AT445226T
Methods and apparatus for plasma doping and ion implantation in an integrated processing system
Abstract
This record has no abstract on file.
Term
Term ended
Expired 17 October 2022, 3.9 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
17 members in 10 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 753001 | United States of America | A | |
| 0233091 | United States of America | W |
Members17
| Document | Office | Kind | |
|---|---|---|---|
| US2003082891A1 | United States of America | A1 | |
| WO03038879A2 | World Intellectual Property Organization (WIPO) | A2 | |
| WO03038879A3 | World Intellectual Property Organization (WIPO) | A3 | |
| TW582061B | Taiwan Province of China | B | |
| US6716727B2 | United States of America | B2 | |
| KR20040054745A | Republic of Korea | A | |
| EP1438734A2 | European Patent Office (EPO) | A2 | |
| CN1592944A | China | A | |
| JP2005508088A | Japan | A | |
| CN100407363C | China | C | |
| KR100876049B1 | Republic of Korea | B1 | |
| EP1438734B1 | European Patent Office (EPO) | B1 | |
| AT445226TThis record | Austria | T | |
| ATE445226T1 | Austria | T1 | |
| DE60233956D1 | Germany | D1 | |
| ES2333782T3 | Spain | T3 | |
| JP4587364B2 | Japan | B2 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 2784127
Titles2
- German
- VERFAHREN UND VORRICHTUNG ZUR PLASMADOTIERUNG UND IONENIMPLANTIERUNG IN EINEM INTEGRIERTEN BEHANDLUNGSSYSTEM
- English
- METHOD AND DEVICE FOR PLASMADOTING AND ION IMPLANTATION IN AN INTEGRATED TREATMENT SYSTEM
Classification
- CPC, 4
- H01J37/32412
- H01J37/3171
- H01L21/2236
- H01L21/26513
- IPC, 4
- H01J37 317
- H01J37 32
- H01L21 223
- H01L21 265