AT475862T
Apparatus and method for enhanced critical dimension scatterometry
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
30 members in 5 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 65671205 | United States of America | P | |
| 2006006449 | United States of America | W |
Members30
| Document | Office | Kind | |
|---|---|---|---|
| WO2006091781A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO2006091782A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO2006091783A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO2006091840A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO2006091859A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO2006091913A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO2006093800A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO2006091783B1 | World Intellectual Property Organization (WIPO) | B1 | |
| WO2006091840A3 | World Intellectual Property Organization (WIPO) | A3 | |
| US2006243912A1 | United States of America | A1 | |
| WO2006091781B1 | World Intellectual Property Organization (WIPO) | B1 | |
| WO2006091840B1 | World Intellectual Property Organization (WIPO) | B1 | |
| WO2006091782B1 | World Intellectual Property Organization (WIPO) | B1 | |
| US2006273263A1 | United States of America | A1 | |
| US2006278834A1 | United States of America | A1 | |
| US2006285110A1 | United States of America | A1 | |
| US2006285111A1 | United States of America | A1 | |
| US2006289788A1 | United States of America | A1 | |
| US2006289789A1 | United States of America | A1 | |
| US2006289790A1 | United States of America | A1 | |
| WO2006091840A9 | World Intellectual Property Organization (WIPO) | A9 | |
| WO2006093800A9 | World Intellectual Property Organization (WIPO) | A9 | |
| EP1864080A1 | European Patent Office (EPO) | A1 | |
| US7502101B2 | United States of America | B2 | |
| US7511293B2 | United States of America | B2 | |
| US7615752B2 | United States of America | B2 | |
| EP1864080B1 | European Patent Office (EPO) | B1 | |
| AT475862TThis record | Austria | T | |
| ATE475862T1 | Austria | T1 | |
| DE602006015785D1 | Germany | D1 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 6735920
Titles2
- German
- VORRICHTUNG UND VERFAHREN ZUR VERBESSERTEN CRITICAL-DIMENSION-SCATTEROMETRIE
- English
- DEVICE AND METHOD FOR IMPROVED CRITICAL-DIMENSION SCATTEROMETRY
Classification
- CPC, 11
- G01B11/0616
- G01B11/24
- G01B11/30
- G01N21/21
- G01N21/274
- G01N21/47
- G01N21/9501
- G01N21/956
- G01N23/2251
- G01N2021/4792
- G03F7/70625
- IPC, 2
- G01B11 06
- G01N21 47