AT518972T
Silane composition, silicon film forming method and solar cell production method
Abstract
This record has no abstract on file.
Term
Term ended
Expired 13 August 2022, 4.1 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
18 members in 7 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 2001245947 | Japan | A | |
| 2001319304 | Japan | A | |
| 2001375992 | Japan | A |
Members18
| Document | Office | Kind | |
|---|---|---|---|
| EP1284306A2 | European Patent Office (EPO) | A2 | |
| KR20030015146A | Republic of Korea | A | |
| JP2003055556A | Japan | A | |
| US2003045632A1 | United States of America | A1 | |
| CN1407018A | China | A | |
| TW555690B | Taiwan Province of China | B | |
| EP1284306A3 | European Patent Office (EPO) | A3 | |
| US7067069B2 | United States of America | B2 | |
| KR20060090643A | Republic of Korea | A | |
| US2006185712A1 | United States of America | A1 | |
| KR100627203B1 | Republic of Korea | B1 | |
| KR100676341B1 | Republic of Korea | B1 | |
| US7173180B2 | United States of America | B2 | |
| CN100392008C | China | C | |
| JP4419357B2 | Japan | B2 | |
| EP1284306B1 | European Patent Office (EPO) | B1 | |
| AT518972TThis record | Austria | T | |
| ATE518972T1 | Austria | T1 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 2018077
Titles2
- German
- SILANZUSAMMENSETZUNG, VERFAHREN ZUM HERSTELLEN EINES SILIZIUMFILMS UND EINER SOLARZELLE
- English
- SILANE COMPOSITION, METHOD FOR PRODUCING A SILICON FILM AND A SOLAR CELL
Classification
- CPC, 10
- H01L31/1804
- C23C18/1212
- C23C18/122
- C23C18/1279
- C23C18/143
- C23C18/14
- H01L21/228
- Y02E10/547
- Y02P70/521
- Y02P70/50
- IPC, 5
- B05D7 00
- C07F7 21
- C23C18 12
- H01L31 028
- H01L31 18