Method and apparatus to help promote contact of gas with vaporized material
Abstract
The present invention relates to a delivery means for vaporizing the source material, said apparatus comprising: a container having a container by one or more sidewalls defining an interior region; a plurality of channels, wherein said plurality of channels includes an inlet and an outlet, said inlet is provided for the carrier gas introduced into the vessel, the outlet is arranged for the delivery of gas from the vessel; tube, extending from one of said plurality of channels to the end; one or more holders, connection to said tube and located between the inlet and the outlet of said plurality of channels, wherein the one or more support having a surface, said surface being configured to support the source material and having a periphery and a plurality of extending through the surface path, wherein said one or more holders in contact with one or more of the interior region of the container sidewall heat.
Term
Term ended
Expired 1 June 2025, 1.3 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
2 priority claims, no other members on record
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 85850904 | United States of America | A | |
| 2005019138 | United States of America | W |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 5755344
Titles2
- German
- VERFAHREN UND VORRICHTUNG ZUR FÖRDERUNG DES KONTAKTS VON GAS MIT VERDAMPFTEM MATERIAL
- English
- METHOD AND DEVICE FOR PROMOTING CONTACT OF GAS WITH EVAPORATED MATERIAL
Classification
- CPC, 2
- C23C16/4481
- Y10S261/65
- IPC, 2
- B01F3 04
- C23C16 448