AT514181T
Method for forming dielectric film
Abstract
This record has no abstract on file.
Term
Term ended
Expired 13 March 2021, 5.5 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
45 members in 8 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 2000115940 | Japan | A | |
| 0101966 | Japan | W |
Members45
| Document | Office | Kind | |
|---|---|---|---|
| WO0169665A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO0169673A1 | World Intellectual Property Organization (WIPO) | A1 | |
| US2002025691A1 | United States of America | A1 | |
| US2002040847A1 | United States of America | A1 | |
| TW498544B | Taiwan Province of China | B | |
| KR20020086638A | Republic of Korea | A | |
| EP1265276A1 | European Patent Office (EPO) | A1 | |
| EP1265279A1 | European Patent Office (EPO) | A1 | |
| KR20030009386A | Republic of Korea | A | |
| TW527683B | Taiwan Province of China | B | |
| US6551948B2 | United States of America | B2 | |
| US2003137007A1 | United States of America | A1 | |
| US2003148568A1 | United States of America | A1 | |
| US2003148629A1 | United States of America | A1 | |
| US6669825B2 | United States of America | B2 | |
| US2004121538A1 | United States of America | A1 | |
| US2004150031A1 | United States of America | A1 | |
| US2004152263A1 | United States of America | A1 | |
| US2004171216A1 | United States of America | A1 | |
| EP1265279A4 | European Patent Office (EPO) | A4 | |
| US6838394B2 | United States of America | B2 | |
| US6846753B2 | United States of America | B2 | |
| EP1265276A4 | European Patent Office (EPO) | A4 | |
| US6998354B2 | United States of America | B2 | |
| US6998355B2 | United States of America | B2 | |
| US7001855B2 | United States of America | B2 | |
| US7026681B2 | United States of America | B2 | |
| US7109083B2 | United States of America | B2 | |
| KR100760078B1 | Republic of Korea | B1 | |
| EP1912253A2 | European Patent Office (EPO) | A2 | |
| KR100833406B1 | Republic of Korea | B1 | |
| EP1265279B1 | European Patent Office (EPO) | B1 | |
| DE60140179D1 | Germany | D1 | |
| EP1912253A3 | European Patent Office (EPO) | A3 | |
| JP2011119747A | Japan | A | |
| EP1265276B1 | European Patent Office (EPO) | B1 | |
| AT514181TThis record | Austria | T | |
| ATE514181T1 | Austria | T1 | |
| JP2012089855A | Japan | A | |
| JP4966466B2 | Japan | B2 | |
| JP4987206B2 | Japan | B2 | |
| JP2013077823A | Japan | A | |
| JP2013239749A | Japan | A | |
| JP5386515B2 | Japan | B2 | |
| JP5479437B2 | Japan | B2 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 1912316
Titles2
- German
- VERFAHREN ZUR AUSBILDUNG EINES DIELEKTRISCHEN FILMS
- English
- METHOD FOR FORMING A DIELECTRIC FILM
Classification
- CPC, 23
- C23C8/02
- H01L21/31
- H01L21/31641
- C23C8/36
- H01L21/0217
- H01L21/02238
- H01L21/02247
- H01L21/02252
- H01L21/02323
- H01L21/02329
- H01L21/0234
- H01L21/3105
- H01L27/105
- H01L29/42324
- H10B41/40
- H10B41/49
- H10B69/00
- H10B41/30
- H01L21/3144
- H01L21/31662
- H01L21/31637
- H01L21/3185
- H01L21/31612
- IPC, 16
- H01L21 316
- C23C8 02
- C23C8 36
- H01L21 31
- H01L21 3105
- H01L21 314
- H01L21 318
- H01L21 336
- H01L21 8238
- H01L21 8247
- H01L27 105
- H01L27 115
- H01L29 423
- H01L29 78
- H01L29 788
- H01L29 792