AT512465T
Stressed semiconductor device structures having granular semiconductor material
Abstract
For manufacturing semiconductor structure, method comprises: Providing a substrate (1), a substrate (1) is providing electrode (6), a electrode (6) to form the groove (12), wherein the groove is provided with an opening; the groove is provided with a finely ground particles semiconductor material (17), cover of the opening is a located in the flute of the finely ground particles semiconductor material, and then annealing structure obtained.
Term
Term ended
Expired 9 November 2024, 1.9 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
18 members in 7 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 70701803 | United States of America | A | |
| 2004037434 | United States of America | W |
Members18
| Document | Office | Kind | |
|---|---|---|---|
| US2005106799A1 | United States of America | A1 | |
| WO2005050701A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO2005050701A8 | World Intellectual Property Organization (WIPO) | A8 | |
| WO2005050701A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP1683187A2 | European Patent Office (EPO) | A2 | |
| US7122849B2 | United States of America | B2 | |
| CN1879227A | China | A | |
| KR20070015499A | Republic of Korea | A | |
| JP2007511909A | Japan | A | |
| US2008064172A1 | United States of America | A1 | |
| EP1683187A4 | European Patent Office (EPO) | A4 | |
| US7488658B2 | United States of America | B2 | |
| CN100468785C | China | C | |
| KR100946038B1 | Republic of Korea | B1 | |
| EP1683187B1 | European Patent Office (EPO) | B1 | |
| AT512465TThis record | Austria | T | |
| ATE512465T1 | Austria | T1 | |
| JP4843498B2 | Japan | B2 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 4810633
Titles2
- German
- VERSPANNTE HALBLEITER-EINRICHTUNGSSTRUKTUREN MIT GRANULAREM HALBLEITERMATERIAL
- English
- TILTED SEMICONDUCTOR EQUIPMENT STRUCTURES WITH GRANULAR SEMICONDUCTOR MATERIAL
Classification
- CPC, 15
- H01L29/7845
- H01L21/26513
- H01L21/2658
- H01L21/28035
- H01L21/28167
- H01L21/28247
- H01L21/324
- H01L21/823807
- H01L21/823842
- H01L29/1083
- H01L29/4925
- H01L29/517
- H01L29/665
- H01L29/66545
- H01L29/6659
- IPC, 5
- H01L21 28
- H01L21 324
- H01L21 336
- H01L21 8238
- H01L29 49