AT458555T
Over-clocking in a microdeposition control system to improve resolution
Abstract
This record has no abstract on file.
Term
Term ended
Expired 31 May 2022, 4.3 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
98 members in 9 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 29510001 | United States of America | P | |
| 29511801 | United States of America | P | |
| 0217521 | United States of America | W |
Members98
| Document | Office | Kind | |
|---|---|---|---|
| WO02098573A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO02098574A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO02098575A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO02098576A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO02099848A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO02099849A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO02099850A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO02099851A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU2002314894A1 | Australia | A1 | |
| AU2002346735A1 | Australia | A1 | |
| AU2002346738A1 | Australia | A1 | |
| AU2002346740A1 | Australia | A1 | |
| WO02099850A3 | World Intellectual Property Organization (WIPO) | A3 | |
| WO02099848A3 | World Intellectual Property Organization (WIPO) | A3 | |
| WO02099851A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP1392449A1 | European Patent Office (EPO) | A1 | |
| KR20040024558A | Republic of Korea | A | |
| EP1399267A1 | European Patent Office (EPO) | A1 | |
| EP1399268A1 | European Patent Office (EPO) | A1 | |
| EP1399269A1 | European Patent Office (EPO) | A1 | |
| EP1399950A2 | European Patent Office (EPO) | A2 | |
| EP1399951A2 | European Patent Office (EPO) | A2 | |
| KR20040026659A | Republic of Korea | A | |
| KR20040029997A | Republic of Korea | A | |
| KR20040037027A | Republic of Korea | A | |
| KR20040037028A | Republic of Korea | A | |
| KR20040038914A | Republic of Korea | A | |
| KR20040038915A | Republic of Korea | A | |
| CN1512917A | China | A | |
| CN1512918A | China | A | |
| CN1512919A | China | A | |
| US2004173144A1 | United States of America | A1 | |
| JP2004528978A | Japan | A | |
| CN1535185A | China | A | |
| CN1535186A | China | A | |
| JP2004530550A | Japan | A | |
| JP2004533121A | Japan | A | |
| JP2004535287A | Japan | A | |
| US2004231593A1 | United States of America | A1 | |
| US2004231594A1 | United States of America | A1 | |
| US2004238522A1 | United States of America | A1 | |
| US2004261700A1 | United States of America | A1 | |
| US2005000422A1 | United States of America | A1 | |
| JP2005501691A | Japan | A | |
| JP2005502447A | Japan | A | |
| US2005016451A1 | United States of America | A1 | |
| JP2005515052A | Japan | A | |
| CN1630939A | China | A | |
| CN1635949A | China | A | |
| WO02099849A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP1392449A4 | European Patent Office (EPO) | A4 | |
| EP1399267A4 | European Patent Office (EPO) | A4 | |
| EP1399268A4 | European Patent Office (EPO) | A4 | |
| EP1399269A4 | European Patent Office (EPO) | A4 | |
| EP1399950A4 | European Patent Office (EPO) | A4 | |
| EP1399951A4 | European Patent Office (EPO) | A4 | |
| EP1569757A2 | European Patent Office (EPO) | A2 | |
| AU2002346738A8 | Australia | A8 | |
| CN1274425C | China | C | |
| CN1280025C | China | C | |
| US2006251796A1 | United States of America | A1 | |
| EP1569757A4 | European Patent Office (EPO) | A4 | |
| CN1285420C | China | C | |
| CN1289207C | China | C | |
| US7160105B2 | United States of America | B2 | |
| US7244310B2 | United States of America | B2 | |
| CN1329130C | China | C | |
| US7270712B2 | United States of America | B2 | |
| US7449070B2 | United States of America | B2 | |
| US2009029069A1 | United States of America | A1 | |
| KR100882520B1 | Republic of Korea | B1 | |
| JP2009113040A | Japan | A | |
| JP2009136871A | Japan | A | |
| KR100912008B1 | Republic of Korea | B1 | |
| JP4328614B2 | Japan | B2 | |
| KR20090106424A | Republic of Korea | A | |
| JP4342301B2 | Japan | B2 | |
| JP4342302B2 | Japan | B2 | |
| JP4342303B2 | Japan | B2 | |
| KR100924002B1 | Republic of Korea | B1 | |
| KR100938810B1 | Republic of Korea | B1 | |
| EP1392449B1 | European Patent Office (EPO) | B1 | |
| AT458555TThis record | Austria | T | |
| ATE458555T1 | Austria | T1 | |
| DE60235458D1 | Germany | D1 | |
| US7757632B2 | United States of America | B2 | |
| EP1399267B1 | European Patent Office (EPO) | B1 | |
| EP1399269B1 | European Patent Office (EPO) | B1 | |
| AT486662T | Austria | T | |
| AT486663T | Austria | T | |
| ATE486662T1 | Austria | T1 | |
| ATE486663T1 | Austria | T1 | |
| KR100998171B1 | Republic of Korea | B1 | |
| DE60238189D1 | Germany | D1 | |
| DE60238190D1 | Germany | D1 | |
| JP4880708B2 | Japan | B2 | |
| EP1399268B1 | European Patent Office (EPO) | B1 | |
| JP5145259B2 | Japan | B2 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 2739640
Titles2
- German
- ÜBERTAKTEN BEI EINEM MIKROABSCHEIDUNGSSTEUERSYSTEM ZUR VERBESSERUNG DER AUFLÖSUNG
- English
- TRANSACTIONS IN A MICROPRODUCTMENT CONTROL SYSTEM TO IMPROVE RESOLUTION
Classification
- CPC, 29
- H01L21/6715
- B25B11/005
- B29C64/112
- B29C64/188
- B41J2/04
- B41J2/04505
- B41J2/04506
- B41J2/0451
- B41J2/04558
- B41J2/0456
- B41J2/04573
- B41J2/04575
- B41J2/04581
- B41J2/04588
- B41J2/0459
- B41J2/04591
- B41J2/04593
- B41J2/04596
- B41J3/407
- B41J3/543
- B41J2202/04
- B41J2202/09
- H01L21/67103
- H01L21/67248
- H01L21/6838
- H05K1/0269
- H05K3/0008
- H05K3/125
- H05K2201/09918
- IPC, 25
- B05C11 00
- B05C11 10
- B05C5 00
- B05C9 12
- B05C9 14
- B05D1 26
- B05D3 00
- B25B11 00
- B29C67 00
- B41J2 01
- B41J2 04
- B41J2 045
- B41J2 05
- B41J2 055
- B41J3 407
- B41J3 54
- H01L21 00
- H01L21 683
- H01L23 12
- H01L51 50
- H05B33 10
- H05K1 02
- H05K13 04
- H05K3 06
- H05K3 12