ATE115334T1
Polycrystalline cvd diamond substrate for single crystal epitaxial growth of semiconductors
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 25 January 2011, 15.7 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
12 members in 9 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 47948690 | United States of America | A |
Members12
| Document | Office | Kind | |
|---|---|---|---|
| US4981818A | United States of America | A | |
| CA2034361A1 | Canada | A1 | |
| IE910010A1 | Ireland | A1 | |
| EP0442304A2 | European Patent Office (EPO) | A2 | |
| KR910016056A | Republic of Korea | A | |
| EP0442304A3 | European Patent Office (EPO) | A3 | |
| ZA91697B | South Africa | B | |
| JPH05109625A | Japan | A | |
| EP0442304B1 | European Patent Office (EPO) | B1 | |
| AT115334T | Austria | T | |
| ATE115334T1This record | Austria | T1 | |
| DE69105537D1 | Germany | D1 |
Numbers
- Application
- 91100954
Titles2
- English
- POLYCRYSTALLINE CVD DIAMOND SUBSTRATE FOR EPITACTIC GROWTH OF SINGLE CRYSTAL SEMICONDUCTORS.
- German
- POLYKRISTALLINES CVD-DIAMANTSUBSTRAT FÜR EPITAKTISCHES AUFWACHSEN VON EINKRISTALLHALBLEITERN.
Classification
- CPC, 10
- C23C16/27
- H10P14/24
- C23C16/0272
- Y10S438/931
- Y10S148/135
- H10P14/3208
- H10P14/3406
- H10P14/2905
- H10P14/3421
- H10W40/254
- IPC, 7
- C30B29 04
- C23C16 02
- C23C16 26
- C23C16 27
- H01L21 20
- H01L21 205
- H10W40 25