Method for manufacturing a free-standing substrate made of monocrystalline semi-conductor material
Abstract
The invention relates to a method for producing a method for non-support substrate monocrystal semiconductor material prepared from. The using the following step, comprising: A degeneration and contact surface method of between two of; and (5,5 ') and a thin layer nano-particle to the strutting (7); On the coring layer, wherein the method of growing epitaxial, which is a purpose for composing to the substrate the matrix layer material (10), the time for tundish which does not need to the bracket; and holding of sintering the contact surface (9) is; andThe thick layer (10) and support material (7) of polyimide, and wherein each other, different from the reacting in the time assembly (7), a stress with a rough is layer (10) polyimide is coefficient of the support material, different and nucleating process (5,5 ') and single crystal in the layer (10) from, wherein the adhesive and contacting surface (9) and strutting (7) is removed.
Term
Term ended
Expired 21 January 2023, 3.7 years ago.
- Priority
- Filed
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Every citation, both ways
| Document | Relation | Office | Cited during |
|---|---|---|---|
| US9082948B2 | Cited by | United States of America | Applicant |
| US8436363B2 | Cited by | United States of America | Applicant |
| US9142412B2 | Cited by | United States of America | Applicant |
| US8916483B2 | Cited by | United States of America | Applicant |
| US9716148B2 | Cited by | United States of America | Applicant |
| US9202741B2 | Cited by | United States of America | Applicant |
49 members in 10 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 0200762 | France | A | |
| 0300693 | European Patent Office (EPO) | W |
Members49
| Document | Office | Kind | |
|---|---|---|---|
| WO0243124A2 | World Intellectual Property Organization (WIPO) | A2 | |
| FR2817395A1 | France | A1 | |
| AU2203702A | Australia | A | |
| WO0243124A3 | World Intellectual Property Organization (WIPO) | A3 | |
| KR20030059281A | Republic of Korea | A | |
| FR2835096A1 | France | A1 | |
| WO03062507A2 | World Intellectual Property Organization (WIPO) | A2 | |
| EP1338030A2 | European Patent Office (EPO) | A2 | |
| TW554452B | Taiwan Province of China | B | |
| FR2817395B1 | France | B1 | |
| US2003219959A1 | United States of America | A1 | |
| WO03062507A3 | World Intellectual Property Organization (WIPO) | A3 | |
| US2004023468A1 | United States of America | A1 | |
| TW200409837A | Taiwan Province of China | A | |
| JP2004519093A | Japan | A | |
| KR20040077773A | Republic of Korea | A | |
| EP1468128A2 | European Patent Office (EPO) | A2 | |
| CN1541405A | China | A | |
| FR2835096B1 | France | B1 | |
| US6867067B2 | United States of America | B2 | |
| US2005101105A1 | United States of America | A1 | |
| JP2005515150A | Japan | A | |
| CN1636087A | China | A | |
| US6964914B2 | United States of America | B2 | |
| US2006035440A1 | United States of America | A1 | |
| US7071029B2 | United States of America | B2 | |
| TWI259221B | Taiwan Province of China | B | |
| US2006186397A1 | United States of America | A1 | |
| US2006189095A1 | United States of America | A1 | |
| KR100760066B1 | Republic of Korea | B1 | |
| CN100343424C | China | C | |
| KR100807447B1 | Republic of Korea | B1 | |
| US7407869B2 | United States of America | B2 | |
| US7422957B2 | United States of America | B2 | |
| US2008248251A1 | United States of America | A1 | |
| US2008293185A1 | United States of America | A1 | |
| US2008293217A1 | United States of America | A1 | |
| CN100442439C | China | C | |
| US7465991B2 | United States of America | B2 | |
| US7622330B2 | United States of America | B2 | |
| US7655537B2 | United States of America | B2 | |
| US7741678B2 | United States of America | B2 | |
| EP1338030B1 | European Patent Office (EPO) | B1 | |
| AT514180T | Austria | T | |
| ATE514180T1 | Austria | T1 | |
| EP1468128B1 | European Patent Office (EPO) | B1 | |
| AT534759TThis record | Austria | T | |
| ATE534759T1 | Austria | T1 | |
| JP5051962B2 | Japan | B2 |
Numbers
- Application
- 3702513
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG EINES FREISTEHENDEN SUBSTRATES AUS MONOKRISTALLINEM HALBLEITERMATERIAL
- English
- METHOD FOR PRODUCING A FREE-STANDING SUBSTRATE FROM MONOCRYSTALLINE SEMICONDUCTOR MATERIAL
Classification
- CPC, 2
- H01L21/76254
- Y10S438/977
- IPC, 9
- C23C16 01
- C23C16 27
- C23C16 34
- C30B25 02
- C30B29 04
- C30B29 38
- C30B29 40
- H01L21 20
- H01L21 762