AT425277T
Method of forming a sputtering target assembly and assembly made therefrom
Abstract
This record has no abstract on file.
Term
Term ended
Expired 20 October 2023, 2.9 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
18 members in 10 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 41991602 | United States of America | P |
Members18
| Document | Office | Kind | |
|---|---|---|---|
| US2004079634A1 | United States of America | A1 | |
| WO2004038062A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU2003284294A1 | Australia | A1 | |
| WO2004038062A3 | World Intellectual Property Organization (WIPO) | A3 | |
| TW200502416A | Taiwan Province of China | A | |
| EP1556526A2 | European Patent Office (EPO) | A2 | |
| KR20050084863A | Republic of Korea | A | |
| CN1726301A | China | A | |
| JP2006508239A | Japan | A | |
| US7467741B2 | United States of America | B2 | |
| EP1556526B1 | European Patent Office (EPO) | B1 | |
| AT425277TThis record | Austria | T | |
| ATE425277T1 | Austria | T1 | |
| DE60326621D1 | Germany | D1 | |
| CN100526499C | China | C | |
| TWI315747B | Taiwan Province of China | B | |
| KR101047722B1 | Republic of Korea | B1 | |
| JP4768266B2 | Japan | B2 |
2 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Ceased due to non-payment of the annual feeCeasedREN | REN | |
| Publication of translation of european patent specificationUEP | UEP |
Numbers
- Application
- 3776474
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG EINES SPUTTERTARGETS UND SPUTTERTARGET
- English
- METHOD FOR PRODUCING A SPUTTER TARGET AND SPUTTER TARGET
Classification
- CPC, 4
- H01J37/3491
- B21K25/00
- B23K1/0008
- C23C14/3407
- IPC, 3
- B21K25 00
- B23K1 00
- C23C14 34