AT493753T
Exposure apparatus, exposure method and device manufacturing method
Abstract
This record has no abstract on file.
Term
Term ended
Expired 27 January 2025, 1.7 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
3 priority claims, no other members on record
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 2004025837 | Japan | A | |
| 2004300566 | Japan | A | |
| 2005001076 | Japan | W |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 5704182
Titles2
- German
- BÜHNENANTRIEBSVERFAHREN UND BÜHNENANTRIEBSVORRICHTUNG, BELICHTUNGSVORRICHTUNG UND BAUELEMENTE-HERSTELLUNGSVERFAHREN
- English
- STAGE DRIVE AND STAGE DRIVE DEVICE, EXPOSURE DEVICE AND COMPONENT MANUFACTURING METHOD
Classification
- CPC, 15
- G03F7/70725
- H01L21/0275
- H01L21/0274
- G03F7/70833
- G03F7/70341
- G03F7/70733
- Y10T29/49155
- G03F7/2006
- G03F7/2026
- G03F7/2041
- G03F7/70666
- H01L21/0273
- G03F7/70258
- G03F7/70758
- G03F1/44
- IPC, 2
- H01L21 027
- G03F7 20