AT61176T

Integrated circuit unit for the production of integrated circuits

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
  4. Today

8 members in 5 offices

This recordMember, by publication datePriority claim

Priority claims1

Priority claims
DocumentOfficeKindDate
3543471GermanyA

Members8

Family members, oldest first
DocumentOfficeKind
JPS62139412AJapanA
EP0231434A1European Patent Office (EPO)A1
US4818902AUnited States of AmericaA
JPH0258810B2JapanB2
EP0231434B1European Patent Office (EPO)B1
AT61176TThis recordAustriaT
DE3677752D1GermanyD1
DE3543471C1GermanyC1