Plasma supply device

Plasma supply device for generating an output power> 500 W at a substantially constant fundamental frequency> 3 MHz and for supplying power to a plasma process, at which the generated output power is supplied and from which reflected power returned to the plasma supply device, comprising: at least one of a DC power supply connected inverter, wherein the at least inverter having at least one switching element, and at least one with the at least one inverter electrically connected output network, wherein the at least one output network, at least one inductor with at least one magnetic field strengthening element and the output network has at least two magnetic field strengthening elements of U-shaped body which is substantially identical U-shaped cross-sections and different lengths have to thereby adjust the inductance of the inductor.