AT544725T
Method of making a microsensor
Abstract
This record has no abstract on file.
Term
Term ended
Expired 6 March 2026, 0.6 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
1 priority claim, no other members on record
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 8142205 | United States of America | A |
Numbers
- Application
- 6075521
Titles2
- German
- VERFAHREN ZUM HERSTELLEN EINES MIKROSENSORS
- English
- METHOD FOR PRODUCING A MICROSENSOR
Classification
- CPC, 7
- B81C1/00047
- B81B2201/0235
- B81B2203/033
- G01P15/0802
- G01P15/125
- G01P15/18
- G01P2015/082
- IPC, 4
- B81B3 00
- G01P15 08
- G01P15 125
- G01P15 18