AT452419T
Method and apparatus for liquid-treating and drying a substrate
Abstract
This record has no abstract on file.
Term
Term ended
Expired 26 June 2021, 5.2 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
12 members in 5 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 21469300 | United States of America | P |
Members12
| Document | Office | Kind | |
|---|---|---|---|
| EP1168422A2 | European Patent Office (EPO) | A2 | |
| US2002016082A1 | United States of America | A1 | |
| JP2002164319A | Japan | A | |
| US6632751B2 | United States of America | B2 | |
| US2004010933A1 | United States of America | A1 | |
| US6910487B2 | United States of America | B2 | |
| EP1168422A3 | European Patent Office (EPO) | A3 | |
| EP1168422B1 | European Patent Office (EPO) | B1 | |
| AT452419TThis record | Austria | T | |
| ATE452419T1 | Austria | T1 | |
| DE60140780D1 | Germany | D1 | |
| JP4629270B2 | Japan | B2 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 1870138
Titles2
- German
- VERFAHREN UND VORRICHTUNG ZUM REINIGEN UND TROCKNEN EINES SUBSTRATS
- English
- METHOD AND DEVICE FOR CLEANING AND DRYING A SUBSTRATE
Classification
- CPC, 6
- H01L21/67057
- B08B3/04
- F26B13/10
- F26B13/28
- H01L21/67028
- Y10S134/902
- IPC, 11
- B05D3 04
- B08B3 04
- B08B7 04
- F26B13 10
- F26B13 28
- F26B21 14
- F26B3 04
- F26B5 00
- F26B9 06
- H01L21 00
- H01L21 304