AT424622T

Plasma amplifier for plasma treatment plant

Abstract

The plasma enhancing for processing device, comprising a driving the glow discharge plasma improve and/or the ignition to deal with, in particular for (8) filled on the coating to the workpiece the device (1,4), at least one a conductive material is made of hollow body (2,5). The hollow body in midspan, so applying the electric signal when the hollow body; at least a specific voltage range and voltage range, and lower of the geometric state of hollow the inner part of the ignition. The hollow body at least one opening, wherein the opening, a load current capable to the is mile of apparatus, in order to make of the plasma ignition and use in a, or the improve the plasma with a a. The device comprises for hollow body and workpiece electric connection mechanism, wherein hollow body basic the workpiece voltage cable.

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
  4. Today

23 members in 11 offices

This recordMember, by publication datePriority claim1 more office is in the list below

Priority claims1

Priority claims
DocumentOfficeKindDate
7882005SwitzerlandA

Members23

Family members, oldest first
DocumentOfficeKind
WO2006116889A1World Intellectual Property Organization (WIPO)A1
US2006254517A1United States of AmericaA1
EP1878039A1European Patent Office (EPO)A1
KR20080014984ARepublic of KoreaA
CN101233598AChinaA
JP2008540821AJapanA
EP1878039B1European Patent Office (EPO)B1
AT424622TThis recordAustriaT
ATE424622T1AustriaT1
DE502006003016D1GermanyD1
ES2321444T3SpainT3
PL1878039T3PolandT3
BRPI0611436A2BrazilA2
US7798097B2United States of AmericaB2
US2010326356A1United States of AmericaA1
US8307783B2United States of AmericaB2
US2013040072A1United States of AmericaA1
KR20130019006ARepublic of KoreaA
KR101258308B1Republic of KoreaB1
CN101233598BChinaB
US8646409B2United States of AmericaB2
JP5683785B2JapanB2
BRPI0611436B1BrazilB1