A semiconductor materials inspection system

The high light source by such as and LED light emitting diode or VCSEL a conducting light source on the dense substrate is a micro-array, a to obtain at least 50 milliwatts/square lower power output density. The semiconductor usually device and substrate is the electric heat conducting is a clutch in energy, and a power source drive of a liquid is controlled. The optical element is placed on the micro-array, to obtain improved direct property and part of the output beam; and/or spectrum purity. The illumination module of in such a fluorescent, the detection, and measuring, photopolymerization, ionization, antiseptic, residuum elimination, and a collecting) and are processed.