ATE154167T1
Method and apparatus for eliminating short circuit portions in semiconductor elements
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 30 June 2013, 13.2 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
13 members in 7 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 19782892 | Japan | A |
Members13
| Document | Office | Kind | |
|---|---|---|---|
| EP0577108A1 | European Patent Office (EPO) | A1 | |
| AU4161093A | Australia | A | |
| JPH0621493A | Japan | A | |
| KR940006294A | Republic of Korea | A | |
| AU667718B2 | Australia | B2 | |
| KR970005153B1 | Republic of Korea | B1 | |
| EP0577108B1 | European Patent Office (EPO) | B1 | |
| AT154167T | Austria | T | |
| ATE154167T1This record | Austria | T1 | |
| DE69311209D1 | Germany | D1 | |
| JP2686022B2 | Japan | B2 | |
| DE69311209T2 | Germany | T2 | |
| US6132585A | United States of America | A |
Numbers
- Application
- 93110466
Titles2
- English
- METHOD AND DEVICE FOR CORRECTING SHORT-CIRCUIT AREAS IN SEMICONDUCTOR ELEMENTS
- German
- VERFAHREN UND VORRICHTUNG ZUM BEHEBEN VON KURZSCHLUSSBEREICHEN IN HALBLEITERELEMENTEN
Classification
- CPC, 8
- H10F71/10
- H10F71/135
- Y02E10/50
- Y10S136/29
- Y02P70/50
- H10F19/80
- H10F77/162
- H10F71/129
- IPC, 2
- H01L31 04
- H01L31 20