AT96474T
Method of making tungsten-titanium sputtering targets.
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
13 members in 7 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 20034488 | United States of America | A |
Members13
| Document | Office | Kind | |
|---|---|---|---|
| US4838935A | United States of America | A | |
| EP0345045A1 | European Patent Office (EPO) | A1 | |
| KR890017387A | Republic of Korea | A | |
| JPH0277575A | Japan | A | |
| EP0345045B1 | European Patent Office (EPO) | B1 | |
| AT96474TThis record | Austria | T | |
| DE68910190D1 | Germany | D1 | |
| CA1325899C | Canada | C | |
| DE68910190T2 | Germany | T2 | |
| KR960011244B1 | Republic of Korea | B1 | |
| EP0345045B2 | European Patent Office (EPO) | B2 | |
| DE68910190T3 | Germany | T3 | |
| JP3103359B2 | Japan | B2 |
Numbers
- Application
- 89305490
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG VON SPUTTERTARGETS AUS WOLFRAM-TITAN.
- English
- PROCESS FOR PREPARING SPRING TARGETS FROM TUNGSTEN TITANIUM.
Classification
- IPC, 4
- B22F3 00
- B22F5 00
- C22C1 04
- C23C14 34