Plasma amplifier for plasma treatment plant
Abstract
The plasma enhancing for processing device, comprising a driving the glow discharge plasma improve and/or the ignition to deal with, in particular for (8) filled on the coating to the workpiece the device (1,4), at least one a conductive material is made of hollow body (2,5). The hollow body in midspan, so applying the electric signal when the hollow body; at least a specific voltage range and voltage range, and lower of the geometric state of hollow the inner part of the ignition. The hollow body at least one opening, wherein the opening, a load current capable to the is mile of apparatus, in order to make of the plasma ignition and use in a, or the improve the plasma with a a. The device comprises for hollow body and workpiece electric connection mechanism, wherein hollow body basic the workpiece voltage cable.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
23 members in 11 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 7882005 | Switzerland | A |
Members23
| Document | Office | Kind | |
|---|---|---|---|
| WO2006116889A1 | World Intellectual Property Organization (WIPO) | A1 | |
| US2006254517A1 | United States of America | A1 | |
| EP1878039A1 | European Patent Office (EPO) | A1 | |
| KR20080014984A | Republic of Korea | A | |
| CN101233598A | China | A | |
| JP2008540821A | Japan | A | |
| EP1878039B1 | European Patent Office (EPO) | B1 | |
| AT424622TThis record | Austria | T | |
| ATE424622T1 | Austria | T1 | |
| DE502006003016D1 | Germany | D1 | |
| ES2321444T3 | Spain | T3 | |
| PL1878039T3 | Poland | T3 | |
| BRPI0611436A2 | Brazil | A2 | |
| US7798097B2 | United States of America | B2 | |
| US2010326356A1 | United States of America | A1 | |
| US8307783B2 | United States of America | B2 | |
| US2013040072A1 | United States of America | A1 | |
| KR20130019006A | Republic of Korea | A | |
| KR101258308B1 | Republic of Korea | B1 | |
| CN101233598B | China | B | |
| US8646409B2 | United States of America | B2 | |
| JP5683785B2 | Japan | B2 | |
| BRPI0611436B1 | Brazil | B1 |
Numbers
- Application
- 6721937
Titles2
- German
- PLASMAVERSTÄRKER FÜR PLASMABEHANDLUNGSANLAGE
- English
- PLASMA AMPLIFIER FOR PLASMA TREATMENT PLANT
Classification
- CPC, 6
- H01J37/32009
- C23C14/22
- C23C16/0272
- C23C16/26
- C23C16/50
- H01J37/32018
- IPC, 2
- C23C16 26
- H01J37 32