States of America | A1 | |
| US2004032593A1 | United States of America | A1 | |
| WO2004015364A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO2004015365A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO2004015727A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU2003255272A1 | Australia | A1 | |
| AU2003255273A1 | Australia | A1 | |
| AU2003255273A8 | Australia | A8 | |
| AU2003258170A1 | Australia | A1 | |
| TW200403785A | Taiwan Province of China | A | |
| TW200405011A | Taiwan Province of China | A | |
| TW200405501A | Taiwan Province of China | A | |
| WO2004015727A3 | World Intellectual Property Organization (WIPO) | A3 | |
| US2004087041A1 | United States of America | A1 | |
| KR20050028057A | Republic of Korea | A | |
| EP1529193A2 | European Patent Office (EPO) | A2 | |
| KR20050047097A | Republic of Korea | A | |
| KR20050047098A | Republic of Korea | A | |
| EP1546649A1 | European Patent Office (EPO) | A1 | |
| EP1546650A1 | European Patent Office (EPO) | A1 | |
| CN1675516A | China | A | |
| CN1675517A | China | A | |
| CN1675518A | China | A | |
| JP2005536074A | Japan | A | |
| JP2005536075A | Japan | A | |
| JP2005536076A | Japan | A | |
| US6979578B2 | United States of America | B2 | |
| US2006035395A1 | United States of America | A1 | |
| US7019844B2 | United States of America | B2 | |
| TWI276802B | Taiwan Province of China | B | |
| CN100353140C | China | C | |
| CN100370221C | China | C | |
| CN100376864C | China | C | |
| US7399711B2 | United States of America | B2 | |
| CN101221917A | China | A | |
| TWI303090B | Taiwan Province of China | B | |
| US7531369B2 | United States of America | B2 | |
| TWI314762B | Taiwan Province of China | B | |
| EP1529193B1 | European Patent Office (EPO) | B1 | |
| AT445141T | Austria | T | |
| ATE445141T1This record | Austria | T1 | |
| DE60329602D1 | Germany | D1 | |
| CN100595899C | China | C | |
| JP4679364B2 | Japan | B2 | |
| JP4679365B2 | Japan | B2 | |
| JP4841953B2 | Japan | B2 | |
| EP1546650B1 | European Patent Office (EPO) | B1 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 3785204
Titles2
- English
- METHOD FOR CONTROLLING A TRENCH ETCHING PROCESS
- German
- VERFAHREN ZUR STEUERUNG EINES GRABENÄTZPROZESSES
Classification
- CPC, 6
- G01B11/0683
- H10P74/00
- G01B11/0616
- G01B11/0625
- H10B12/0387
- H10D1/047
- IPC, 9
- G01B11 02
- G01B11 06
- G01N21 00
- G01N21 27
- G01N21 45
- H01L21 027
- H01L21 3065
- H01L21 334
- H10B12 00