AT425277T

Method of forming a sputtering target assembly and assembly made therefrom

Abstract

This record has no abstract on file.

Term

Term ended

Expired 20 October 2023, 2.9 years ago.

  1. Priority
  2. Filed
  3. Granted
  4. Expired
  5. Today

18 members in 10 offices

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Priority claims
DocumentOfficeKindDate
41991602United States of AmericaP

Members18

Family members, oldest first
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US2004079634A1United States of AmericaA1
WO2004038062A2World Intellectual Property Organization (WIPO)A2
AU2003284294A1AustraliaA1
WO2004038062A3World Intellectual Property Organization (WIPO)A3
TW200502416ATaiwan Province of ChinaA
EP1556526A2European Patent Office (EPO)A2
KR20050084863ARepublic of KoreaA
CN1726301AChinaA
JP2006508239AJapanA
US7467741B2United States of AmericaB2
EP1556526B1European Patent Office (EPO)B1
AT425277TThis recordAustriaT
ATE425277T1AustriaT1
DE60326621D1GermanyD1
CN100526499CChinaC
TWI315747BTaiwan Province of ChinaB
KR101047722B1Republic of KoreaB1
JP4768266B2JapanB2