AT56275T
Device for the inspection of wafers.
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
8 members in 5 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 3422143 | Germany | A |
Members8
| Document | Office | Kind | |
|---|---|---|---|
| DE3422143A1 | Germany | A1 | |
| EP0168643A2 | European Patent Office (EPO) | A2 | |
| JPS6188107A | Japan | A | |
| EP0168643A3 | European Patent Office (EPO) | A3 | |
| US4732473A | United States of America | A | |
| EP0168643B1 | European Patent Office (EPO) | B1 | |
| AT56275TThis record | Austria | T | |
| DE3579518D1 | Germany | D1 |
Numbers
- Application
- 85107360
Titles2
- German
- GERAET ZUR WAFER-INSPEKTION.
- English
- DEVICE FOR WAFER INSPECTION.
Classification
- CPC, 3
- G03F7/70641
- G01N21/9501
- G02B21/002
- IPC, 13
- G01B11 00
- G01B11 24
- G01N21 64
- G01N21 88
- G01N21 93
- G01N21 94
- G01N21 95
- G01N21 956
- G01R31 26
- G02B21 00
- G02B26 10
- G03F7 20
- H01L21 66