Nova Patents
AT446822T

Method and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate

Abstract

This record has no abstract on file.

Term

Term ended

Expired 27 August 2023, 3.1 years ago.

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126 members in 10 offices

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23097002United States of AmericaA

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EP1314194A2European Patent Office (EPO)A2
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WO03076134A1World Intellectual Property Organization (WIPO)A1
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WO03001581A3World Intellectual Property Organization (WIPO)A3
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CN1468446AChinaA
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AT376477TAustriaT
DE60317080D1GermanyD1
CN100356523CChinaC
EP1875987A2European Patent Office (EPO)A2
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DE60317080T2GermanyT2
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