AT476534T
Method for preparing by thermal spraying a silicon- and zirconium-based target
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
2 priority claims, no other members on record
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 0550358 | France | A | |
| 2006050094 | France | W |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Publication of translation of european patent specificationUEP | UEP |
Numbers
- Application
- 6709475
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG EINES SILICIUM- UND ZIRCONIUMBASIERTEN TARGETS DURCH THERMISCHES SPRÜHEN
- English
- METHOD FOR PRODUCING A SILICON AND ZIRCONIUM BASED TARGET THROUGH THERMAL SPRAYING
Classification
- CPC, 7
- C23C14/3414
- H01J37/34
- H01J37/3429
- H01J37/3491
- Y02T50/67
- Y10T428/2982
- Y02T50/60
- IPC, 2
- C23C14 06
- C23C14 34